OMR0032

Operation . 53 11.1 Return to origin position . 53 11.2 Positioning operation . 55 11.3.

Modular Pressure Control Equipment F.R.L. Replacement Procedure

(AR20(K)/25(K)/30(K)/40(K)) AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR20(K)/25(K)/30(K)/40(K) Hook spanner Nominal Tightening torque 2.0 0.2 Nm 2.5 0.2 Nm 3.5 0.3 Nm 4.0 0.4 Nm AR20(K) AR25(K) AR30(K) AR40(K) AR20(K) AR25(K) AR30(K) AR40(K) 34/38 40/42 52/55 52/55 Assembly (Bracket assembly) 1) Mount the bracket to the product.

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D 40 55 74 H 3.2 4.5 4.5 J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B 78 94 112 C 39 47 56 F 100 124 144 Ea 1 1 1 Eb 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 55 60 72 22 22 32 M6 x 1 M6 x 1 M8 x 1.25 5.5 5.5 6.5 12 12 16 9.5 9.5 11 Mounting direction (2) B1 28 40 44 Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Applicable cylinder MY1B25 MY1B32 MY1B40 A2 B2 C2 D2 F2 K2 Q2 Part

ZSE F/ISE

0.001 0.001 0.02 1 0.1 ISE50 (Positive pressure) 0.000 to 1.000 MPa 0.100 to 1.000 MPa 1.5 MPa 0.001 0.01 0.01 0.1 Rated pressure range Operating pressure range and regulating pressure range Proof pressure kPa MPa kgf/cm2 Note 1) Setting/Display resolution ZSE ISE bar psi mmHg inHg PSE Z I SE3 Fluid that will not corrode stainless steel 630 and 304 12 to 24 VDC, Ripple (p-p) 10% or less 55

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

W is width across flats dimension. 49 36 10 10 39.5 48.5 133 51 55 58.5 17-5-110 15 Series LQ1 High Purity Fluoropolymer Fittings Union: LQ1U Metric sizes Applicable tubing O.D.

Basic Type/Direct Mount Type

65 83 95 HB 10.5 14 17 21 23.5 29 36 45 51 B 6.5 8 9.5 9.5 11 11 14 14 GW 18.5 25.5 31.5 37.5 42.5 53.5 63.5 81.5 93.5 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 H 19 26 32 39 44 55 67 85 97 CB 2 2 2 3 3 3 5 5 5 CR 0.5 0.5 0.5 1 1 1.5 2 2 3 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 Model CY3R6 CY3R10 CY3R15 CY3R20 CY3R25 CY3R32 CY3R40 CY3R50 CY3R63 L 34 38 53 62 70 76 90 110 118 W 20 20 25 40

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g~ 57 WS I Bore F (mm) ' H IA IB ' L W N S WC ZZ GA GB 40 44 52 52 47 97 58 97 72 97 52 55 -49 58 49 58 37.5 43.5 49.5 37.5 43.5 I 5 7 30 10 30 10 30 12 194 194 194 52 60 52 74 50 55 63 69 49.5 5.5 * Pos$lble to fab(fcate the dImenSIOns of H and L othef than the standafd. N type (Semi-standard) 1 S mba. H L ZZ ~prE! .

NAAMS Standards Compliant

45 10 55 52 104 25 25 52 54 78 146.5 148.5 104.5 138 With front mounting hole Metal cover type NA0.05 NC NB0.05 Release point Y VC0.1 VB0.1 K +0.1 0 Metal cover open 2 x V H7 depth I 4 x NN depth S VA0.02 [mm] Bore size I K NA NB NC NN S V VA VB VC 50 12 55 13 36.5 9.5 M8 x 1.25 11 8 30 32 63.5 63 15 55 13 36.5 15 M8 x 1.25 13 8 30 32 63.5 4 CKZ3N -X2742A -X2568 Dimensions: With Manually

Vacuum Pad

62.5 10.3 10.9 10.3 10.9 12.3 13.4 12.3 13.4 36.5 44 55 62.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

Series HAW Water Cooled Aftercooler 1

Therefore, design within the rated water flow range (refer to the model column). 37 37 55 55 75 75 110 110 How to Calculate Outlet Air Temperature Correction Factor by Cooling Water Temperature Air pressure 0.7 MPa Outlet air temperature can be calculated with inlet air temperature, cooling water temperature and amount of air in the following procedure.

