Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

8.5 13 12.7 2-2.6 (For manifold mounting) 28.1 [35.1] (Light/surge voltage suppressor) 2-2.6 (For mounting) + 14.5 3 23 20 2.3 55.6 [57.8] 12.7 28.1 [35.1] 8 9 M5 x 0.8 (P, R port) 23 7 (Bracket) R P 11 11.5 1.4 (PE port) L plug connector (L): SYJ52-L-M5 (-F) M plug connector (M): SYJ52-M-M5 (-F) DIN terminal (D): SYJ52-D-M5 (-F) M8 connector (M0): SYJ52-W0-M5 (-F) Applicable cable O.D.

CY1

Model CY1H10 CY1H15 CY1H20 CY1H25 CY1HT25 CY1HT32 Screw size M6 x 1.0 M4 x 0.7 M5 x 0.8 M8 x 1.25 Bolt dimensions Dimension t l-9 l-7 l-8 l-8 l-12 Nm 4.4 1.37 2.65 13.2 Fastening torque {kgfm} 0.45 0.14 0.27 1.35 Square nut l t 4.

Air Cylinder

ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 ZZ + Stroke Z + Stroke + 1.2 0 + 1.2 0 CBM2U Bore size Stroke A Rod trunnion: * -H -R -W N L CBM2T Bore

Electric Actuator

Max. tightening torque (lbfft) M4 x 0.7 M5 x 0.8 M5 x 0.8 Length: L (mm) 1.1 2.2 2.2 Model Bolt LEYG16M L LEYG25M L LEYG32M L 32 40.5 50.5 L Body fixed/Bottom mounting Max. tightening torque (lbfft) M5 x 0.8 M6 x 1.0 M6 x 1.0 Max. screw-in depth (mm) 2.2 3.8 3.8 Model Bolt Workpiece fixed/Rod end female thread LEYG16M L LEYG25M L LEYG32M L 10 12 12 Max. tightening torque (lbfft

Rotary Actuator/Vane Style Series CRB2

(mm) R F (h9) E (g6) A B C D G K L M N P Q Y Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 9 12 14 16 4 5 6 8 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 24 29 36 43 18.5 18.5 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M3 x 0.5 depth 5 M5 x 0.8 M5 x 0.8 M4 x 0.7 depth 7 M5 x 0.8 depth 10 60 Series

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

AS1000-M3 AS1000-M5 AS2000 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) AS TMH ASD AS AS Number of needle rotations Number of needle rotations Number of needle rotations AS-FE KE AS3000 AS4000 AS5000 Inlet pressure: 0.5 MPa AS-FG Inlet pressure: 0.5 MPa Flow rate L/min (ANR) Inlet pressure: 0.5 MPa

Rotary Actuator

24.5 10.5 50.5 59 22 14 21 11 6 14 (13.5) (7.5) M5 M5 0.005 0.020 0 0.043 50 40 13 22 5 2 8 12 1.0 26 14 43 M5 34.5 14 64 75 24 15.5 25 16.5 8 16 (18) (10) M5 M5 0.005 0.020 0 0.052 63 45 15 30 6.5 4.5 9 20 1.5 31 20 56 M5 39.8 17 79.5 90 30 21 31.6 17.5 10 25 (16) (10) 10 Rotary Actuator Series CRB2 Vane Type Dimensions: 10 Double vane # Following figures show the intermediate rotation

Air Cylinder Series CM2

Volume GR-L-005 5 g GR-L-010 10 g GR-L-150 150 g 3. Do not wipe off grease from the sliding part of the air cylinder.

3 Port Solenoid Valve

(G)/(H): 10-V1 4(A)-M5 1 2 G H 13.1 (Light/surge voltage suppressor) 5 + 13 15.5 3 13 3 (For mounting) 2-2.6 28.5 [35.5] <32.4> 10 G: Approx. 300 H: Approx. 600 (Lead wire length) 1 30.8[33] <33> 25.1 11.4 5.7 5.7 5.7 1 2 7 5 9.5 5 19 (Piping port) M5 x 0.8 L plug connector (L): 10-V1 4(A)-L-M5 1 2 M plug connector (M): 10-V1 4(A)-M-M5 1 2 13.1 (Light/surge voltage suppressor) (Light/surge

Series KP/KPQ/KPG

R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21

Series KP/KPQ/KPG

R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g L2 D2 M L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21

