Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

LVQ

B A B 2 2 3 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" With reducer Basic size Note 1) Select a fitting the same size as the valve fitting.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

(Terminal no.) (16.6) (23.7) Cable length (L) [m] Connector A (7.0) 1 3 2 4 (12.7) (5.6) 1 1.5 3 3 5 5 8 8 3 2 1 (13.5) 1 4 A 1 2 (6.7) B A 10 (18) B 15 (14.7) 15 16 (30.7) (1 1) L Connector B C 20 (10) Connector D Produced upon receipt of order Connector A terminal no. 1 2 3 Connector C terminal no. 1 2 3 Signal Cable color Red White Black U V W Weight Product no.

Rotary Actuator/Vane Style Series CRB2

(mm) Q1=M Q2 Y L2 max Size (mm) L2-(3 x P) C1=C 10 Q1 X L1 max Size 3 5.5 to 8 Y-1 DY= 10 15 7.5 to 14 X-3 3 3, 4 7.5 to 9 Y-1.5 L2= C2=C 15 20 10 to 18 X-4 3, 4 3, 4, 5 9 to 10 Y-1.5 L1-(3 x P) X= 20 30 12 to 20 X-4.5 3, 4, 5 3, 4, 5, 6 11 to 13 Y-2 L1= Q2=M 30 40 14 to 22 X-5 3, 4, 5, 6 3, 4, 5, 6, 8 14 to 15 Y-4.5 71 Series CRB2 Axial: Top (Long shaft side) Axial: Bottom (Short shaft side

Modular F.R.L. Unit

Accessory Applicable model AR20K AR25K AR30K AR40K AR40K-06 AR50K AR60K Bracket assembly Note 1) AR20P-270AS AR25P-270AS AR30P-270AS AR40P-270AS AR40P-270AS AR50P-270AS Note 3) AR50P-270AS Note 3) Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S AR40P-260S Note 5) Note 5) Round G36-10-01 G36-10-01 G36-10-01 G46-10-02 G46-10-02 G46-10-02 G46-10-02 Note 2) 1.0MPa Note 4) Square embedded

MGP

b a X 0.02 c d X 6H7 e 7 (mm) e 22.5 30 Bore size (mm) 80 100 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 6H7 5 10 Section XX Section XX detail WB WA Z Section XX 4-MM depth ML Bottom view HA: T-slot for hexagon bolt 4-OA through L Z WA 4-NN through 4-OB depth of counter bore 8 Section XX X 0.02 X 0.02 DA VB VA R H U T X PW DB 6H7 depth 10 GC 6H7 depth 10 2-Rc 3/8 PB GB GA 2-Rc 3/8 Q 10 (Plug

Valve Single Unit

Dimensions Applicable fittings fitting d Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" 4 4 148 L dimension 0 98 1 110.5 2 123 3 135.5 No. 5 160.5 6 173 7 185.5 8 198 9 210.5 10 223 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 L dimension 11 No. 235.5 12 248 13 260.5 14 273 15 285.5 16 298 17 310.5 18

Pneumatics Best 2 Auto Switch Guide Applicable Cylinder Series 1 CDA2-X1184 MDB-X1184 CDQ2-XB14 CDG5·S CDJ5·S Cylinder series CDJP2 MDU-Z CDQM CDQS HYDQ CDJ2 CDM2 CDM3 MDB1 HYDB CDG1 CDG3 CDQ2 CDUJ CDA2 CDS1 CDS2 MDB RDQ CQU CDU ø125 to ø200 ø125 to ø160

pin 4 pin 1 pin 2 pin 3 pin 4 pin OUT () DC 2-wire type Brown OUT (+) Blue OUT () OUT ( ) DC 2-wire, Non-polar type Blue Brown Diagnostic output OUT DC 3-wire type Brown Black DC (+) DC () Blue OUT DC 4-wire type Brown Black DC (+) DC () Orange Blue Connector Specifications M8-3 pin Connector model M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 1 2 Pin arrangement 3 4 4 3 3 JIS C 4524, JIS C 4525

Applicable Auto Switch Model

MGQ, MVGQ CXS MGP MY1B MY1C, MY1M MY1H RSH CY1R CY1H ML2B MGF 3 3 3.5 5.5 7.5 6 10 5 10 7 3.5 5.5 8 3.5 5.5 9.5 3.5 10 3.5 7.5 6.5 7 7.5 6 10 7 5 6 6 6 5 5 6 9 5 7.5 Note) Average value at normal temperature including hysteresis.

