XMD/XYD Series

permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange type XYD KF(NW) KF(NW) KF(NW) KF(NW), K(DN) KF(NW), K(DN) Main material Body: SCS13(Stainless) Bellows: SUS316L, Main part: SUS304 and FKM (standard sealing material) Note 2) Actuation pressure MPa (G) 0.4 to 0.7 Main pumping 46 200 360 660 1350 Air consumption cm3 for 0.5MPa Note 3) Initial pumping 2.5 12 15.5 30 42

CG1x-OM0006N

M4x0.7x22L 20 NBA-088S 25 NBA-106S (mm) 32 BGS1-032S 40 BAF-04S 50 BAF-05S 63 BAF-06S 80 BAF-08S 100 BAF-10S D-G5BA mm 20 25 32 40 50 63 80 100 D-G5BA 5 5 5.5 6 7 7.5 7.5 8 30% 1 2 2 mm mm D-G5BA A B Hs 20 25 31.5 31.5 24 26 24 25 28 36 36 46 80 28.5 32 40 50 63 32.5 33 37 36.5 45.5 45.5 42 48.5 57.5 56 100 57 46 68 (mm) 10 20 75 15 3. 3-1. 1 2 3 4 5 6 7 8 9 10 1 2 3 416

MX-OMP0051

10 (MXQ6(B)) (MXQ8(A,B,C),12(A,B,C)) (MXQ8(A,B,C),12(A,B,C)) 11 (MXQ16(A,B),20(A,B),25(A)) (MXQ16(A,B),20(A,B),25(A)) 12 13 A 14 15 16 17 18 19 (MXQ6A,8A,12A, MXQ16(A,B),20(A,B),25(A)) 20 21 22 O 19 / 23 24 25 26 27 28 / 29 30 31 32 33 34 35 36 NBR 37 NBR 38 NBR 39 (MXQ6,8(C),12(C)) / 40 (MXQ6,MXQ8(C),MXQ12(C)) 41 NBR (MXQ6,MXQ8(C),MXQ12(C)) 42

MGP

M 10 16. 16-1. 1 22 (mm) gfcm) (mm) 12 RTW-13 5 14 16 RTW-18 6 34 20 RTW-22 8 52 25 RTW-26 10 88 32 RTW-34 14 220 40 RTW-42 14 220 50 RTW-52 17 440 63 RTW-62 17 440 80 RTW-82 22 1,240 100 RTW-102 27 2,000 16-2. 1) 1 1 2) 2 2 11 3) 32 4) 3 3 16-3. 2JIS2 1 , 4 2 3 4 16-4. 1 5 5 6 6 12 () 32 () 32 7 7 () 8 2 1 13 17. 17-1.

Cylinder with lock

Lateral load is applied. 42 - 6. Maintenance 6-1. Construction Fig. 23 Construction No. Description Qty Note No.

CEx-OMG0106

Pause is effective less. (1) Timing between stopping till output is 0.2sec(max). 42 Emergency Stop (Automatic Execution) Timing Chart (Input) Homing SetHome Man'l / Auto Start Program Selection Man'l(+) Man'l(-) Pause (Output) Driving(+) Driving(-) Brake Origin Determined Position Determined Program END Error Cylinder Movement Origin Note: When Emergency Stop is set to be ON, error will

Compact Rotary Actuator

Lm/2) Most sensitive position Auto switch operating range Lm Fig.13 Table 10 Reed auto switch Solid state auto switch Size Rotation A B Operation Hysteresis angle A B Operation Hysteresis angle m angle m angle 90 15 21.5 19 25.5 10 75 3 180 18 31 22 35 63 12 360 25 52.5 29 56.5 90 18.5 27 22.5 31 15 69 3 180 22.5 39.5 26.5 43.5 52 9 360 30.5 64.5 34.5 68.5 90 36 48.5 40 52.5 20 56 4 180 42

Low-Speed Rotary Actuator

Operation range at optimum set position (Lm/2) Most sensitive position Auto switch operating range Lm Fig.11 Table 9 Reed auto switch Solid state auto switch Size Rotation A B Operation angle A B Operation Hysteresis Hysteresis angle m angle m angle 10 90 15 21.5 63 12 19 25.5 75 3 180 18 31 22 35 15 90 18.5 27 52 9 22.5 31 69 3 180 22.5 39.5 26.5 43.5 20 90 36 48.5 41 9 40 52.5 56 4 180 42

Parallel Type Air Gripper

External gripping 11 34 42 65 158 254 force D I.D. Internal 17 45 66 104 193 318 Note 1) Gripping force per finger Effective value (N) gripping force O.D. External gripping S 7.1 27 33 45 131 217 force I.D.

