Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z

1.63

Grease pack part no.: GR-S-010 (10 g) D-X 511 MGPW Series 20 to 63/MGPWM Stroke Z 4 x YY depth YL Stroke Z L 4 x MM depth ML 4 x NN through DA DB H V U X T R PW 2 x P OL GA GB 4 x OA through FA FB 2 x OB counterbore Q J K C + Stroke B + Stroke E S G A + Stroke For intermediate strokes other than standard strokes, refer to Manufacture of Intermediate Strokes on page 499.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

S) (mm) Dimensions PB S Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm PA 12.5 26 A B 26 29.5 Dimensions (mm) A B C D E F G H J K L M N P Q T U Model LVD2m-Tm LVD3m-Tm LVD4m-Tm LVD5m-Tm 30 30 61 56 14.5 104 35 13 4 20 44 7 30 6 31.5 17 M5 x 0.8 35 35 79.5 62 17.5 136 42.5 17.5 6 22 50 7 37 6 36 21 M5 x 0.8 35 35 82 62 20 137 45 17.5 6 22 50 7 39 6 36 21 M5 x 0.8 45 45 105.5 76 25 169.5 65 17.5

Transfer

(Port for operating cylinder) J J J J D D II 2 x MB, Depth LB II 2 x PB (Hexagon socket head taper plug) 2 x PB (Hexagon socket head taper plug) JJ 28 32 36 A 110 140 170 B 220 280 340 C 206 264 322 D 42 51 59 E 138 168 204 G 30 37 45 H 73 88 106 I 76.5 91 110 J 40 46.5 55 K 46 58 68 L 45.5 54 64 M 30.9 32.4 41.5 N 16 15 19 O 69 84 102 P 41 56 68 AA 106 133 164 BB 30 35 40 CC 16 19 23 DD

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

The smoothness of the surface and closeness of the oxidize layer can effect (increase/decrease) this. 7 Ultimate pressure Ultimate pressure is P=Q/S, where the sum of mass flow rates for outgassing (Qg) and leakage (Ql) is Q(Pam3/s), and the exhaust speed is S(m3/s). The ultimate pressure is measured with Qg, QlS shown as above, and the ultimate pressure of the pump itself.

Digital Flow Switch (Remote type sensor unit)

dimensions Piping port S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0010-J Dimensions of lead wire with M8 connector (ZS-40-A) -47No.PF-OMN0010-J Made to Order Change the seal material of the wetted parts to EPDM.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

stroke adjuster at extension end) 20 F 35 62 58 48 26 18 1 6 4 x M5 x 0.8 thread depth 7 N x M5 x 0.8 thread depth 6 (Insert) 12 6 37.5 (With stroke adjuster at extension end) Stroke adjuster at retraction end Stroke adjuster at extension end KA 21 NA x M5 x 0.8 thread depth 5.5 10 21 5.5 K Vacuum suction port M5 x 0.8 10 5.5 5.5 9.5 12 12 J 10 Maximum 13.5 (With stroke adjuster at retraction

Modular Type Regulator Series AR

IN OUT T IN OUT V G Plate thickness AR10 to AR30: Max. 3.5 AR40: Max. 5 Pressure gauge (option) L B Pressure gauge port M Q N F J K P E Bracket (option) AR50, 60 Port size Square embedded type pressure gauge (option) A D C L OUT IN G Pressure gauge (option) B Pressure gauge port M N Bracket (option) Q K P F E J Standard specification Accessory specification With pressure gauge Bracket mounting

Electric Rotary Table

Step Axis 1 Step No. 0 Posn 123.45 Speed 100/s Monitor Axis 1 Step No. 1 Posn 12.34 Speed 10/s Operation status can be checked. It can be registered by SET after entering the values. Teaching box screen Step Axis 1 Step No. 0 Posn 50.00 Speed 200/s Step Axis 1 Step No. 1 Posn 80.00 Speed 100/s Data can be set with position and speed. (Other conditions are already set.)

CG1

O ring 4.5 X 2.5 X 1 O ring 6.4 X 5.2 X 0.6 O ring 5.5 X 3.5 X 1 O ring 7.4 X 5.8 X 0.8 O ring 6.5 X 4.5 X 1 O ring 11.4 X 9.4 X 1 Valve seal Gasket for valve retainer NBR NBR @7 @8 1.6-7 Series CG1 Basic/CG1BN: With Rubber Bumper (mm) Bore (mm) Standard stroke (mm) Long stroke (mm) TB ZZ GB GA F I MM E C AL H1 KA S D B1 NA A H J K P TA Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

CLQ

P-80 (YG)

1

+ Stroke NA C 4 x J Female thread MM Depth A1 H ZZ + Stroke Female rod end Female Rod End [mm] [mm] Bore size A AL B1 C D E F H H1 J KA MM NA Bore size A1 H MM 20 14.5 12 13 15.5 8 14 0 0.1 2 21 5 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5

RQ

Example) Bolt M5 x 50l 4 pcs.

15

CY1L CY1H CY1F Shock absorber CYP The RJ series soft stop shock absorbers fitted as standard DM10 M8 M6 M20 M14 -X (For 20) (For 10, 15) (For 6) (For 32, 40) (For 25) Technical Data 1487 CY1S Series Model Selection Selection Flow Chart Operating Conditions D: Bore size (mm) L: Stroke (mm) m: Load mass (kg) Va: Piston speed (mm/s) P: Operating pressure (MPa) E: Kinetic energy (J) Mounting

AWG

P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Possible to change to the optional mounting angles.

Ionizer

Tungsten Silicon Stainless steel Low-maintenance type /Tungsten Low-maintenance type /Silicon Nil C S F Feedback sensor Autobalance sensor [High-precision type] G J Power supply cable Nil Z N With power supply cable (3 m) With power supply cable (10 m) Without power supply cable K Output specification NPN output PNP output Nil P Control unit cable entry direction Nil R Left-hand entry Right-hand

CRB1/Size: 10, 15, 20, 30

Q (Depth) 90 100 R P E(g6) A F(h9) B C D G1 G2 J K L M N Model RQ1 M3 (10) RQ2 3.4 (6) (Q3 M3 (5) CRB1BW15-lD CRB1BW15-lDE CRB1BW20-lD CRB1BW20-lDE CRB1BW30-lD CRB1BW30-lDE 5 11 9 14 10 15.5 25 10 25 13 25 14 0.004 0.012 0 0.043 29 5 34 12 20 9 18 4 1.5 6 10 0.5 M3 M4 (13.5) 4.5 (11) M4 (7.5) 0.004 0.012 0 0.043 36 6 42 14 29 10 20 4.5 1.5 7 10 0.5 M5 M5 (18) M5 (10) 5.5 (16.5) 0.005 0.014

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Piston speed mm/s Piston speed mm/s Piston speed mm/s 8-14-8 8 Mechanically Jointed Rodless Cylinder Series MY3A/3B Cushion Capacity Absorption Capacity of Rubber Bumper (MY3A) Horizontal impact: P = 0.5 MPa MY3A16 Horizontal impact: P = 0.5 MPa MY3A25 1000 1000 MX 500 500 Impact speed mm/s Impact speed mm/s Rubber bumper Rubber bumper MTS 400 400 300 300 MY 200 200 CY MG Courtesy of Steven