SZ3000

: Non-locking push type B 2 (A) 4 (B) 2 The 4 position dual 3 port valve is not available with external pilot specifications. 2 M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) Back pressure check valve 3 position closed center A 4 (A) 4 (B) 2 Nil K None 3 2 B Built-in 5 (EA) 1 (P) 3 (EB) The built-in back pressure check valve type has an effective area approximately 20% smaller.

Compact Guide Cylinder

L MM ML NN OA OB OL P PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5 9.5 16.5 15 20 33 12.5 9.5 9.5 12.5 78 M5 16.5 16.5 23 M5 x 0.8 13 M5 x 0.8 5.4 9.5 5.5 Rc1/8 NPT1/8 G1/8 15.5 8.5 25 18 25 38 11.5 9.5 12.5 11.5

Round Type Hydraulic Cylinder

L tap 4 x J counter bore Related Products 4 x K 20: I-020B 25: I-032B 32: I-04A 40: IA-04 RR1 NDH10 DI A B E F G MM 45 RR1 MM NDH10 D +0.2 +0.1 E1 M C E1 R U U1 U1 A1 NX 8.6 A1 L1 L1 NX H Material: Cast iron Material: Rolled steel Material: Cast iron U (H8) Applicable bore size (mm) Part no. H G I J K L Part no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

M5: M5 x 0.5 5 (EA) 1 (P) 3 (EB) J: With switch 3 position closed center A 4 Back pressure check valve (A) 4 (B) 2 3 2 B Built-in Nil K None 5 (EA) 1 (P) 3 (EB) ON OFF The built-in back pressure check valve type has an effective area approximately 20% smaller. The 3 position closed center and 3 position pressure center are not available with back pressure check valve.

VQ4000

00-A-5 0 0 200 400 600 800 1000 1200 1400 VQ45 (Plug lead type) B ARBQ4000-00-B-5 Flow rate (l/min(ANR)) P ARBQ4000-00-P-5 ARBQ4000-00-P (P B) 0.7 Outlet pressure (MPa) 0.6 SMC 0.5 0.4 0.3 0.2 50 147 0.1 0 0 200 400 600 800 1000 1200 1400 B 2 SMC Flow rate (l/min(ANR)) 12 1 P 5 3 R2 R1 Pressure Characteristics 59 PE 4 A Conditions Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa Flow rate

VCC

Model K VCKL0604-02F H KFN-06-X2 K VCKL0806-02F H KFN-08-X2 K VCKL1075-02F H L Union nut C3604BD + Ni plated 1 1 set unit KFN-10-X2 K VCKL1008-02F H K VCKL1209-02F H KFN-12-X2 K VCKL-02F H K VCKL0604-02F H KFS-06 K VCKL0806-02F H KFS-08 K VCKL1075-02F H M Sleeve Nylon 1 1 set unit KFS-10 K VCKL1008-02F H VNA VNB K VCKL1209-02F H KFS-12 SGC SGH N Gasket VCKK-4-1 Nylon 1 10 set unit VNC VNH

Compact Type

L k Imaginary stroke L' = (Stroke) + k + L k: Distance between the center and end of the plate 6 (Example) q When using CXSJM6-10 and L = 15 mm: Imaginary stroke L' = 10 + 2.75 + 15 = 27.75 Therefore, the graph used for your model selection should be the one for CXSJM6-30 6 ). 2.75 mm 10 4 mm 15 5 mm 20 6 mm 25 w When using CXSJL25-50 and L = 10 mm: Imaginary stroke L' = 50 + 6 + 15 = 71

ZQ-OM01301

ZQ-OM01301-A Revision history A P.22 Change of the spare part numbers for the solenoid valve P.24 Change of the spare part numbers for the V port fitting P.25 Change of the spare part numbers for the Washer assembly P.27 P.28 Added items to 8.

