ZSE3/ISE3

Note 3) Hysteresis mode: When the values of P1 and P2 are the same or when |P1| > |P2| within 3 digits, the hysteresis will be automatically 3 digits for the set value of P1. Window comparator mode: The hysteresis is 3 digits, so separate P1 from P2 by 7 digits or more and set them. 1 digit is the minimum pressure display unit. (See the table above.)

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

77 42.5 67.5 52 77 42.5 67.5 27.5 27.5 17.5 25 25 27 102 92.5 52 77 42.5 67.5 52 77 42.5 67.5 30 30 127 127 17.5 117.5 117.5 D-B59W D-B59W 32 32 28 103 93.5 53 78 43.5 68.5 53 78 43.5 68.5 33.5 33.5 128 128 18.5 118.5 118.5 40 40 32.5 107.5 95.5 57.5 82.5 45.5 ( ): Denotes the dimensions with connector. 70.5 57.5 82.5 45.5 70.5 38 38 132.5 132.5 20.5 120.5 120. ( ): Denotes the dimensions

Fluoropolymer Piping Equipment

28 8 8 6 6 TD TID LQ1H32-Ml 8 5.5 LQ1H33-Ml 6 3.6 LQ1H34-Ml 10 19 TH TIH 20 17 42.5 23 7.4 LQ1H35-Ml 8 5.5 LQ1H36-Ml 6 3.6 LQ1H37-Ml 4 31.5 15 14 37.6 16.5 2.6 LQ1H3E-Ml 3 1.8 LQ1H39-Ml 10 1/8" 34.5 20 17 38 23 4.4 4.4 LQ1H310-Ml 8 4.4 LQ1H41-Ml 12 3/8" 46 24 21 52 28 8 8 3/8" 36 10 19 LQ1H4B-Ml 3/8" 5.8 LQ1H4C-Ml 1/2" 9 LQ1H4D-Ml 3/8" 5.8 LQ1H4E-Ml 1/4" 39.5 20 17 47.5 23 3.6 LQ1H4F-Ml

CNG

52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 to 300 301 to 800 301 to 800 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 I J K KA MM NA PG PH PL S FD FT FX FY FZ XA XB P l H 0.25 ZZ e f h ZZ 198 (206) 26 141 (149) 35 178 (186) 30 22 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 215 (223) 31 151 (159) 40 193 (201) 30 24 62 5.5 8 M10 x 1.25

3 Port Air Operated Valve Series SYJA300 1

55 93 32 87.4 36 71 80 8.5 3 4 VPA3165 82.6 1 4 1 1 110 17 68 75 118 45 113 36 71 95 8.5 1 4 1 1 1 1 4 VPA3185 118 1 2 132 14 80 95 140 52 140 41 81 105 13 2 2 5-5-26

AF800/900

VE How to Order Flow Characteristics VY1 12 AF 00 8 127 R Pressure drop (MPa) G P1 = 0.3 MPa P1 = 0.3 MPa Option P1 = 0.5 MPa P1 = 0.7 MPa P1 1 = 0.5 MP = 0.5 MPa P1 = 0.7 MP = 0.7 MPa P1 = 0.1 MPa P1 1 = 0.1 MPa Air filter PPA Drain cock thread piping {Rc 1/4} Drain guide D Body size 4 J R 8 9 1 2 1 2 AL Flow direction: From Right Left Auto-drain specifications Option Flow rate (/min (ANR

E-P HYREG ® Series VY1 1

A port: n-Rc 1/8 Note for P1 Confirm internal pilot or common external pilot by checking whether P1 has a M5 screw or not. Internal pilot P1 has no M5 screw. Common external pilotP1 has an M5 screw.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Stroke B Stroke A NB GC NA L8 + Stroke (A + B) ZZ + Stroke (A + B) Stroke B Stroke A GC Bore size (mm) L8 ZZ NA NB 32 198 294 74 10 36 40 220 328 85 10 38 NB 50 222 360 85 10 41 GC 63 252 390 100 10 43 NA L8 + Stroke (A + B) 80 270 442 104 14 52 100 290 472 114 14 52 ZZ + Stroke (A + B) 125 334 572 130 14 52 88 Made to Order Series CP96/C96 Symbol -XC11 Dual Stroke Cylinder/Single Rod Type

Rotary Actuator/Vane Type

14 0 0.043 1.5 1.5 8 7 10 0.5 25.5 14 13 21 M4 x 0.7 M4 x 0.7 4.5 4.5 M5 x 0.8 30 16 4 56 64.5 22 44 36 26 59 30 50 47.5 13 22 80.005 0.020 16 0 0.043 2 2 9 8 12 1.0 33.5 15.5 14 25 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 42 21.5 4.5 71.5 82.5 24 52 42 29 69 40 63 53 15 30 100.005 0.020 25 0 0.052 3 4.5 10 9 20 1.0 39 21 20 31.6 M5 x 0.8 M5 x 0.8 5.5 5.5 M5 x 0.8 47.8 25 5 87.5 98 30 64 52 38

