5 Port Solenoid Valve Page 14 D-sub Connector F kit Page 18 Flat Ribbon Cable P kit P kit EX180 Page 22 PC Wiring System Compatible Flat Ribbon Cable J kit J kit Page 26 Manifold Optional Parts Page 28 Construction Page 29 Manifold Exploded View S kit Page 32 Plug-in Manifold Stacking Base EX260 Page 32 Serial Transmission S kit EX250 Page 44 D-sub Connector F kit EX600 Page 48 Flat Ribbon Cable P kit F kit EX500
P.287 P.289 P.290 P.290 P.290 P.290 P.290 P.297 P.297 P.301 P.304 P.306 P.306 P.306 P.310 P.311 P.311 P.312 P.312 P.312 P.315 P.316 P.316 P.316 P.317 P.318 P.319 P.319 P.319 P.324 P.325 P.326 P.329 P.333 P.333 P.333 P.337 P.339 P.340 P.343 P.348 P.351 P.351 P.356 P.358 P.361 P.362 P.364 P.367 P.371 P.371 P.374 P.385 P.385 P.387 P.387 P.390 P.392 P.393 P.394 P.395 P.396 CJP2 MGPW Pin Cylinder
Please contact SMC regarding the bowl assembly supply for psi and F unit specifications. 34 Series AF20-A to AF40-A Dimensions AF20-A T N M D J Bracket (Option) S U R C V Q OUT IN 2 x P (Port size) B Clearance for maintenance G Drain AF30-A to AF40-06-A A T N J M D Bracket (Option) U S R V Q IN OUT B C 2 x P (Port size) E Clearance for maintenance G Drain A Applicable model AF20-A AF30-A
with 02 2 stations "-02T' is l/S" P,A,B bottom and 1/4" A,B side.
Ultimate pressure P (Pa) is P=Q/S, where the sum of Weight flow rates for outgassing (Qg) and leakage Q(L) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, Q(L)S shown as above, and the ultimate pressure of the pump itself. In the case of very low pressure, the exhaust characteristics of the actual pump can be the limiting factor.
Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit (Circular connector) T kit (Terminal block box) S kit (
B Counter bore depth C CB HA 2-P (piping port) 4-J x E (depth) HT 2 x 4-MM thread depth M T T Y HP L TC F X WP GW QW PW GP D 4-LD W K WS With switch rail Plug HS G Q + Stroke CR HR Z + Stroke (Area E) for CY1RG25, 32, 40, 50, 63 2-P (piping port) 22 8 14 12.5 19.5 13 30 Plug 2-P (piping port) 12.5 CY1RG10 CY1RG15 (mm) CB CR B C D G GP GW H HA HB HC HP HR HS HT J x E K F Model CY1RG10 2 0.5
I . n a n . , a d r b e . r d I p o a l ' o n U 1 r s ? H S y \ l , , , " . , . b " . , , | , a I r ," 01 S l\(SreeT ,16 .'p . I o*rir;_ rri,-"*,rt"sLe t ,o o,r. rr I ' | ' ' " aP, !q!Icgtqar ol s-trNK E port position n . s tn: f r, r!l'lr!rFd '.lFr vr L l E eclric Co Ltd.: TLnkMn Not.2)Spec lisd ayoul: nd cate 0r r !
(with surge voltage suppressor) A A D D J J Exhaust port 24.4 I R Q z300 24.4 Q z300 I 1/2 R 1/2 K K S S Exhaust port L L E H H E U U F F G G 2 P 2 P Port size Port size DIN terminal A D Q T J R Cable 6 to 12 S I K 24.4 1/2 Exhaust port (44) U F G1/2 L H E Port size 2 P G Dimensions (mm) Model Port size P A D E F G H I J K L S VXF25A< VXF26A< 2 1/2 3 182 206 92 102 212 247 47 63 117.5
Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T
14 18 G 57 73 H 16 17 J 41 50 T M4 X 0.7 M5 X 0.8 K 40 54 S 44 60 AF30 AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.
Symbol Specifications/Content Applicable shaft type Shaft type variation X,Y,Z,T,J,K XA1 to XA24 S,W Shaft pattern sequencing I XA31 to XA59 XC7 X,Y,Z,T,J,K Shaft pattern sequencing II Weight S,W,X,T,J Reversed shaft XC8 to XC11 Change of rotating range (g) Change of angle adjustable range (0 to 100)" XC12 to XC15 Size Standard weight 90 180 S,W,Y Change of angle adjustable range (90 to
For details, refer to Specific Product Precautions on page 196. 2 Not available for 6 Rubber Stopper Model MXQ8C MXQ12C Max. absorbed energy [J] 0.06 0.12 Mounting screw size [mm] M6 x 0.75 M8 x 1 Shock Absorber/RJ Model MXQ8C MXQ12C Max. absorbed energy [J] 0.35 0.5 Stroke absorption [mm] 3 5 Collision speed [mm/s] 50 to 500 50 to 500 Max. operating frequency [cycle/min] 80 80 Max. allowable
rod boot 4 x FD C C C d d d S + Stroke ZZ + Stroke ZZ1 + l + Stroke Long stroke 4 x J 2 x P Width across flats KA 4 x FD With rod boot S + Stroke ZZ + Stroke ZZ1 + l + Stroke With auto switch: CDS1F 4 x J ~ = 2 x P Width across flats KA 4 x FD With rod boot ~ = ~ = S + Stroke ZZ + Stroke ZZ1 + l + Stroke (mm) Without rod boot With rod boot Type Bore size (mm) Stroke range (mm) A AL B B C
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.
DIN rail for 9 stations J kit (Flat ribbon cable connector) S kit (Serial) kit F kit (D-sub connector) P kit (Flat ribbon cable connector) When changing the manifold style into a DIN rail mount Order brackets for mounting a DIN rail. (Refer to Option on page 2-4-24.) F 25P U S F 15P U S P 26P U S A S U S P 20P U S P 16P U S P A B C 10P J 20P U S Type No.
1 (IN), 2 (OUT) port 2 x M5 Thread depth N B 2 x P 1 (IN), 2 (OUT) port 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal F Cable 6 to 12 Q D D S G1/2 Qp2 F 34 (44) 31.5 32 R 25 T C K C R E E Sp2 A A B1 2 x P 1 (IN), 2 (OUT) port B1 2 x P 1 (IN), 2 (OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H J H G1/2 (mm) Grommet Grommet (with surge Dimensions Size Port
keeper plate mounting screw J P H A B C D d K L L1 E Part no.