ZSE40/ISE40

circuit 1 k 1 k Load OUT1 (Black) OUT2 (White) 12 to 24 VDC 12 to 24 VDC Load Load DC () (Blue) DC () (Blue) ZSE40(F) ISE40--30(L)-(M) With auto shift input ZSE40(F) ISE40--70(L)-(M) With auto shift input DC (+) (Brown) Auto shift input (Gray) OUT1 (Black) OUT2 (White) DC (+) (Brown) Auto shift input (Gray) 1.2 k 1.2 k Load 6.8 k 6.8 k Main circuit Main circuit Load OUT1 (Black) OUT2 (White

Compact Cylinder with Air Cushion

B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5

Ionizer

L KJH04-M5-X34 14 14 16 36 20 30 19 14 4 x M4 x 0.7 depth 5 (For mounting, opposite side: Same) 16 20 17 52 58 Emitter cartridge Maintenance detection level selection switch Frequency selection switch Balance adjustment trimmer n (Number of emitter cartridges), L Dimension, Weight Part no. n L (mm) IZS31-460--X10 IZS31-540--X10 IZS31-700--X10 IZS31-860--X10 IZS31-940--X10 IZS31-1020--X10

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

fitting Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2-V PB PA A B Pilot port threaded type (mm) Dimensions A B C D E F G H J K L M N P Q R V Model LVD1-S LVD2-S LVD3-S LVD4-S LVD5-S 4 (5/32") 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82

Guide Cylinder Series MGG

T 2 x P (Rc, NPT, G) Q B S W U K L E R I AA AL AP X A AB J V Y + Stroke Z + Stroke 8 x AF AC AD AE (mm) Bore size (mm) 20 25 32 40 50 Stroke range (mm) A AA AB AC AD AE AF AL AP B C D E F G H I J K L M N 90 11 11 7.5 75 30 6 25 108 15 60 92 5.5 30 55 60 80 25 45 M5 x 0.8 depth 10 M8 x 1.25 depth 14 75, 100, 125, 150, 200 9.5 depth 6 100 14 13 7.5 85 30 6 30 130 17.5 65 113 6.6 35 65 70 100

Thermo-chiller

9 Water-cooled refrigeration . p. 11 Cooling Capacity. p. 13 Pump Capacity. p. 13 Dimensions. . p. 14 Parts Description. p. 14 Recommended External Piping Flow. . p. 16 Cable Specifications. p. 16 Operation Display Panel. . p. 17 Alarm. p. 17 Communication Functions. p. 18 Options. p. 19 Optional Accessories. . p. 20 VCooling Capacity Calculation Required Cooling Capacity Calculation. p.

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

MVGQ

x 0.8 R port (with plug) MK(2) RS Q G 54.4 (GZ: 55.1) [56.1] RS H A RZQ MI W S M5 x 0.8 P port CEP1 C + Stroke B + Stroke A + Stroke M5 x 0.8 R port CE1 CE2 [ ]: Denotes AC.

EX510

19.2 k/45.45 k/ 93.75 k/187.5 k/500 k/ 1.5 M/3 M/6 M/12 Mbps 156 k/625 k/ 2.5 M/5 M/10 Mbps 125 k/250 k/ 500 kbps Communication speed 4-branch input Specified file Note 2) EDS file GSD file 64/64 Possible to change depending on the switch setting 96/96 (3 stations, remote device station) Possible to change depending on the switch setting Occupied area (Number of inputs/outputs) 4-branch

Digital Pressure Switch

adapter E ZS-35-D ZS-35-F Panel mount adapter + Front protective cover F ZS-35-G Accessories 1 / Part numbers Part number Option 1 ZS-24-A Bracket A with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-24-B Bracket B with 2 mounting screws M4 x 5 L ZS-24-D Bracket D with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-35-C Panel mount adapter (piping specification: 01, N01) ZS-35-D Panel

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q: 8 K P 5.1 K P Q: 6 Q: 8 K P 5.1 Stroke H I Stroke H I 20 20 3.6 3.6 +10 +10 0 0 30 30 +1 1 +1 1 +6.4 +6.4 +20 +4.9 +20 +4.9 50 50 +25 +25 +51.4 +51.4 +40 +49.9 +40 + 9.9 13-11-110 15 Vacuum Pad: Ball Joint Type Lateral Vacuum Entry Without Buffer/Female Thread Series ZPR How to Order ZX ZPR 10 F GS 06 B5 ZR ZM Pad diameter (

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C D 4-O MX MTS T MY Q CY 2-P S U W E B K L MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DAA AB I AP A R X Y + Stroke Z + Stroke -X J V 20Data 8-AF AC AD AE 100 piston rod end connection Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K