Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Solenoid Specifications 100, 200 VAC, 50/60 Hz; 24 VDC Coil rated voltage How to Calculate the Flow Rate 15 to +10% of rated voltage Allowable voltage fluctuation For obtaining the flow rate, refer to page 31-10.

VER2000/4000

(C) Coef. for compensation 20 10 0 10 30 40 50 60 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 1.08 1.06 1.04 1.02 0.98 0.97 0.95 0.94 Bore size (mm) Current A VER4000 How to Use DIN Terminal Wiring procedure 1.

NAMUR

Solenoid is not energized Port Pressurized Coil insulation Class B Port exhausted Solenoid is energized Power consumption 0.5W AXT842-30-24A LOCKING TYPE (TOOL REQUIRED) 21.5 Dimension VFN2120N-B-02N-X36A 79 55.5 2xUNF #10-32, M5x0.8 CAPTIVE MOUNTING SCREW M12 CONNECTOR Purpose of the throttle plate: 156.5 37 24 18.5 1.

V

Stations Common supply and exhaust M a i n t e n a n c e a n d a d j u s t m e n t i s p o s s i b l e w i t h o u t d i s a s s e m b l y o f the manifold H O W T O O R D E R NZM V A C U U M E J E C T O R M A N I F O L D (N)ZZM B NUMBER OF STATIONS 01 ... 1 Station 02 ... 2 Stations to 10 ... 10 Stations EXHAUST PORT 04 ... 1/2 06 ... 3/4 PORT THREAD Nil ...PT* Remove (N) when ordering

TS/TISA

Refer to pages 15-18-3 to 4 for Safety Instructions and Common precautions on the products mentioned in this catalog, and refer to pages 15-1-10 to 11 for Precautions on every series. Min. bending radius (mm) 12 15 23 27 31 60 12 15 23 30 40 Operating temperature 20 to +60C (No freezing) Nylon 11, Nylon 12 Material Caution 1.

Intrinsically Safe Valve 5 Port Solenoid Valve Single Unit Body Ported Series 53-SY5000/7000/9000 Electrical Entry TT Hazardous Location Class I, II, III Division 1 Groups A, B, C, D, E, F, G Electrical Entry L and LL Hazardous Location Class I Division 1

/N.O.) 2(B) 4(A) C Note 2) L-type plug connector with cover Lead wire length Lead wire length 300 mm Symbol 3 6 10 15 20 30 100 Note LL 5(EA) 3(EB) 1(P) Note 1) 3-position type is not available for the 53-SY9000 series.

Electric Gripper 2-Finger Type LEHZ10, 16, 20, 25, 32, 40 Series LEHZ ® Step Motor (Servo/24 VDC)

2 r 2-finger type q Size w Motor size e Lead Finger options 10 16 20 25 32 40 K Basic Nil L Note) Basic Compact Nil: Basic (Tapped in opening/ closing direction) Note) Size: 10, 16, 20, 25 only t Stroke [mm] y Finger options Basic (Tapped in opening/closing direction) Side tapped mounting Through-hole in opening/closing direction Flat fingers Nil A B C Size 10 16 20 25 32 40 Stroke/both sides

T/TIA

(mm) 4 4 6 6 8 10 12 16 3.18 4.76 6.35 9.53 12.7 Tubing I.D.

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

sPower supply voltageResponse timeHysteresisResistancePF2A310/3115 to 105 l/min5 to 105 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 999999 l?5% F.S. or less?1% F.S. or less?1% F.S. or less (15 to 35C, based on 25C)?

Smooth Cylinder Series CM2Y ø20, ø25, ø32, ø40 Specifications and auto switch information not provided below are the same as those of the standard, double acting, single rod type of Series CM2 .

13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 32 M14 x 1.5 (mm) Boss-cut ZZ Bore size (mm) 20 25 32 40 103 107 109 138 10

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?

sResponse timeHysteresisPower supply voltageResistancePF2A711Air, Nitrogen5 to 105 l/min5 to 105 l/min10 to 100 l/min1 l/min1 l/pulsel/min, CFM x 10-1l, ft3 x 10-10 to 50C?5% F.S. or less?2% F.S. or less?3% F.S. or less (15 to 35C, based on 25C), ?5% F.S. or less (0 to 50C, based on 25C)160 mA or less290 g3/8Heater type3-digit, 7-segment LED?