MHZ

10 12 16 2 2.5 3 4 5 6 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5 10.9 14.1 17.9 21.8 34.6 41.4 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 MHZ2-103 (2)(3) 0 0.2 +0.025 0 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 5.4 MHZ2-163 (2)(3) 0 0.2 0 0.2 0 0.2 0 0.2 0 0.2 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.030 0 7.4 MHZ2-203 (2)(3) 11.6 MHZ2-253 (2)(3) 16 MHZ2

MHZ

2 1 1 7.5 6 4 1 3 2 No setting No setting No setting No setting No setting MHZ2-10 No setting 1 4 2 11 13 5 7 2 5 3 2 2 9 11 3 5 3 1 MHZ2-16 Standard With dust cover Long stroke Double acting Single acting (Normally open) Single acting (Normally closed) 2 4 1 3 2 3 2 1 No setting MHZ2-20 MHZ2-25 MHZ2-32 MHZ2-40 16 18 12 16 9 14.5 3 11 9.5 MHZJ2-6 No setting No setting

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

2 Phase Stepper Motor/Without Motor Brake Series LXP

(A contact) D-F9N D-F9P D-F9G D-F9H D-F9GL D-F9HL D-F9B D-F9NL D-F9PL D-F9BL 0.5 0.5 0.5 0.5 3 3 0.5 3 3 3 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire None Yes (cable length 0.3m) Nil S N.O. (A contact) N.C. (B contact) N.C. (B contact) Auto switch type N.C. (B contact) None Nil N.C.

Integrated Controller

Weight [g] JX-CIS-E-1-S 88 JX-CIS-E-3-S 164 JX-CIS-E-5-S 265 JX-CIS-E-10-S 517 JX-CIA-E-1-S 88 JX-CIA-E-3-S 164 JX-CIA-E-5-S 265 JX-CIA-E-10-S 517 Power supply cable JX CD E S S 1 Connector type Cable length 1 1.5 m 3 3 m 5 5 m 10 10 m Symbol Specifications S Straight A Right angled Connector type: Straight Pin no.

Metal Seal/Rubber Seal Series VQ Body Ported

AXT661-14A-10 3 pcs. Example) Lead wire length 1000 mm VQ1140-5LO-C6 3 pcs. AXT661-14A-10 3 pcs. Connector Assembly Part No. (For DC) Connector Assembly Part No. Double solenoid part no. Socket only (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Double solenoid part no. Socket only (3 pcs.) 300 mm 600 mm 1000 mm 2000 mm 3000 mm Lead wire length Single/3 position part no.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

1) Droop pulses ( 10V/10 pulses) (Note 1) Feedback position ( 10V/1 Mpulses) (Note 1, 3) Feedback position ( 10V/10 Mpulses) (Note 1, 3) 0 1 2 3 4 5 6 7 8 9 A C B Feedback position ( 10V/100 Mpulses) (Note 1, 3) Bus voltage ( 8V/400V)(Note 4) D Note 1.

HRX-OM-X084

2.2.2 HRR010-W-10/20. 2-6 2.3 Function of Parts . 2-7 2.4 Operation display panel . 2-8 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3 Preparation and wiring of power supply cable .3-

ZP

R 10 39.5 23.4 12.5 10 G2 2 M10 04 06 A10 14 3 10 10 2 6 10 85 51 x 1 23 20 123 61 51 30 133 71 40 169 81 77 50 179 91 30 (Rotating angle) 13 16 40 23.9 13 10.5 10 to 32 10 126.5 58.5 S N S U F GN GS 20 123.5 68.5 30 133.5 78.5 50 178.5 98.5 75 50 20 25 46.5 29.3 15.5 12.5 J K Mounting Bracket Assembly Thin Flat Type with Ribs ZP R F Width across flats Q 2 12 3 10 127 59 47 29.8 16 13 50