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(Tightening torque 0.6 to 0.8Nm) Dipswitch ON 1 2 3 4 5 6 7 8 9 10 Enable or disable of Dip switch MAC ID Baud rate HOLD/CLEAR Setting at the time of shipment 1 2 3 4 5 6 7 8 9 10 Node address: 0 Baud rate: 125kbps Hold/Clear: Clear Dip switch: enable 8 - Setting of MAC ID MAC ID 1 2 3 4 5 6 0 OFF OFF OFF OFF OFF OFF 1 OFF OFF OFF OFF OFF ON 2 OFF OFF OFF OFF ON OFF : : : : : : : 62 ON ON

Printed in Japan 1st printing September, 2000 D-SMC.L.A. P-80 (YG) This catalog is printed on recycled paper with concern for the global environment.

How to Order VS31 3 02 1 5 Thread type Caution Nil Rc N NPT Standard 3 Body size For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

Model Model name IC AMR3000 AMR4000 AMR5000 AMR6000 Bracket 13576 13556 13587 13568 VBA G36-10-01 G46-10-02 Pressure gauge 1.0 MPa (5)(6) Accessory (Option)/Part No.

For manifold type 31, S31, 32, S32 Body option 5 port 3: Common exhaust type for main and pilot valve 0: Pilot valve individual exhaust for the pilot valve (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 R port P, E port R port P, E port Electrical entry 24, 12, 6, 5, 3 VDC 100,110, 200, 220 VAC 24, 12, 6,

Refer to the table below if spacers are required separately. 2 Size 2 2 3 3 4.5 4 6 2 1/4 3 3/8 3 Size 3 3 4.5 4 6 2 1/4 3 3/8 Electrical entry DC AC Female thread type 1 Size 1 1 2 2 3 1 1/8 G Grommet 2 Size 2 2 3 3 4.5 2 1/4 *1 GS Grommet (With surge voltage suppressor) 3 Size 3 3 4.5 4 6 3 3/8 D DIN terminal (With surge voltage suppressor) Fitting type Face seal fitting/Compression

For manifold type 31, S31, 32, S32 5 port (With gasket and screws) D: Push-turn locking slotted type M5: With M5 port sub-plate For sub-plate, manifold type 41, S41, 46, S46 Electrical entry 24, 12 VDC 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC 100, 110, 200, 220 VAC E: Push-turn locking lever type Grommet L plug connector M plug connector M8 connector WO: Without connector cable M: With lead wire (

[Option] How to Order Light/Surge voltage suppressor Rated voltage Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) DC CE-compliant 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC For AC voltage valves there is no S option.

(Example) 10-SYJ3120-5M-M3 VJ3000-13-1 DC AC (50/60 Hz) CE-compliant CE-compliant 5 6 V S R 1 2 3 4 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC 100 VAC 200 VAC 110 VAC [115 VAC] 220 VAC [230 VAC] For type W, only DC voltage is available. Note) CE-compliant: For DC only.

Description Material 1 Body SCS14A (SUS 316) 2 Needle SUS316 L4 3 Lock nut SUS316 4 Valve SUS316 5 Valve guide SUS316, NBR for low temperature L2 L3 6 Spring SUS316 7 Bolt SUS316 8 O-ring NBR for low temperature L5 9 O-ring NBR for low temperature Model Port size D H L1 L2 L3 L4 Note) L5 Mass g MAX. MIN.

Separate switch spacers (BMG2-012) are required to retrofit auto switches (M9 type) on cylinders 25 to 63. 21 m type lead wire is only applicable to D-A93. Refer to page 1360 for details on other applicable auto switches than listed above. For details about auto switches with pre-wired connector, refer to pages 1648 and 1649. Auto switches are shipped together (not assembled).

Table (3) Rated Voltage/Electrical Option Solenoid valve (Port size) Orifice symbol (Diameter) S Class B Rated voltage 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) 5 (8 mm) L Z VXK21 VXK22 VXK23 Model Voltage symbol Voltage With surge voltage suppressor With light and surge voltage suppressor With light AC/ DC 01 (1/8) 02 (1/4) Port symbol (Port size) 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V 220 V 240

ZFC1 ZFC3 ZFC5 ZFC7 1 2 V 2 3.2 V V 3 4 V V 4 6 V V 5 8 V 6 10 V 7 12 V Option Nil None B With bracket Inch size A 1/8" V V B 5/32" V V D 1/4" V V E 5/16" V F 3/8" V Max. Operating Pressure and Operating Temperature Specications Model ZFC1l ZFC3l ZFC5l ZFC7l Max. operating pressure [MPa] 1.0 Port size (Applicable tubing O.D.)

[MPa] ZH30-X185 ZH40-X185 3,500 5,000 ---7 ---7 Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] Suction flow rate [L/min (ANR)] Note 1) Air consumption [L/min (ANR)] Discharge flow rate [L/min (ANR)] 4,500 3,000 ---6 ---6 Discharge flow rate 4,000 Discharge flow rate Vacuum pressure [kPa] Vacuum pressure [kPa] Vacuum pressure Vacuum

VT307N-OMV0001 3 / / VT/O 307 VT/O 307-**1-** 23 / 4 5 5 5 5 56 6 6 78 9 10 -1No.VT307N-OMV0001 1) 2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218

No.VFR3000-OMY0001 5 VFRA3000,4000 / -2,3 -4 -4 -5 -5 -5 -5,6 -6 -6 -7,8 -9 -10 -1VFR3000-OMY0001 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992:

7 I I i.44 089) 1 0 1 1 1 5 1 7 1 8 19 20 1 . 4 6 {37) 2.20 2.95 (56) (75) (94) 4.45 5.2 ( 1 1 3 ) 0 3 2 ) 5.94 ( 1 5 1 1 6.7 ( 1 7 0 ) 8.19 8.94 l2o8) (227J 9.69 {2461 1 0 . 4 3 1 1 . 1 a (265) (284) 1 1 . 9 3 (303) 12.68 \322) 13.43 (341) '14.17 14.92 (360) (379) 15.67 (398) 1 . 0 6 l27l 1.81 2.56 {46) L (6s) 3.31 (84) 4_06 (103) 4.8 1122) 5.55 ( 1 4 1 ) 6.3 (160) 7.O4 079) 7.A 8.54 (198

Default: Gain 9 Bit Bit 3, 2, 1, 0 Value 3 2 1 0 Setting Bit 0 0 0 0 Gain 0 0 0 0 1 Gain 1 0 0 1 0 Gain 2 0 0 1 1 Gain 3 0 1 0 0 Gain 4 0 1 0 1 Gain 5 0 1 1 0 Gain 6 0 1 1 1 Gain 7 1 0 0 0 Gain 8 1 0 0 1 Gain 9 1 0 1 0 Gain A 1 0 1 1 Gain B 1 1 0 0 Gain C 1 1 0 1 Gain D 1 1 1 0 Gain E 1 1 1 1 Gain F * indicates the initial shipping value. 3 Doc.No.DIT-69900-OM005-E Parameter index 0x43 Parameter

When outside of this range, "Er.6" is displayed and "Zero clear" will not be executed.