ASR

F20 ASR430F-02-08S,-F20 ASR430F-02-10S,-F20 ASR530F-02-06S,-F20 ASR530F-02-08S,-F20 ASR530F-02-10S,-F20 ASR530F-02-12S,-F20 ASR530F-03-06S,-F20 ASR530F-03-08S,-F20 ASR530F-03-10S,-F20 ASR530F-03-12S,-F20 ASR630F-03-10S,-F20 ASR630F-03-12S,-F20 ASR630F-04-10S,-F20 ASR630F-04-12S,-F20 89 111 17 34.9 57.7 6 63.7 21.5 20 17 R1/4 93 114 18.5 35.9 58.7 18.5 8 45.6 50.6 45.6 23 44.6 39.6 16.8 82 105

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

03 AS320-02 AS220-02 AS220-01 1/4 10-32 UNF Port size M5 x 0.8 1/8 1/4 3/8 1/2 32, 40, 50, 63 80, 100 20, 25, 32, 40 6, 10, 16, 20, 25 Applicable cylinder bore size (mm) Air Fluid 1.5 MPa Proof pressure 1 MPa Max. operating pressure 0.1 MPa Min. operating pressure Ambient and fluid temperature 5 to 60C (No freezing) 10 turns 8 turns Number of needle rotations Controlled flow (Free flow) 105

MRQ

Stroke F(N) F(N) 9 15 105 110 115 14 120 125 130 8 13 140 150 175 7 12 5 200 11 Number of auto switches mounted Rotation Linear motion 2 0 0 1 0S 02 S0 S2 SS 1 20 n0 2 2S nS n2 n Combinations of made to order products No.1 to 4 are available. Consult SMC for further information. 1.5-19

2/3 Port Valve for Various

Base, Body Seal material Aluminum NBR, FKM, EPDM LQ Port A Port A LVN Port P TI/ TIL Port R Energized open Energized closed PA PAX PB Model Manifold base model Port A Rc Port P Rc Port R Rc VVXA311-stations VVXA312-stations VVXA321-stations VVXA322-stations Manifold Manifold stations Manifold B mount 2 to 10 stations 1 8 1 4 1 8 1 4 1 4 1 4 17-3-105 The VX series will be revised shortly.

Stainless Steel One-touch Fittings Series KG

17 12 14 17 16 14.5 17 23 25.5 27 27.5 29 29 3.5 3.5 1 8 6 1 4 11.4 11.4 12.8 10 20 17 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 2 1 4 3 8 24.5 28 28.5 30 30.5 31.5 8 14.9 21.6 15.2 12 23 18.5 R(PT) 21.6 14.9 27 32 30 33 32 34.5 17 10 17 26.5 21 18.5 35.2 25.0 36 63 22 36 37 28 38 31 35.5 33 37 17 12 20.9 17 28.5 22 50.2 39.7 1 2 3 8 1 2 KGL12-04 KGL16-03 KGL16-04 65 22 37 39.5 71 (71) 101 100 (84) 105

Air Cylinder CLA Series Fine Lock Model

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD

Compact Cylinder with Air Cushion Series RQ

Mounting bolt Model C Mounting bolt M5 x 65l x 70l x 75l x 85l x 95l x 120l x 145l M6 x 85l x 95l x 105l x 130l x 155l Model C Mounting bolt M5 x 50l x 55l x 60l x 65l x 75l x 85l M5 x 55l x 60l x 65l x 70l x 80l x 90l M5 x 60l x 65l x 70l x 80l x 90l x 115l x 140l D 65 70 75 85 95 120 145 85 95 105 130 155 D 50 55 60 65 75 85 55 60 65 70 80 90 60 65 70 80 90 115 140 R(D)QB20-15 -20 -25 -

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

Dimensions Fomulae L1 = 10.5n + 45.5 L2 = 10.5n + 63 n: Stations (max. 16 stations) L n 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 L2 (L3) (L4) 66.5 84 112.5 123 77 94.5 125 135.5 87.5 105 125 135.5 98 115.5 137.5 148 108.5 126 150 160.5 119 136.5 162.5 173 129.5 147 175 185.5 140 157.5 187.5 198 150.5 168 187.5 198 161 178.5 200 210.5 171.5 189 212.5 223 182 199.5 225 235.5 192.5 210 237.5

Electric Actuators

With brake: 148 Without brake: 118 Housing With brake: 135 Without brake: 105 29 24.6 Thread size M3 x 0.5 6 4 45 M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

Metal Seal/Rubber Seal Series VQ Body Ported

0 Guide rod Stainless steel 1 2-4-105 Series VQ VQ1000 (VV5Q14)/Plug Lead Unit, Flip Type (F, P, T, S kit) For how to increase the stations, refer to the instruction manual.

