Exhaust Cleaner for Clean Rooms AMP Series

hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110

Smooth Cylinder Series CG1Y ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the low friction, double acting, single rod type of Series CG1  Q .

12 6 5.5 M10 x 1.25 M5 x 0.8 depth 8 Up to 300 20 17 12 19.5 2 22 18 10 50 13 47 13 8 6 M14 x 1.5 M6 x 1 depth 12 Up to 300 26 19 16 27 2 30 25 14 58 14 58 14 11 7 M18 x 1.5 M8 x 1.25 depth 16 Up to 300 32 27 20 32 2 35 30 18 58 14 72 14 11 7 M18 x 1.5 M10 x 1.5 depth 16 Up to 300 38 27 20 32 2 35 32 18 71 20 89 20 13 10 M22 x 1.5 M10 x 1.5 depth 22 Up to 300 50 32 25 37 3 40 40 22 71 20 110

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

flow rate Accumulated flow Display units Note 1) 0 to 9 l, 0 to 9 gal(US) Accumulated flow range Note 1) Power supply voltage Current consumption Power supply voltage for sensor 24 VDC (ripple 10% or less) (With power supply polarity protection) 55 mA or less (Not including the current consumption of the sensor) Same as [Power supply voltage] Power supply current for sensor Note 2) Max. 110

End Lock Cylinder Series CBG1

6 31.3 43 38 M5 x 0.8 depth 8 to 800 40 30 27 19 26 16 15 25 2 13 13 50 8 38.3 52.5 47 M6 x 1 depth 12 to 1200 50 35 32 27 32 20 16.5 30 2 14 14 58 11 44.5 58.5 58 M8 x 1.25 depth 16 to 1200 63 35 32 27 38 20 16.5 32 2 14 14 58 11 45 59 72 M10 x 1.5 depth 16 to 1400 80 40 37 32 50 25 19 40 3 20 20 71 13 53.5 68 89 M10 x 1.5 depth 22 to 1500 100 40 37 41 60 30 20 50 3 20 20 71 16 64.5 79 110

Profile Design ISO/VDMA Air Cylinder Series CP95

E and CR [mm] Mounting type C Mounting type D Bore E1 EW TG1FL l1 L I2 d1 CD MR d2 R1 E2 UB CB 32 45 26 32.5 22 5 12 5.5 30 10 9.5 6.6 6.5 48 45 26 40 51 28 38 25 5 15 5.5 35 12 12 6.6 6.5 56 52 28 50 64 32 46.5 27 5 15 6.5 40 12 12 9 8.5 64 60 32 63 74 40 56.5 32 5 20 6.5 45 16 16 9 8.5 75 70 40 80 94 50 72 36 5 20 10 45 16 16 11 11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110

Vane Type Rotary Actuator Series CRB1 New 63mm Bore Size

With auto switch P411030-5 CRB1LW63 CDRB1LW63 2-12 56 90 83 39 Nut & washer Bolt & washer 8-9.5 75.5 110 39 83 60 5 30 30 90 44 44 52 100

Air Cylinder CP Series Cylinder Positioner Assembly

Srole = 0.79 120mm) waool E CPA1 FN w/o Boot with gool' BORE a EB c o E K M tit N P FD FT FX FZ H zz d 1 n e zz 1 3 8 (35) 3 1 9 (811 2.76 (70) 2.05 (52) 0.79 (20) 1 5 7 (40) 117) MBxl 25 0.24 (7) 0 4 3 { r 1 ) Mr8x1.5 1 1 8 {30J 3.54 (90) 2.76 t70l 035 (9.0) l.12) (90) (50) 4.33 (110) 228 l5a) 6.26 o59) 2.24 (s) 2.05 (52) 0.59 (1s) 2.60 (66) s T o 167 '1.22 {40) o 6 7 tlr) M10x1.25 0.24

Turntable Cylinder Series MGT

12.5 25, 50, 75, 100, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 110

Round Type Low Pressure Hydraulic Cylinder Series CH
M

235 352 470 587 705 822 235 OUT 490 735 980 1225 1470 1715 Mounting nut width across flats (mm) Tightening torque (Nm) M22 x 1.5 490 Bore size (mm) Mounting nut thread 25 12 IN 377 565 754 942 1131 1319 377 20 25 32 40 OUT 45 804 1206 1608 2010 2412 2814 26 804 32 16 M24 x 1.5 60 32 IN 603 904 1206 1507 1809 2110 603 M30 x 1.5 85 38 OUT 1256 1884 2512 3140 3768 4396 1256 40 18 M33 x 1.5 110

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

D-A3 D-G39 D-K39 D-A44 100 + 100 (n 2) (n = 2, 3, 4, 5 ) 35 + 30 (n 2) (n = 2, 3, 4, 5 ) 35 100 10 Mounting nut width across flats (mm) Bore size (mm) Mounting nut thread Tightening torque (Nm) n: Number of auto switches 20 25 32 40 45 M22 x 1.5 26 Theoretical Output 60 M24 x 1.5 32 85 M30 x 1.5 38 Unit (N) M33 x 1.5 41 110 1 3 7 Operating direction Operating pressure (MPa) Bore size (mm

Low Maintenance Filter Series FN1

.001 10 30 50 70 100 Q (l/min) Q (l/min) Filtration Efficiency (Initial Value) Fluid: Potable water Flow rate: 20l/min Liquid temperature: Room temperature Test dust: AC course Amount of dust: 0.2mg/min Test method: Per P/A test method (sanitary test stand, HIAC particle counter) 100 100 ) m ) ) m m 0 ) 0 m (2 (2 (5 (5 20 20 05 05 -0 S0 S0 S0 0S 00080 N-1 N-1 80 N-1 -1 1N 101 101 101 110

Air Fittings Fitting Series For Special Environment

Tubing TRB 110 Flame Resistant One-touch Fittings Series KR Male connector: KRH Inch e l b a c i l p p A . D .