KP/KPQ/KPG

D1 M M A L1 D1 D2 L2 H Connection threads Male Branch: KPQU, KPGU (M5) Effective area mm D Model L TPH TPS A H (width across flats) (M5) 2-Applicable tubing Note1) Connection threads R Applicable tubing O.D. mm Weight g M P P M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPQU04-M5 KPQU04-01 KPQU04-02 KPQU06-M5 KPQU06-01 KPQU06-02 KPQU08-01 KPQU08-02 KPQU10-02 KPQU10-03 KPQU12-03 KPQU12-04

3 Port Solenoid Valve Metal Seal Series VZ200 1

length 2-2.8 mounting hole VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG VP S070 Pilot EXH Locking type manual override VQ VKF VQZ 1 2 DIN terminal: VZ2 2-D(Z)-M5 1 2 L plug connector: VZ2 2-L(Z)-M5 VZ 300 (Lead wire length) VS VFN With light/surge

Modular/F.R.L. Units Series AC

rate (l/min (ANR)) Flow rate (l/min (ANR)) AC50 Rc1 AC55 Rc1 AC60 Rc1 0.6 0.6 0.6 Outlet pressure (MPa) Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.5 0.5 0.4 0.4 0.4 0.3 0.3 0.3 0.2 0.2 0.2 0.1 0.1 0.1 0 0 0 4000 6000 8000 2000 10 4000 6000 8000 2000 10 4000 6000 8000 2000 10 0 0 0 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Pressure Characteristics (Representative

42

Note 4) When multiple symbols are specified, indicate them alphabetically. 511 B VQ5000 Series Kit (Lead wire cable) L 83 107.8 29.5 29.5 1/8" PE. port 12 21 36 47.5 PE 5 R1 3 R2 1 P 2 x G1 (Electrical entry) SMC 3/4" 1(P), 5(R1), 3(R2) port Cable length L 0: 600 mm L 1: 1500 mm L 2: 3000 mm U D U D U D 179 83.5 55.5 M5 x 0.8 Ground screw 106 61 U side Station number 9 9 Electrical entry

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M6 x 1 7.4 12 LXP M6 x 1 7.4 10 2. Through holes Model Bolt Max. tightening torque Nm Body thickness (l mm) LXP M5 x 0.8 4.4 37.5 3.

Flow Control Equipment

(mm) 3.2, 4 8, 10 6 4 3.2, 4, 6 12 38 7 Air flow (l/min(ANR)) Controlled flow JIS Symbol Effective area (mm2) 0.2 0.6 0.1 230 180 460 260 390 100 Air flow (l/min(ANR)) Free flow Effective area (mm2) 3.5 2.7 7 4 6 1.5 Note) Supply pressure: 0.5MPa Temperature: 20 OC How to Oder Indication of air flow direction on body AS 2 2 1 1 F M M5 06 S Meter-out Meter-in Body size 1 2 M5 1/8, 1/4 Options

Rotary Actuator

(Example) For M4: L2 = 8 Applicable shaft types: X, Z L1 + (3 x P) Q1 = M C1 = C L2 = L1 = L2 = D1 = Q2 = M Q2 = M C1 Z axis X axis X = L1 = [mm] [mm] [mm] Size Q1 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size Q2 30 M3 50 M4, M5, M6, M8 63 M4, M5, M6, M8, M10 80 M4, M5, M6, M8, M10, M12 100 M5, M6, M8, M10, M12 Size X L1max D1 30

One-touch Fittings Series KQ2

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( d a e r h T ) T P ( R . o N t r a P H ) . x e H ( D 1 D 2 L1 L2 * A M M5 6 1 / 3 8 / 1 S 1 0 5 0 L 2 Q K 0 1 4 . 1 1 0 1 5 . 9 1 8 3 0 4 5 . 6 1 5 . 3 9 1 4 / 1 S 2 0 5 0 L 2 Q K 4 1 4 4 5 . 3 4 1 4 8 / 1 S 1 0 7 0 L 2 Q K 0 1 2 . 3 1 0 1 5 . 0 2 5 . 0 4 3 4 7 1 6 . 4 0 2 4 / 1 4 / 1 S 2 0 7 0 L 2 Q K 4 1 5 . 6 4 7 4 5 4 8 / 3

SZ3000

B RATE PWR L RUN SETTINGS MOD/NET ADDRESS NO. PWR PWR COM ERR ON ON L ERR.