Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 1000mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSS1-S*, 100 to 120 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 700mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSS1-S*, 100 to 120 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 600mm, Motor Option: None, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSC2-S*, 200 to 230 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 300mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: LECSB2-S*, 200 to 230 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 1000mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSB1-S*, 100 to 120 Power Supply Voltage, I/O Connector: -

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 1500mm, Motor Option: Lock, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSB1-S*, 100 to 120 Power Supply Voltage, I/O Connector: -

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 400mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 2m, Driver Type: LECSB2-S*, 200 to 230 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 500mm, Motor Option: Lock, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSB1-S*, 100 to 120 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 700mm, Motor Option: Lock, Cable Type: Robotic, Flexible, Cable Length: 10m, Driver Type: LECSB2-S*, 200 to 230 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 1200mm, Motor Option: None, Cable Type: Standard, Cable Length: 2m, Driver Type: LECSB2-S*, 200 to 230 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 16mm, Size 63: 20mm, Stroke: 700mm, Motor Option: Lock, Cable Type: Standard, Cable Length: 5m, Driver Type: LECSB1-S*, 100 to 120 Power Supply Voltage, I/O Connector: Connector

Size: 63, Motor Type: S7 [AC Servo Motor (Absolute Encoder) 200W], Lead, mm: Size 40: 8mm, Size 63: 10mm, Stroke: 1000mm, Motor Option: None, Cable Type: Robotic, Flexible, Cable Length: 5m, Driver Type: LECSB2-S*, 200 to 230 Power Supply Voltage, I/O Connector: Connector

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Nominal Thread: 63-18-150 (M18X1.5), Material: S (Silicone Rubber)

Type: GKM, Applicable Bore: 16-32 (For 50 & 63 Bore)

Pad Diameter: 63 (ø63), Pad Material: F (FKM), Stroke: 30mm

Pad Diameter: 63 (ø63), Pad Material: N (NBR), Stroke: 10mm

Type: CS (w/Ball Joint), Bore Size: 5063 (63 Bore)

Mounting: B (Basic), Model: 63 (20mm), Thread Type: TN (NPT)

Mounting: L (Axial Foot), Model: 63 (20mm), Thread Type: Rc