MHx-OMU0057

General requirements) ISO 10218-1992: Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / *3) 1 1.5 *3)1 1 () 3 - 1 1-1. 1)0.5MPa L = 20mm MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* mm 10 16 20 25 32 40 D 0.20.7 0.10.7 MPa S 0.350.7 0.250.7 C oC -1060 mm 0.01 0.02 c.p.m. 180 60 D 11 34 42

Electric Actuator / Slider type 《 High performance Battery-less absolute encoder type 》

10 Max acceleration/deceleration [mm/s2] 5000 Positioning repeatability [mm] 0.01 (Lead H0.02) Lost motion[mm] Note3) 0.05 Lead [mm] 20 12 6 24 16 8 30 20 10 Impact/Vibration resistance [m/s2] Note4) 50/20 Actuation type Ball screw(LEKFS), Ball screw + Belt(LEKFSR L) Guide type Linear guide Operating temperature [] 5 to 40 Operating humidity [%RH] 90 or less(No condensation) Motor size 42

Electric Actuator ／ Slider Type High performance Battery-less absolute encoder

24 16 8 30 20 10 lead [mm] Impact/Vibration resistance [m/s2] note4) 50 / 20 Ball screw (LEFS), Ball screw + Belt (LEFSR Actuation type L) Guide type Linear Guide Static allowable moment [Nm] Note5) 10 27 46 110 Mep (Pitching) 110 10 27 46 Mey (Yawing) 207 20 52 101 Mer (Rolling) Operating temperature range [] 5 to 40 Operating humidity range [%RH] 90 or less(No condensation) Motor size 42

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

200 24 to 150 Max.acceleration/decelerationmm/s2 5,000 Pushing speedmm/s*6 35 or less 30 or less 30 or less Positioning repeatabilitymm 0.02 Screw leadmm 6 8 8 Impact/Vibration resistancem/s2*7 50/20 Actuation type Ball screwBeltTop mounting, Ball screwIn-line Guide type Sliding bearing Operating temperature range 5 to 40 Operating humidity rangeRH 90 or less (No condensation) Motor size 42

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line) Ball screw + Belt (parallel) Guide type Linear guide (Circulating type) Operating temperature range[] 5 to 40 Operating humidity range[%RH] 90 or less (No condensation) Motor Size 28 42

Electric Actuator Slide table ／ High Precision Type High performance Battery-less absolute encoder

Vertical 2] 5000 deceleration[mm/s Position repeatability [mm] 0.01 note4) 0.1 or less Lost motion [mm] Screw Lead [mm] 10 5 2.5 12 6 16 8 Impact / Vibration note5) 50/20 2] resistance [m/s Actuation type Ball screw (In-Line) Ball screw + Belt (Parallel) Guide type Linear guide(circulating type) Operating temperature [] 540 Operating humidity [%RH] 90 or less(no condensation) Motor size 28 42

LEC-OM005xx

Press the MENU key or press the ESC key twice to return to the menu screen. 42 - (2) Operation check by test drive in normal mode When connecting to LECPA, the function Test drive cannot be used. TB Ver2.1 or more: When connecting to LECPA, the item Test drive is not displayed in Test menu. Select the test function Press the MENU key to shift to the menu screen.

SFOD-OMT0005CN

Movement mode Movement mode 3 ABS 1 () INC 2 Speed Speed *1 (mm/s) Position Position (-) (+) [mm] 1 (mm/s 2) Accelerati on Accelerati on Decelerati on Decelerati on 1 (mm/s 2) 100% (%) * Pushing force Pushing force *1 0 1100 (1100 ) INP ON INP ON (:%) Trigger LV Trigger LV *1 -42- (1100 ) ( mm/s) * Pushing speed Pushing speed *1 Moving force Moving force *1 (%) (mm/s)

Step Motor Driver （ Pulse input type ）

Please refer to 6.2 (3) Pulse signal input circuit for details of pulse input circuit. 42 - Define the ratio of electronic gear of pulse signal input. Undefined parameter 11 : "Electronic gear (numerator)"(Default: 1) Undefined parameter 12 : "Electronic gear (denominator)"(Default: 1) Undefined parameter No.11 This product controls LE series motor (800 pulse per rotation).

LEC-OM038xx

26 Same as ID1 ID4 RWrn+27 to 35 Same as ID1 ID5 RWrn+36 to 44 Same as ID1 ID6 RWrn+45 to 53 Same as ID1 ID7 RWrn+54 to 62 Same as ID1 ID8 RWrn+63 to 71 Same as ID1 ID9 RWrn+72 to 80 Same as ID1 ID10 RWrn+81 to 89 Same as ID1 ID11 RWrn+90 to 98 Same as ID1 Same as ID1 ID12 RWrn+99 to 107 Note) "0" is "no send" at mode of data writing. "1" and "2" contain "send" at mode of data writing. 42

JXCx-OMT0034CN

bit1) Rx1A (bit2) Rx1B (bit3) Rx1C Rx2F (1) Rx01 Rx00 0 0 0 1 1 0 41 - (2)READY 1(ON) (3)ALARM 1 1(ON)0(OFF) (4) 0(OFF)1(ON) (5) 1 1(ON)0(OFF) CN2SW OFF [Ry07]ON (6)() ID ON(1)ID OFF(0) Rx0F Rx0E Rx0D Rx0C Rx0B Rx0A Rx09 Rx08 ID8 ID7 ID6 ID5 ID4 ID3 ID2 ID1 Rx13 Rx12 Rx11 Rx10 ID12 ID11 ID10 ID9 (7) (LEC)ID ID 2 ID Rx1B Rx1A Rx19 Rx18 1 0 0 0 1 2 0 0 1 0 3 0 0 1 1 12 1 1 0 0 42