Air Cylinder: Single Rod Series MB ø32, ø40, ø50, ø63, ø80, ø100, ø125

250, 300, 350, 400, 450, 500 CS2 50 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Symbol Specifications -XA 63 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Change of rod end shape -XB5 Oversized rod cylinder 80 1000 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 -XB6 Heat resistant cylinder (150C

Rotary Clamp Cylinder: Standard ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63 Series MK

625 825 980 1400 1560 0.7 56 77 105 140 139 208 258 341 418 557 731 870 1149 1365 1950 2172 1.0 80 110 150 200 200 298 370 490 600 800 1050 1250 1648 1961 2801 3121 R H R H R H R H R H R H R H R H 12 6 16 8 Clamp part 20 12 Non-rotating accuracy 0.7 to 1.4 During clamping (Retraction end) 25 12 32 16 Made to Order (For details, refer to page 40.) 40 16 50 20 XB6 Head resistant cylinder (150C

Rotary Clamp Cylinder: Standard ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63 MK Series

Accessories -XB6 Heat resistant cylinder (-10 to 150C) w/o auto switch only Note 1) MK-A012Z MK-A016Z MK-A020Z 12 16 20 25 32 40 50 63 Clamp bolt, Hexagon socket head cap screw, Hexagon nut, Spring washer -XC22 Fluororubber seals Note 2) Note 1) Except 12 and 16. Note 2) The bumper is a standard product.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

(Atmospheric conditions) 0.1 Note 1) This data indicates deterioration with age of the average number of particles per operation under the following test conditions. 5.0 Particulate generation [particles/cycle] Cylinder: CYV32-100 Workpiece weight: 5 kg Average speed: 100 mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours.

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

MTS Cylinder: CYV32-100 Workpiece weight: 5 kg Average speed: 100 mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours. Leakage [Pam3/sec] 10-8 MY Note 2) The leakage test result shown is based on a test conducted for 10 minutes after the cylinder was pressurized with helium at 0.1 MPa.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

(Atmospheric conditions) 0.1 Note 1) This data indicates deterioration with age of the average number of particles per operation under the following test conditions. 5.0 Particulate generation [particles/cycle] Cylinder: CYV32-100 Work piece weight: 5kg Average speed: 100mm/s Measurement environment: Operation in the atmosphere after baking at 150C for 48 hours.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

-XB6 Heat resistant cylinder (10 to 150C)*2 -XB7 Cold resistant cylinder (40 to 70C) -XB9 Low speed cylinder (10 to 50 mm/s) -XC4 With heavy duty scraper -XC6l Made of stainless steel Double knuckle joint * Mounting bracket, double knuckle joint, and auto switch are shipped together with the product.

Compact Guide Cylinder ø 12, ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 MGP Series

MGP MGP Symbol Specications 12, 16 1 to 249 12, 16 11 to 249 20, 25, 32 1 to 399 20, 25 21 to 399 40 to 100 5 to 395 32 to 100 26 to 399 Applicable stroke [mm] -XA Change of guide rod end shape -XB6 Heat resistant cylinder (10 to 150C) -XB10 Intermediate stroke (Using exclusive body) -XB13 Low speed cylinder (5 to 50 mm/s) -XB22 Shock absorber soft type RJ series type -XC4 With heavy duty

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Mass Symbol Specifications (kg) XB6 Heat resistant cylinder (150C) 20 25 32 40 50 100 80 63 Bore size (mm) XB13 Low speed cylinder (5 to 50 mm/s) 16.6 26.32 37.46 11.63 7.19 3.84 2.82 1.72 LB Type (Ball bushing bearing, Basic style) Basic mass XC4 With heavy duty scraper 20.58 33 45.98 14.17 9.38 4.87 3.79 2.44 LF Type (Ball bushing bearing, Front mounting flange style) XC6 Made of stainless

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

JMB [mm] Symbol Specications MB MB Bore size Standard stroke Max. manufacturable stroke Stroke range q Stroke range w -XA Change of rod end shape -XB5 Oversized rod cylinder*1 *2 *3 MB1 32 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 Up to 1000 -XB6 Heat resistant cylinder (10 to 150C) -XC3 Special port location*3 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350,

CG1 Series ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Air Cylinder: Standard Type Double Acting, Single Rod

Symbol Specications -XAl Change of rod end shape -XB6 Heat resistant cylinder (10 to 150C)1 CA2 -XB7 Cold resistant cylinder (40 to 70C)2 CS1 -XB9 Low speed cylinder (10 to 50 mm/s) -XB13 Low speed cylinder (5 to 50 mm/s) -XC4 With heavy duty scraper -XC6 Made of stainless steel -XC8 Adjustable stroke cylinder/Adjustable extension type -XC9 Adjustable stroke cylinder/Adjustable retraction

XL

Residence time of water at 20C is 5.5 x 10-6 sec, whereas at 150C it is 2.8 x 10-8 sec, or 200 times shorter. As an example, it took 800 minutes to evacuate moist air from a 150mm x 500mm SMC test chamber to 10-9Torr. The same process took only 4 minutes with dry (20ppb) nitrogen.

High Vacuum Angle Valve

(Option) Amplifier Heater (Option) Ambient temperature: Max. 150C (Sensor) 2-color indicator An optional heater is available. Auto switches are mountable from 4 directions.

44

Sleeveless 65 to 260C (Swivel elbow: 5 to 150C) Superior tube mounting Applicable tubing material FEP PFA Modified PTFE 2-layer soft fluoropolymer Nylon Soft nylon Polyolefin Polyurethane Soft polyurethane Hard polyurethane Soft polyolefin Sleeve Union nut Light tightening torque Comparison with current model 60% down Approx.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Residence time of water at 20C is 5.5 x 10-6sec, whereas at 150C is 2.8 x 10-8 sec, or 200 times shorter.

S Couplers

IDK Fluid: Water, Air Operating temperature range: 5 to 150C Note) This product should not be used with steam. 341 KKA Series Plug (P) Socket (S) Part no. Male thread type Male thread type Body size Body size Part no.

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

The temperature range for the protective label cover is between 40 to 110C, and the temperature range for grease is between 20 to 150C. (However, there is no relationship with the chemicals listed above.) ) Reference data 848 Series CJ5-S/CG5-S Stainless Steel Cylinder Specific Product Precautions 1 Be sure to read before handling.

ISG

Body material in contact with fluid material Fluid Bellows Fluid entering part Non corrosive water/Air/Liquid/Inert gas Phosphor bronze Brass Stainless steel 316 Stainless steel 316 Fluids which do not corrode stainless steel 316 e.g. steam (150C or less) Ambient temperature: 80C or less.

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

operating pressure Ambient and fluid temperature Piston speed Cushion Stroke length tolerance Double acting, Single rod Turbine oil Note) 1.5 MPa 1.0 MPa Made to Order (For details, refer to pages 177 to 207.) 0.18 MPa 0.1 MPa 5 to 60C 5 to 50 mm/s None Symbol Specifications -XAl -XB6 -XB7 -XB9 -XB10 -XB10A -XB11 -XB13 -XB14 -XC4 Special rod end shape +1.0 mm 0 Heat resistant cylinder (10 to 150C

C95

) Symbol -XB6 2 Heat Resistant Cylinder (10 to 150C) Bore size Stroke How to Order Standard model no.