MGP

WB WA E A + Stroke Dimensions (mm) 1in = 25.4mm MGPM, MGPL-XB10/Dimensions WA, WB WA WB (mm) Bore size (mm) Standard stroke (mm) 10 to 39st 20 24 40 to 100st 40 44 101 to 200st 110 110 201 to 250st 200 200 10 to 39st 15 17 40 to 100st 25 27 101 to 200st 60 60 201 to 250st 105 105 12 16 10 to 250 WA WB Bore size (mm) Standard stroke (mm) 20 to 39st 24 24 40 to 124st 44 44 125 to 200st 120

Rotary Table/

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing June, 2000 D-SMC.L.A.

Table of Contents

C4 (EXH) port One-touch fitting for 4 For replacement parts, refer to page 2-4-105. 2-4-31 32 For details about certified products conforming to international standards, visit us at www.smcworld.com.

LVQ

N.C. valve LVC 1/46 LVA Q LVH LVD LVQ Rc 1/8 (NPT 1/8) Sensor (breathing) port LQ1 E R (P) LVN LQ3 integral fitting 1/8 (3, 4) TL/TIL Pilot port Rc 1/8 (NPT 1/8) Pilot port LQ3 F K 1/46 1/46 1/46 1/46 A B A B J G L (H) Pilot port Rc 1/8 (NPT 1/8) Threaded type N M C A B D 1/46 1/46 (mm) LVQm0S-Zm Dimensions (N.C. valve) A 25.5 B 46 C 31.5 D 58 E 33.6 F 56.5 G 12 H 105 J 21.8 K 37 L 5 M 7

Series SV

Refer to page 105 for details on electrical connections and electrical circuits with light and surge voltage suppressor. 5. Dimensions are the same as standard products. Figure 1. When shipped: Manual override detail for single solenoid specification Figure 2.

Fieldbus System

[Communication connector D-sub] BUS OUT BUS 1 P 1 P 82.3 BUS IN E 3/5 E 3/5 2 2 B 2 B 2 PWR PWR 4 4 A 4 A 4 Note) These figures show the SS5Y3-10SQA-05D-C6. n: stations 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 103.7 L1 114.2 124.7 135.2 145.7 156.2 166.7 177.2 187.7 198.2 208.7 219.2 229.7 240.2 250.7 261.2 271.7 282.2 292.7 303.2 313.7 324.2 334.7 L2 63 73.5 84 94.5 105

Table of Contents

HA 39 39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 89 89 99 109 125 157 200 225 MXQ16L-10 MXQ16L-20 MXQ16L-30 MXQ16L-40 MXQ16L-50 MXQ16L-75 MXQ16L-100 MXQ16L-125 Note) Note) Note) Refer to the bottom view of MXQ16L-50. 8-5-30 31 Air

0.4

Formula: L1 = 16n + 57, L2 = 16n + 110.5 n: Stations (Maximum 24 stations) n L L1 L2 L3 L4 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 201 217 233 249 265 281 297 313 329 345 361 377 393 409 425 441 185 73 89 105 121 137 153 169 254.5 270.5 286.5 302.5 318.5 334.5 350.5 366.5 382.5 398.5 414.5 430.5 446.5 462.5 478.5 494.5 238.5 126.5 142.5 158.5 174.5 190.5 206.5 222.5

Series AP3500

Vespel is a registered trademark of DuPont. 105 Air operated type Two Step Diaphragm Valve for Ultra High Purity Series AP3571 & 4571 Two step mode metered flow and full open Two separate actuation ports Soft start valve to minimize vacuum chamber pressurization turbulence Metered flow adjustable AP3571: 10 to 200 slpm AP4571: 10 to 350 slpm Pneumatically actuated normally closed Body material

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Elbow Type/Universal Type AS  1F-D Series

D Series RoHS AS-F Model/Specifications TMH ASD AS120-M5 AS120-U10/32 AS420-04 AS320-03 AS320-02 AS220-02 AS220-01 Specifications Model 1/8 1/4, 3/8 Note 4) 3/8 1/2 M5 x 0.8 1/4 10-32 UNF Port size AS Air Fluid 1.5 MPa Proof pressure AS-FE 1 MPa Max. operating pressure KE 0.1 MPa Min. operating pressure 5 to 60C (No freezing) Ambient and fluid temperature AS-FG Controlled flow Free flow 105