s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex30 to 250 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed changes

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

ZQ-OM01301

PNP open collector 3 Silencer plate assembly ZQ1-PL11-A 4 Filter vessel assembly ZQ1-FC1-A 5 Filter element (10 pcs. are included in one set) ZQ1-FE2-A 6 Check valve ZQ1-CV 7 V port fitting VVQ1000-50A-C4 (1) Specifications 50A-M5 Without fitting (M5x0.8) 50A-C3 3.2 (Straight) (1) 50A-C4 4 (Straight) Clip (10 pcs. are included in one set) 50A-C6 6 (Straight) A A F1-LC3 3.2(Elbow) ZK1-CP-A

ZQ-OM01401

SI (kPa) 2) 3) (:psi) P 2) (99 10 ) 3) (1) VAVB (3) G 2m) W (2m) 4) (4) (5) (V ) 0 (M5x0.8) 5) K 1 3.2 () 4) 5) (1) VAVB 2 4 () 3 6 () 4 3.2 () 5 4 () 24 - No.ZQ-OM01401-B ZS-39-5G ZQ1-LW6-N-A 1) N NPN P PNP (1) 3 Assy ZQ1-PL11-A 4 Assy ZQ1-FC1-A 5 (10 ) ZQ1-FE2-A 6 ZQ1-CV 7 V VVQ1000-50A-C4 (1) 50A-M5 (M5x0.8) (1) 50A-C3 3.2 () 50A-C4 4 () 8 (10 ) 50A-C6 6 () ZK1-CP-A

VQZ100V-OMT0001

VQZ100 300 300 300 300 VQZ200 VQZ200 VQZ200 VQZ200 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ1000/2000 VQZ3000 VQZ3000 VQZ3000 VQZ3000 VQZ20010002000 VQZ1003003000 (KQ2P) Assy Assy Assy Assy VQZ100 0.130.19Nm VQZ1000 0.180.25Nm VQZ2002000 0.250.35Nm VQZ3003000 0.50.7Nm Assy 11 No.VQZ100V-OMT0001 VQZ Series/ / / / EX510 EX510 EX510 EX510 VQZ100 VQZ100 VQZ100 VQZ100 PR () B VVQZ100-CP

3 Port Air Operated Valve

N.O. specifications N.C. specifications Function plate Specifications Function plate N.C. 3-CL N.O. 3-CP 1. Each valve is fixed to the manifold base with two M4 mounting screws. Tighten the screws evenly when re-mounting. Caution 2. For mounting, tighten M4 or equivalent screws evenly into the mounting holes of the manifold base.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Vibration resistance 4.9 m/s2 Impact resistance 490 m/s2 to X,Y,Z directions 3 times for each Noise resistance 1000 Vp-p, Pulse width: 1 s, Rise time: 1 ns Weight 140 g (without lead wire) 225 g (without lead wire) Port size 3/8 inch tube 1/2 inch tube 3/4 inch tube Wetted material Body: New PFA, Sensor: New PFA, Tube: Super PFA Note 1) 1.6 to 20 l/min (0.1 MPa) with viscosity of 1 mPas (1 cP

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min0 to 70oC (with no freezing and condensation)p3% F.S.p2% F.S.p5% F.S. (25oC reference)0 to 1 MPa Note 2)1 MPa45 kPa or less at the maximum flow1 sVoltage output: 1 to 5 V Output impedance: 1 k7Output current: 4 to 20 mA Max. load impedance: 300 7 for 12 VDC, 600 7 for 24 VDCFor power supply status, flow rate indicator (Blinking speed

s [3 cP] or less) Note 1)Karman vortex10 to 100 L/min7 to 140 L/min(Flow under 7 L/min is displayed as ?0?)7 to 140 L/min1 L/min1 L/pulse0 to 70oC (with no freezing and condensation)Instantaneous flow rate: L/min, Accumulated flow: L, Display values updated 5 times per secondDisplay value: p3% F.S. Analog output: p3% F.S.p2% F.S.

Cylinder Positioner IP200 Series

air) IN (SIG air) qInput chamber uDiaphragm A iDiaphragm B oSpool wFeedback spring EX OUT2 EX OUT1 eInput diaphragm yNozzle rConnecting rod tCylinder rod 152 Cylinder Positioner IP200 Series Dimensions 20 20 25 SIG OUT1 OUT2 20 25 2 x 6.6 OUT1 OUT2 IN side Rc1/4 38 60 50 SUP 31 35 135 + Stroke IP IP IW 97 1301 40 SUP AW 37 Rc1/4 M8 x 1.25 depth 15 IL1 66 62 + Stroke 80 IL2 Precautions IT CP

INFORMATION Step Motor Controller 5 types of communication protocols New New

origin parameter are automatically set as the actuator parameters, and the 3 items of data consisting of No. 0 to 2 are automatically set as the step data. 1 Step Motor Controller JXCE1/91/P1/D1/L1 Series System Construction LEY/LEYG Series LEF Series LES/LESH Series LER Series LEL Series LEPY/LEPS Series LEH Series LEM Series Electric actuators Actuator cable Standard cable Robotic cable LE-CP-S

NCA1

2 1 1/4 -12 1 3/8 NY-1200 2.531 1 3/4 4 1/2 2 3/8 1 1/4 2 3/8 2 1/4 2 1/4 1 1/2 -12 1 3/4 NY-1400 2.531 2 5 1/2 2 15/16 1 1/4 2 15/16 2 1/2 3 1 7/8 -12 2 NY-1401 3.032 2 1/2 6 1/2 3 1/2 1 1/2 3 1/2 3 3 1/2 2 1/4 -12 2 1/2 NY-1402 3.032 3 6 3/4 3 7/8 1 1/2 3 7/8 3 1/4 3 1/2 2 1/2 -12 2 3/4 Order to Match Rod Thread Rod Eyes Pivot Pin Pivot Pin Part No A CA CB CD ER KK Part No CD1 CD2 CL CP

NCA1

CD 1 CD 2 CL CP Part no. A CA CB CD ER KK Part no. CD CL NCA1-150 1/2 1 7/8 NCA1-325 3/4 2 5/8 NI-150 3/4 1 1/2 3/4 1/2 5/8 7/16 20 NCDP-150 .500 0 -.002 .106 2.28 1.94 NI-325 1 1/8 2 1/16 1 1/4 3/4 7/8 3/4 -16 NCDP-325 .750 0 -.002 .140 3.10 2.72 Note) Cotter pins are included. 2 x CD CD dia.

Stations: 16 Stations, Port Size: CP (Port Plug), Option: D (DIN Rail Mounting), CE Compliant: No

Stations: 5 Stations, Port Size: CP (Port Plug), Option: D (DIN Rail Mounting), CE Compliant: No

Stations: 18 Stations, Port Size: CP (Port Plug), Option: D (DIN Rail Mounting), CE Compliant: No

Stations: 8 Stations, Port Size: CP (Port Plug), Option: None, CE Compliant: No