Compact Guide Cylinder

(M3, M5 type only) Use SMCs recommended grease. Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

Slider Type/Ball Bushing Bearing

x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB Z 194 205 250 ZZ 17.5 19.5 23.5 CY1F CY1H15 CY1H20 CY1H25 CYP 11.3 9.5 D-X Technical

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

17.4H9 10.8 19 M3 x 0.5 29.5 6.5 M4 x 0.7 4.5 M4 x 0.7 8 3.4 3H9 3 1.5 M4 x 0.7 8 MHZ2-20D 22.4H9 12 23 M4 x 0.7 39.8 8.3 M5 x 0.8 8 M5 x 0.8 10 4.3 4H9 4 2 M5 x 0.8 10 MHZ2-25D 13 37 49.7 10.8 M6 x 1 10 M6 x 1 12 5.1 4H9 4 27.4H9 3 M6 x 1 12 M5 x 0.8 AM AL AN AP AQ AR AS AT AU AV AW AX AY AZ Model 1122112211221122+2.2 0 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 +0.1 +0.5 0.2 +0.5 0.2 +0.5 0.2 +

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

Magnetically Coupled Rodless Cylinder

x 0.8 39 31 3 7 21 9.5 4.5 62.5 22 76 34 17 M5 10 6.5 M6 x 1 50 41 3 7.5 25.5 9.5 7.5 74.5 28 90 39 19.5 M5 10 6.5 M6 x 1 60 45 3 7.5 Note 1) FE, FF and HB provide a clearance of 1mm between the body and the floating joint, but do not consider dead weight deflection of the cylinder tube, etc.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

x 0.8 39 31 3 7 21 9.5 4.5 62.5 22 76 34 17 M5 10 6.5 M6 x 1 50 41 3 7.5 25.5 9.5 7.5 74.5 28 90 39 19.5 M5 10 6.5 M6 x 1 60 45 3 7.5 Note 1) FE, FF and HB provide a clearance of 1mm between the body and the floating joint, but do not consider dead weight deflection of the cylinder tube, etc.

MU

54 64 72 Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke(mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8 Depth 11 AL 19.5 23.5 27 32 32 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8 Depth 7.5 M6 X 1 Depth 12 M6 X 1 Depth 11 M8 X 1.25 Depth 13 M8

180

Gripper Cam Type MHY2-20D 2 x M5 x 0.8 thread depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 4H9 + 0.030 depth 4 0 4 x M4 x 0.7 through (Thread for mounting attachment) 8 4 x M5 x 0.8 thread depth 10 10 0.005 0.025 (Mounting thread) 5 9 2 x 5.5 through (Mounting hole) 2 x M5 x 0.8 thread depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 21H9

New

10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 1.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

x 0.5 depth 3 11-/22-MXP10-10 A Width across flats 1.5 H 13 (Plug: MGP12-08-CA001-R) 2 x M5 x 0.8 Piping port Width across flats 5.5 4 x M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4 x M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2 x M5 x 0.8 Piping port M5 x 0.8 Vacuum port 28 27 10 4.5 J depth 1.5 3 6 +0.030 0

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

MXP10-10 A Width across flats 1.5 H 13 (Plug: M-5P) 2-M5 x 0.8 Piping port Width across flats 5.5 4-M3 x 0.5 depth 4 6.5 16.4 M3 x 0.5 7 4 3.7 21 20 8.5 depth 2.5 3 4-M4 x 0.7 A 0.5 19 +0.030 0 depth 2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base

Series KC Self-seal Fittings

Tube size/ Connecting female thread size Body size Type KBV1-M5 KBV1-M6 KBV2-M5 M5 0.8 M6 1 M5 0.8 M6 1 KBV1-04 KBV1-06 KBV2-06 4 6 KBV2-M6 KBV2-R1 KBV3-R1 KBV3-R2 KBV4-R2 KBV4-R3 KBV2-08 KBV3-08 8 Branch elbow module: KBZ 1 8 Rc(PT) KBV3-10 10 Applicable tube O.D. KBV3-12 12 KBV4-12 KBV4-16 Part No.

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) PP TT UU GB TT UU G NW GB 10 N A Z + Stroke M5 x 0.8 (Port) M5 x 0.8 (Hexagon socket head plug) (WW) QQ M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) (WW) GB PP XX XX G Centralized piping Centralized piping 2-M5 x 0.8 (Hexagon socket head plug) 2-M5 x 0.8 (Hexagon socket head plug) VV VV 1.1 S WX 8.4 2-4 Bottom port (Applicable O-ring

CXS

-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35 6 12 4.5 30 12 14.5 46 70.5 9 2-M5 x 0.8 with depth 7.5 32 94 37 100.5 92 35 17.5 2-M6 x 1.0 75 45 8 16 4 30 16 18.5

CXS

2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2-M4 x 0.7 with depth 6 15 54 19 70 52 17 8.5 2-M5 x 0.8 42 25 5 10 2.5 20 8 9.5 38 57.5 9 2-M4 x 0.7 with depth 6 20 62 24 84 60 22 11 2-M5 x 0.8 50 29 6 12 4.5 25 10 12 45 67.5 9 2-M5 x 0.8 with depth 7.5 25 73 29 87 71 27 13.5 2-M6 x 1.0 60 35

Basic Type/Direct Mount Type

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d CYP C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

PSxx-OMM0006CN

(M8(3 )11 ) 01 X M ISE40A 2 K ISE40A -0.11.000 MPa ZSE40A 0.0-101.3 kPa ZSE40AF -100.0100 kPa 1 01 R1/8 (M5) A A N01 NPT1/8 (M5) W1 Rc1/8 B B WF1 G1/81 D D M5 M5X0.8 () E C4 4 C6 6 F + 1IS0228-1 P10/1 X NPN2() Y PNP2() 1 R NPN2 +/ T PNP2 +/ M SI2 P (psi)1 S NPN2 +/ 1 2kPaMPa V PNP2 +/ -9No.PS-OMM0006CN-E /1 1 01 N01 W1 WF1 M5 C4 C6 A A ZS-24-A X X X B B ZS-24-B X X X X X D

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 800 Up to 800 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Up to 1000 Stroke range Bore size (mm) MM XA Y ZZ MA MB MC NA NB P S M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M12 x 1.75 6 6 12 12 16 16 20 5 6.5 8.5 9.5 12.5 15 20 106 128 155 178 195 221 248 11 11 16 16 16 16 20 10 10 12 12 15 15 23 19 26 21 34 86 107 120 138 150 171 198 4 4 4 4 5 5 6 20 25 32 40 50 63 80 M5 x 0.8