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D E SET HYS (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Note 1) The above dimensions are for ZZQ1-BSB.

ZQ-OM00801-D Manifold Vacuum Pump Unit D CE/UKCA -compliant Note 3) CE/UKCA compliant products are not available for 1, 2, 3 and 4. 12 - Doc. no. ZQ-OM00801-D B KQ2S23-M5N1 KQ2S04-M5N1 KQ2S04-M5N1 KQ2S06-M5N KQ2S06-M5N KQ2L04-M5N1 KQ2L23-M5N1 KQ2L04-M5N1 CE/UKCA compliant D CE/UKCA marked Note) CE/UKCA compliant: for DC only. 13 - Doc. no. ZQ-OM00801-D Manifold 14 - Doc. no.

Pulse train signal specifications (Open collector input and differential input are common) 5 s or more 24 V 21.6 V to 26.4 V 5 V 4.75 V to 5.25 V PP3s or less 5 s or more 3s or less 16 s or more 28 - 7.4 Parallel I/O signals (Pulse Input Type) (1) Input side (Pulse input type) Function Description Common terminal for the input signal power supply.

113 g() 55 g( ) 1 2Vcc0 V 3[PSE530]1826 -36No.PS-OMH0005CN-D () + +48 48 -37No.PS-OMH0005CN-D A B C D Anm.: Die Angaben knnen ohne vorherige Ankndigung und ohne dass dem Hersteller daraus eine Verpflichtung entsteht, gendert werden. 2009-2011 SMC Corporation Alle Rechte vorbehalten No.PS-OMH0005CN-D

D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V

E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS k Pa MO D E SET HYS Misc. (72.4) Attached washer (63.6) (60.1) Attached washer SMC SMC SMC SMC 10.2 V V V V V 28.8 8.5 21 10 9 8.5 9 81 Vacuum port (V port) Note 4) 107 (M5 x 0.8) Dimensions Note 1) The above dimensions are for ZZQ1-BSB.

Printed in Japan. 1st printing October, 2000 D-SMC.L.A. P-80 (D)

(c) COM A byte (d+3) byte (b+2) Word(c+1) COM B byte (d+5) byte (b+4) Word(c+2) COM C byte (d+7) byte (b+6) Word(c+3) COM D : : (c, d=0 to) NOTE Read carefully the user manual of PLC which is used as a master.

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

A circuit to which power is supplied by a secondary coil of a insulated transformer that meets the following conditions Maximum voltage (No load): 30 Vrms (42.4 V peak) or less Maximum current: 8 A or less (including short circuit) Limited by circuit protector (such as fuse) with the following ratings Voltage without load Maximum current (V peak) rating (A) 0 to 20 [V] 5.0 Over 20 [V] up

(Brown) +24 V TD+ TD0 V INPUT OUTPUT DA DB DG SLD FG COM A Pressure welding for branch connector The method of pressure welding for branch connector is explained. (1)Components Internal circuit +24 V RD+ RD0 V FG Insulating cap Brown Black White Blue DC-DC converter (Insulation) Pin no. display Power supply for output +24 V TD+ TD0 V +24 V 0 V INPUT OUTPUT COM D Power supply for input and

PFMB7--CNPN (1 output) + Analogue output type (4 to 20 mA) PFMB7--DMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage drop: 1 V or less C: Analogue output: 1 to 5 V Output impedance: 1 k D: Analogue output: 4 to 20 mA Maximum load impedance: 600 NPN (1 output) + External input type PFMB7--GMaximum applied voltage: 28 V Maximum load current: 80 mA Internal voltage

The power supply for the unit should be 0 V as the standard for both power supply for output as well as power supply for control/input. VQZ SQ VFS +24 V +24 V Power supply for output Power supply for output VFR 0 V 0 V Power supply for control/input +24 V Power supply for control/input 24 V VQ7 4. Do not install a unit in a place where it can be used as a foothold.

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Symbol Element length Element length L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Element seal material Note 1) B C D Element seal material Non-asbestos Fluororesin NBR FKM A Note 2) T N V Symbol Port size Note 1) Not used with fiber elements.