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How to Replace the Components 16 to 17 10-1. Bowl assembly Replacement 16 10-2. Element Replacement 17 11. Disassembly Drawing 18 12. Dimensions 19 -1- Mist Separator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

How to Replace the Components 16 to 17 10-1. Bowl assembly Replacement 16 10-2. Element Replacement 17 11. Disassembly Drawing 18 12. Dimensions 19 -1- Micro Mist Separator Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

Incorrect handling of the product may cause breakage or operation failure of the equipment or device. 3) Do not touch the product when operating at high temperature (40 to 60oC). The operators may get burnt. Be sure to confirm that the temperature of the container or operating part is reduced to 40 oC or less to prevent burns. 4) Periodically check the bowl internal surface for dirt.

A Dimensions COM 16 KQ2 06-M5 HLT SY Operator Setting 16 KQ2H/L07-M5 This operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.

Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) LEFS16, 25, 32, 40 Series LEFS RoHS How to Order LEFS 16 100 B 1 1 S 6N 2 ' . / 4 0 ( + Size 2 Motor type 16 25 32 40 Symbol Type Applicable size Compatible controllers/driver LEFS16 LEFS25 LEFS32 LEFS40 LECP6 LECP1 LECPA Step motor (Servo/24 VDC) Nil ) ) ) ) Servo motor (24 VDC) A ) ) LECA6

When connecting piping to a product, avoid mistakes regarding the connecting direction of the product. 16 VXB Series Specific Product Precautions 3 Be sure to read this before handling the products. Refer to the back cover for safety instructions.

No.PF-OMP0002-H PRODUCT NAME Digital Flow Switch MODEL / Series / Product Number PFMB7501 PFMB7102 PFMB7202 Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Outline of Settings [Measurement mode] 21 Flow Setting (set value only) of OUT1 OUT2 [3 step

OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -35No.PF-OMP0001CN-F [F 2] OUT2 OUT2 (28 )(29 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] OUT2 [---] [oU2][] [2ot][] 37 38 39 40 -36No.PF-OMP0001CN-F a.

Table 4 20 25 32 40 Rod seal CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS The rod seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year.

.**. 29 (2-3) LECPLECA .32 1 - (2-3-1) LECPA . 32 (2-3-2) LECPA . 32 (2-3-3) LECPA . 34 5.4 .36 5.4.1 .36 (1) .36 (2) .38 5.4.2 .40 (1) .40 (2) .41 6. .42 6.1 .42 (1) .42 (2) .44 (2-1) LECPLECA .44 (2-2) LECPLECA .45 (2-3) LECPA .46 6.2 .47 (1) .47 (2) .47 (3) .48 (4) .50 (5) .51 (6) .52 (7) .54 (8) .54 6.3 .56 (1) .56 (2) .56 (2-1) .56 (2-2) .56 (3) .57 (3-1) .57 (3-1-a) TB Ver1.**. 57 (

Table 4 20 25 32 40 Rod seal CM20Z-PS CM25Z-PS CM32Z-PS CM40Z-PS The rod seal is not delivered in sealed packaging for storage independently, so it must be used within 1 year.

Cushion stroke Model Stroke(mm) REA25 30 REA32 30 REA40 35 REA50 40 REA63 40 4-2) Stroke adjustment This mechanism is not intended for adjustment of the cushion effect (smooth start-up, soft stop). This mechanism is for matching of the cylinders stroke end position to the mechanical stopper, etc. ,of a machine.

Compact Cylinder/Non-rotating Rod: Double Acting, Single Rod Series CQ2K Replacement Procedure is 12, 16, 20, 25 32, 40, 50, 63 P.290 Construction Standard (40 to 63) !4 !5 !3 !4 !5 !3 With auto switch Without auto switch The numbers are the same as the "Construction" of the CQ2 series catalog (CAT.ES20-205). *BLUE links will lead to purchase pages.

Compact Cylinder/Non-rotating Rod: Double Acting, Double Rod Construction Series CQ2KW 12, 16 20, 25 32, 40 50, 63 Replacement Procedure is P.290 Standard (40 to 63) Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !6 !8 !5 !7 !6 !8 !5 !

Compact Cylinder/Standard Type: Double Acting, Double Rod Construction Series CQ2W 12, 16, 20 25, 32, 40 50, 63, 80 100 Replacement Procedure is P.290 Actuators Modular F.R.L. Pressure Control Equipment Air Preparation Equipment Industrial Filters Replacement Procedure Actuators Modular F.R.L. Pressure Control Equipment Industrial Filters !1 !3 !2 !1 !3 !

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke 1 5 0.3 Model CYP15 CYP32 Stroke (mm) 25 30 CYP15 CYP32 1MPa = 145 psi 1 kg = 2.2046 lb 1Nm = 0.7375 ftlb 1in = 25.4mm 16 17 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke 1 5 0.3 Model CYP15 CYP32 Stroke (mm) 25 30 CYP15 CYP32 1MPa = 145 psi 1 kg = 2.2046 lb 1Nm = 0.7375 ftlb 1in = 25.4mm 16 17 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

/humidity Note 1) HRZ002-L HRZ004-L HRZ008-L HRZ001-H HRZ002-H HRZ004-H HRZ008-H HRZ002-W HRZ008-W Water-cooled refrigeration R404A (HFC) PID control Temperature: 10 to 35C, Humidity: 30 to 70%RH 20 to 40C: FluorinertTM FC-3283/GALDEN HT135 20 to 90C: FluorinertTM FC-40/GALDEN HT200 FluorinertTM FC-3283/GALDEN HT135 FluorinertTM FC-40/GALDEN HT200 Circulating fluid Note 2) Temp. range setting

REC20-PS REC25-PS REC32-PS REC40-PS 20 25 32 40 REC20-PS REC25-PS REC32-PS REC40-PS !5 16 !7 18 !9 @0 @1 22 @3 Cylinder tube gasket NBR 2 Set of left nos. !5, !7, !9, @0, @1, @3 Hexagon socket head set screw Carbon steel 1 Nickel plated Rod seal A NBR 1 Rod seal B NBR 1 Seal kit includes a grease pack (10 g). Order with the following part number when only the grease pack is needed.

Grease pack part no.: GR-S-010 (10 g), GR-S-020 (20 g) 95 Mechanically Jointed Rodless Cylinder/Linear Guide Type Series MY1H-Z 25, 32, 40 Construction With End Lock: 25 to 40 !2 i !4 o The numbers are the same as the "Construction" of the MY1H series catalog (CAT.ES20-221). *BLUE links will lead to purchase pages. Call or email us at sales@smcpneumatics.com for request.