Refrigerated Air Dryer

10. 6 Data Inlet air temperature Data Outlet air pressure dew point Data Inlet air pressure Series IDF Series IDU Series IDF, IDU Series IDF, IDU Correction factor Correction factor Correction factor Correction factor Inlet air temperature (C) Inlet air temperature (C) Outlet air pressure dew point (C) Inlet air pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 25 30 35 40 45 50 45 50 55

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 D FC GC 6 8 11 15 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 28 37 54 71 80 9 12.5 16.5 20 24.5 2.6 3.3 5.1 6.8 8.6 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

MQQ

LZ RHC Rod side flange style: MQQLF 10, 16, 20 MK(2) Bore size (mm) Stroke range (mm) A B FD FT FV FX RS Q G 10 10 to 40 61.5 79.5 4.5 5.5 30 45 FV 16 10 to 60 70.5 90.5 6.6 8 39 48 RS H A 20 10 to 60 79 99 6.6 8 42 52 FT FX 25 10 to 50, 75, 100 84.5 106.5 5.5 8 48 56 L B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55

1

+ 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mWV D-M9mAV 25 25 35 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 35 + 35 (n 2) (n = 2, 3, 4, 5) *1 When n is an odd number,

Magnetic Separator FHM Series

EM040-12 1/4, 3/8, 1/2 55 x L90 Oil filter Note) In the table above 1 indicates nominal filtration and 2 indicates hydraulic fluid type.

EXxx-OMN0037CN

M12 (4 ) No. 1 LED 2 () 3 4 5 () -15No.EX-OMN0037CN-A 1 24 V() 2 + 3 0 V() 4 5 FE M12 (4 ) 1 24 V 2 A/D DC24 V 3 0 V 4 5 FE FE 100 k 50 IP67 -16No.EX-OMN0037CN-A 0V 2 EX600 4 (-)2 (+) 4 3 4 -17No.EX-OMN0037CN-A LED LED OFF 0 1 () (SI ) -18No.EX-OMN0037CN-A EX600-AXA M12 (5 ) 1 2 (1 /) () DC24 V Class22 A 0.5 A/ 12 bit 010 V15 V05 V 020 mA420 mA 16 bit -1010 V-55

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

Supply port PD (mm) D FC GC 6 8 11 15 A B C EA EB FA FB FD FE FF FG GA GB GD 83 111 155 200 256 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M3 x 0.5 M5 x 0.8 M6 x 1 22 34 43.5 58 73 2.6 3.3 5.1 6.8 8.6 9 12.5 16.5 20 24.5 28 37 54 71 80 4 4.5 6.5 10 12.5 7 9.5 12.5 17 22 16 21 29.5 40 47 15 19 25.5 37 51 34 44 64 84 95 18 23 28.5 41 55 57 26 35 48.5 66 87 6 (Effective depth

MQQ

LZ RHC Rod side flange style: MQQLF 10, 16, 20 MK(2) Bore size (mm) Stroke range (mm) A B FD FT FV FX RS Q G 10 10 to 40 61.5 79.5 4.5 5.5 30 45 FV 16 10 to 60 70.5 90.5 6.6 8 39 48 RS H A 20 10 to 60 79 99 6.6 8 42 52 FT FX 25 10 to 50, 75, 100 84.5 106.5 5.5 8 48 56 L B + Stroke RZQ FZ 28 10 to 50, 75, 100 104 126 5.5 8 54 62 A + Stroke 2-FD MI W S Bore size (mm) FZ L M 25, 28 CEP1 10 55

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

to 500 up to 600 up to 600 up to 750 up to 750 19.5 27 32 32 37 37 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 4 4 5 5 5 5 16 16 16 16 16 16 15 21 21 21 30 30 6 6 7 7 10 10 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 45 52.5 59 64 76.5 86 33.5 38.5 45 50 62 71.5 47 51 58 58 72 72 21 27 27.5 28.5 37 37 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

Foot/(L) Cushion valve Port LY 4-LD LH LT X Y X Y LX LS + Stroke LZ ZZ + Stroke (mm) Foot Stroke range Bore size (mm) LX LT LS LH LD Y ZZ X LZ LY 32 40 50 63 80 100 53 59 72.5 82.5 32 38 46 56 72 89 3.2 3.2 3.2 3.6 4.5 4.5 128 132 148 148 174 178 30 33 40 45 55 65 7 9 9 12 12 14 9 11 11 14 14 16 162 170 190 193 230 234 22 24 27 27 30 32 50 55 70 80 100 120 up to 700 up to 800 up to 1000 up