S Couplers Series KK/KK13

/I.D. mm 8/5 9/6 10/6.5 12/8 12.5/8.5 16/11 Symbol 01 02 03 04 06 Symbol 50 60 65 80 85 110 Symbol 04 06 08 10 12 16 Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Tubing O.D. mm 4 6 8 10 12 16 Construction Description Material Plug Description Material Socket Note Note Electroless nickel plated No. 1 14 15 No. 1 2 3 4 5 6 7

Series MXQ Air Slide Table

Series MXQ Air Slide Table Dimensions MXQ 16 104 Air Slide Table Series MXQ Dimensions MXQ 16 105 Series MXQ Air Slide Table Dimensions MXQ 16L/Symmetric Type 106 Air Slide Table Series MXQ Dimensions MXQ 16L/Symmetric Type 107 Series MXQ Air Slide Table Dimensions MXQ 20 108 Air Slide Table Series MXQ Dimensions MXQ 20 109 Series MXQ Air Slide Table Dimensions MXQ 20L/Symmetric Type 110

Compact and Low Profile Design Rodless Cylinder Series MY2H/HT, MY2C, MY3A/3B, CY1F

Overall length (Z) Height(H) Up to 36% reduction MY3A With rubber bumper Height (H) MY1B MY3A/3B MY3B With air cushion Height(H) (mm) Series 16 25 40 63 MY3A MY3B MY1B 27 37 54 84 MY1B With air cushion 37 54 84 116 Up to 53% reduction Max. 53% Weight Overall length(Z+Stroke) Z dimension Weight (kg) (mm) Series 16 25 40 63 Series 16 25 40 63 MY3A MY3B MY1B 0.34 0.87 2.95 8.26 MY3A MY3B MY1B 110

Mechanical Joint Rodless Cylinder/Basic type Series MY3A/3B

Series MY1B October, Overall length(Z) Up to140mm reduction Height(H) Up to 36% reduction With rubber bumper Height (H) With air cushion MY1B MY3A/3B Height(H) (mm) Series 63 16 25 40 With air cushion MY3A MY3B 84 27 37 54 MY1B 116 37 54 84 Weight Up to 53% reduction Overall length(Z+Stroke) Z dimension Weight (mm) (kg) Series Series 16 25 40 63 16 25 40 63 MY3A MY3B MY1B MY3A MY3B MY1B 110

Air Cylinder NCJ2 Series Miniature Stainless Steel Body

O lfthe l@d vohage is 110 VAC, the coniaci prot*tire Box should be !sd, 4srrc I SERIES NCDJ2 D-H7A1. D-H7A2. D.H7B Band Mounted Solid State Type Specifications 2 wie type 24 VDC Belay, Sequencs conlrol 24VDC(10 28VDC) 5 150mA 3V or less 24VDCr1mA or less ONrRed light emitting diode Auto switch/l nternal circuit D-H7A1 t Response time 1 ms or lss .

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Port sizs series ltvrnlooo I Manifold Yalve I Plug'in tYPo ' -'.With teminal block -o-tlz st"tio"s r-r--1O 110 stationg i Grommet Terminal/ DIN Connector a Individual wiring for ach valve. NWsFR4 ,**Jrro -fPo size Manitold valve i Non Plug-in tYPe .

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

0.029 Il \ (13) ll NVJl24 N.O. 0-100(0-7) '10 Torr-0 PSI (10Torr'Qkg cm,) '10 Torr-85 PSI (10 Torr 6kg7cm,) 0.008 NVJl24A 0 * 7 1 ( 0 5 ) 10 Torr-0 PSI (10 Torr'0kgl/cmr) 10 Torr-57 PSI (10 Torr-4kgf/cmr) 0.012 Note) In cas ot NVJ124O, suDply air to "R" port, "P' port will be the exhaust port Solenoid Specifications Snecifications crommet(c) (H), plug connector(L or li,l) Max.120'F (50'C ) 110%

Air Pilot Operated Series NVSA

&i 17a '|.89 (,|8) 2.U (6n 3.54 (90) 1.73 (44) 1.81 (16) 3.54 (90) 1.97 (50) (20) 0.35 (9) 5.12 (13{t) 'r.33 (110) 1.38 (35) 0.67 n4 0.71 (1e) 1.34 (34) 1.18 (30) Mlllimters ln Parsnthses DIRECTIONAL AIR YALVE BASIC CONSTRUCTION NVSA 4924,4e34 NVSA 434 SOLENOID AND AIR PILOTS CAN BE INTERCHANGED Due to th modular design ot the Series NVS/NVSA 4024 lhrough 4044 valves, interchanging solenoids