C95

4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 26 30 37 37 46 51 146 163 179 194 218 233 190 213 244 259 300 320 46 52

CM2

65 77 90 115 140 165 32 18.2 36 32 72 185 25 37.5 50 75 100 125 85 97 110 135 160 12.5 52 65 77 90 115 140 165 40 20.2 46 41 77 25 37.5 50 75 100 125 90 102 115 140 165 12.5 54 67 79 92 117 142 167 190 With Rod Boot With Air Cushion Built-in One-touch Fittings Symbol Q P N1 WB G ZZ Bore size (mm) WA Bore size (mm) Stroke Bore size (mm) 20 20 1 to 50 51 to 100 101 to 150 151 to 200 201 to

CNG

52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) 20 25 32 40 K KA MM NA PG PH PL S FD FT FX FY FZ XA XB P I J l ZZ H e f h ZZ 26 35 178 (186) 30 22 55 198 (206) 5 6 M8 x 1.25 24 1/8 21.5 2 65 141 (149) 5.5 6 52 25 65 3 12 M4 x 0.7 0.25 x Stroke 31 40 193 (201) 30 24 62 215 (223) 5.5 8 M10 x 1.25

Cylinder with Lock Series CNG

52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 301 to 800 to 300 301 to 800 (mm) Without rod boot With rod boot Bore size (mm) 20 25 32 40 I J K KA MM NA P PG PH PL S FD FT FX FY FZ XA XB l H 0.25 ZZ e f h ZZ 198 (206) 26 141 (149) 35 178 (186) 30 22 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 215 (223) 31 151 (159) 40 193 (201) 30 24 62 5.5 8 M10 x 1.25

Multi-Channel Controller Series PSE200, Pressure Sensor Series PSE530

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

PSE530/200

OUT2 P2(n2) P1(n1) Supply pressure verification Leak test CH P2(n1) > P1(n2) 10.0 to 101.0 kPa Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n2) P1(n1) P2(n1) > P1(n2) 0.1 to 1000.0 MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

PSE200

Supply pressure verification Leak test P2(n1) > P1(n2) P2(n2) P1(n1) 10.0 to 101.0kPa CH Increases the set value 1 2 3 4 PRESSURE For normally closed P2(n1) > P1(n2) P2(n2) P1(n1) 0.1 to 1000.0MPa Decreases the set value SET P3(n3) and P4(n4) are the same as P1(n1) and P2(n2).

VNH

Supply pilot air higher than 0.25 MPa to P1 port Piping Inlet side (supply side): P port, Outlet side (exhaust side): A port Supply pilot air higher than 0.25 MPa to P1 port. PA VNH 12(P1) 12(P1) Nozzle 2(A) 1(P) PAX Nozzle 1(P) 2(A) 3(B) Stop valve Tank Coolant pump PB Tank Coolant pump For reducing load to pump, coolant liquid is returned from B port to tank each time.

Process Pump

Working Principle: Air Operated Type (PAF3413, 5413) Air supply port (AIR SUP) 5 port solenoid valve External solenoid valve P1 P2 Discharge port (FLUID OUT) Drive unit Pump chamber B Pump chamber A Check valve Shaft Suction port (FLUID IN) Drive chamber A Drive chamber B Diaphragm B Diaphragm A 1. When air is supplied to P1 port, it enters drive chamber A. 2.

7

2 x Speed controller valve Top width across flats 3 20 17 30 45 W 10 45 14 11.5 3 M16 x 1.5 45 Hs 30 IA IB 40 35 20 38 Width across flats 17 4 x M6 Thread depth 12 F R15 0.050 d90.093 +0.027 H8 0 Shaft: 12 Hole: 12 97 78 + Stroke 190 + Stroke Clevis width CKG1A: 16.5 CKG1B: 19.5 CKG1C: 12.5 Unit: mm +0.3 0 +0.4 0 +0.5 0 Symbol F IA IB N S W Hs Bore size 40 50 63 45.5 5 53 52 47 52 44 40

MNB

27 3 31 104 10 38 65 14 83 30 22 16 13 46 91 14 Up to 1000 50 11 120 9 1/4 65 75 32 2 38.5 120.5 12 46.5 77 15.5 100 35 27 20 14 52 104.5 18 Up to 1000 63 11 135 9 75 1/4 90 32 2 39.5 134.5 12 56.5 92 16.5 115 35 27 20 14 62 119.5 18 Up to 1000 80 13 153 12 1/4 95 102 37 4 45.5 169 16 72 100 19 126 40 32 25 20 63 150 22 Up to 1000 100 16 178 1/4 14 116 114 37 4 54 189 16 89 120 19 150 40