Proper auto switch mounting position (Detection at stroke end) D-C73 D-H7B / H7A1 8.5 8.5 Auto switch Auto switch 16 16 approx. Hs approx. Hs A 26 B A 29 B D-B54 D-K59 / G59 Auto switch Auto switch 12 approx. Hs 12 approx.
Hs B 30 MLGP Auto Switch Proper Mounting Position (mm) ML1C Auto switch model D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AVL D-Z7/Z80 D-Y5/Y6 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL D-A5 D-A6 D-A3 D-A44 D-G39 D-K39 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-F59F D-A59W D-F5NTL Bore size (mm) A A A B A B A B A B B A B B 125 140 160 180 200 4 4 8 8 1.5 1.5 0 0 2 2 4.5 4.5 9.5 9.5 4 4 8 8 1.5 1.5 0 0 2 2 4.5
D-C7/C80 D-H7/H7W/H7F/H7BA 8.5 Hs Hs 8.5 16 16 B Auto switch 29 A 26 A Auto switch B D-C73C/C80C D-H7C Hs 8.5 Hs Auto switch 16 16 B Auto switch 38.2 A A 36.7 B D-G5/K59/G5W/K59W/G5BA/G59F/G5NT D-B5/B64/B59W Hs Hs 12 Auto switch 12 24.5 24.5 A B A B Auto switch 33 6.5 33 D-A3/G39/K39 D-A4 Hs Auto switch 36 Hs 36 Auto switch B A B A 49 49.5 G 1/2 (applicable cable 6.8 to 11.5) G 1/2 (applicable
(different sides or same side) 15 25 1 pc. 10 Auto Switches / Proper Mounting Position and Height for Stroke End Detection Reed switch Solid state switch A B Hs A B Hs Ht Ht Auto switch mounting position Auto switch mounting height D-A5 D-A6 D-A59W D-F5, D-J5 D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5, D-A6 D-A59W D-F5NTL D-F5W, D-J59W D-F5BAL, D-F5NTL Bore size (mm) Bore size (mm) Hs Ht Ht Hs B
Hs A B (mm) D-M9 D-M9W D-M9V D-M9WV D-A9V D-A9 Bore size (mm) A B A B W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 38.5 10 <15> 10.5 8.5 (6) 10 <15> 10.5 36.5 16.5 17.5 7.5 16.5 17.5 42 12.5 13.5 11.5 (9) 12.5 13.5 40 The value in parentheses [ ] is for 5 mm stroke with
A Stop Position) and Mounting Height D-A7 D-A80 =U B + First-stage stroke =U B A D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-Y7NTL D-F7BAL B + First-stage stroke =U SMC =U B A D-A73C D-A80C D-J79C B + First-stage stroke =U =U B A D-A79W D-F7WV D-F7V D-F7BAVL B + First-stage stroke =U SMC =U B A 11 3 Position Cylinder Series RZQ D-A9 D-F9 D-F9W D-A9V D-F9V D-F9WV D-F9BAL B =U =U A B + First-stage
Hs MLU MLGP A B ML1C Proper Auto Switch Mounting Position (mm) Auto Switch Mounting Height (mm) D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7BAL D-F79F D-F7NTL Hs D-A72/A7H D-A80H/A73C D-A80C/F7 D-F7V/F79F D-J79/J79C D-F7W/F7WV D-J79W/F7BAL D-F7BAVL Auto switch type Auto switch type D-F7V D-F7WV D-F7BAVL D-A73 D-A80 D-A7 D-A80 D-A73C D-A80C D-A79W D-F7NTL D-J79C D-A79W Bore size Bore size A Hs
Porting specifications Applicable stations Series Port size P, R Port location A, B C6 C3, C4, M5 VQ0 VQ1000 VQ2000 Side Max. 16 C3, C4, C6, M5 C4, C6, C8 C6 Side Max. 16 C8 Side Max. 16 D-sub connector (25 pin) 015 AXT100-DS25-030 050 Cable Assembly Wire color table by terminal number of D-sub connector cable assembly: ( ) The D-sub connector cable ass'y can be ordered individually or included
9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 D-R73, D-T79 D-R80, D-S79, S7P 180 D20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane 90 3 Basic type MSUB 7 Double vane D-R73, D-T79 D-R80, D-S79, S7P 180 20 Double vane is available with 90 rotation setting only. 149 Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location
Hs Auto switch 12 15 22.5 A B 33 101 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Proper auto switch mounting positions (mm) Auto switch type D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-A59W D-F5NTL D-F5F D-B5, D-B64 D-B59W Bore size (mm) A B A A A A A B A B B B B B 40 10.5 11.5 14.5 14 21 17 22 23 11 12 15 15.5 22 18 50 11 13
Hs A B A B 32 to 50 D-A73C D-A80C D-J79C D-A79W D-F7W D-F7V Approx. Hs Approx.
Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-
(Note 3) 0 0. b JOG operation, positioning operation, programmed operation, DO forced output. (Note 1) # #. b (Note 3) Test operation mode Motor-less operation # #. d # #.
I r F I l f f i r ] Pilot valve specifications I I il*d*drffir -.-'l I lgh pr;iirr" lype, 15W coil I I at"hirg ly,pe I ),t.rra o tor. lW coil I o\,, walr rype 0 5W;o I a a ' t I o " o o c i o d o u b l e ' o l F n o ' o o v d a I 6 B v o n d o o l p d . " o I ' o' 1 .'|o-c I Coil voltages EtrT 'Consull SMC for available volages.
D D D D B B B Specifications and dimensions other than the above are the same as the standard type.
MHZ MHF MHL MHR Hysteresis Hysteresis Switch operating position (ON) Switch operating position (ON) MHK Switch reset position (OFF) Switch reset position (OFF) MHS Hysteresis (mm) D-F9W(V) D-F9BAL D-Y7W(V) D-Y59A/B D-Y69A/B D-Y7P(V) MHC D-M9(V) D-F8 ON position set when red light is turned on ON position set when green light is turned on ON position set when red light is turned on ON position
Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5
D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch model D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-F59F D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 MLGP D-A59W D-F5NTL RLQ Bore size (mm) Bore size (mm) MLU A B A B A B A B Hs Hs Ht Hs Hs Ht 125 125 0 0 2 2 4.5 4.5 9.5 9.5 116 126 75.5 69.5 74.5 70 ML1C 140 140 0 0 2 2 4.5 4.5 9.5 9.5 124 134 81 76.5 80 76.5 160 160
Hs A B (mm) Proper Auto Switch Mounting Position D-A72/A7H/A80H D-A73C/A80C/F7 D-J79/F7W/J79W D-F7V/F7WV D-F79F/J79C D-F7BAL/F7BAVL Auto switch model D-A73 D-A80 D-F7NTL D-A79W D-P4DWL A A 9.5 13.5 11.5 14 18 21.5 B B 6.5 9 12 15 18.5 24.5 A 14.5 18.5 16.5 15 19 22.5 B 11.5 14 17 16 19.5 25.5 A 6.5 10.5 12 11 15 18.5 B 3.5 6 8.5 12 15.5 21.5 A 9 7 9.5 13.5 17 B 4.5 7.5 10.5 14 20 Bore size