Series H, DL, L, LL Self-align Fittings

Weight (g) A L 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 H04-01 15 4 10 H04-02 14 10 21.1 23.1 10 25.1 29.1 4 10 17 H06-01 11 12 21.1 25.1 6 H06-02 16 29.1 19 17 12 14 23.1 24.8 21.1 23.1 24.8 23.1 24.8 25.9 24.1 24.8 25.9 59 14 12 H06-03 31.1 31 H08-01 25.1 16 20 8 14 H08-02 16 29.1 21 17 14 H08-03 31.1 30 17 34 10 17 H10-02 29.1 28 H10-03 17 31.1 37 H10-04 34.1 53 H12-02 30.1

Series 10-, 21- AF-A Air Filter

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

Speed Controller: Standard Type Elbow Type (Metal Body) AS Series

AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 646 B AS Series Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow rate characteristics are representative values.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Additionally, when the barrier is selected, the barriers equivalent to the number of solenoids are included with the product. 52-SY9000 Electrical entry Port size (Base mounted type) Plug connector type Plug connector with cover type Cable type L LL TT Symbol Port size Applicable series Without sub-plate Nil 02 02 03 03 04 1/4 1/4 3/8 3/8 1/2 52-SY5000 Lead wire length 52-SY7000 3 6 10 15

ITV

3 5 ITV00 EXH SUP OUT PWR PWR PWR PWR ITV009 ERR ERR ERR ERR ATM VAC Note) Stations are counted starting from the D side. 50 56 D side U side 1 2 stations 50 9 3 (8) Dimensions in inch are noted in parentheses. 6.5 6.5 1 1 82 89.5 SUP, VACzport 3 3 (6, 1/4") 40 40 EXH, ATMcport 25 25 (6, 1/4") 5 5 2 2 2 OUTxport (4, 5/32") Note) 3.7 Breathing hole (M3 x 0.5) Note) For dimensions of the cable

A_HEC-OM-J017

) 01 32 02 36 30 31 35 30 03 33 30 0D 2 Set at +1.50 deg.C 06 32 0D 37 Temperature setting (with writing EEPROM) F 01 3F 02 37 32 35 30 30 03 33 3F 0D 06 3F 0D Set at 25.0 deg.C 38 Offset setting (with writing EEPROM) F 01 3F 02 38 30 31 35 30 03 33 3F 0D 06 3F 0D Set at +1.50 deg.C HEC 6-1

IR1000/2000/3000

August, 1998 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)

Precision Regulator

. 0.8 MPa 2 AP100 Connection Rc 1/8 01 Connection Rc 1/4 02 Connection Rc 3/8 03 Connection Rc 1/2 04 Bracket B Accessory Pressure gauge G Bracket, name plate reverse mounted R Connection NPT 1/8 IR2000 series N01 Connection NPT 1/4 N02 Connection NPT 3/8 N03 Connection NPT 1/2 N04 Connection G 1/8 F01 Connection G 1/4 F02 Connection G 3/8 F03 Connection G 1/2 F04 IR1000 series

Table of Contents

> D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-C7/C8, D-C73C/C080C, DE7A/E80A, D-Z7/Z8, D-9/9A, D-A9/A9V, and D-A79W type The above auto switches do not have internal contact protection circuits. 1.

Compact 5-Port Solenoid Valve

D D B 2 B 2 B 2 B 2 B 2 1 P P 1 Series Part no.

3 Port Air Operated Valve

/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 20 stations Manifold Option Description Part no.

Auto Switch Guide

20Data Technical Data 1, 2 P. 10-20-69 10-20-1 2 SMC Auto Switch Variations Function Type Electrical entry Auto switch model Page Auto switch mounting style D-C73/C76/C80 D-B53/B54/B64 D-C73C/C80C D-A33/A34 D-A33A/A34A D-A44 D-A44A D-A72/A73/A80 D-A72H/A73H/A76H/A80H D-A73C/A80C D-A53/A54/A56/A64/A67 D-A33C/A34C D-A44C D-A90/A93/A96 D-A90V/A93V/A96V D-90/97 D-90A/93A D-Z73/Z76/Z80* 10-20

Auto Switch Guide

20Data Technical Data 1, 2 P. 6-16-63 6-16-1 2 SMC Auto Switch Variations Function Type Electrical entry Auto switch model Page Auto switch mounting style D-C73/C76/C80 D-B53/B54/B64 D-C73C/C80C D-A33/A34 D-A33A/A34A D-A44 D-A44A D-A72/A73/A80 D-A72H/A73H/A76H/A80H D-A73C/A80C D-A53/A54/A56/A64/A67 D-A33C/A34C D-A44C D-A90/A93/A96 D-A90V/A93V/A96V D-90/97 D-90A/93A D-Z73/Z76/Z80* 6-16-10

REA/REB

D-F7NV, D-F7PV, D-F7BV D-J79C D-F79W, D-F7PW, D-J79W D-F7NWV, D-F7BWV Note 1) Note 1) D-F9N, D-F9P, D-F9B Note 2) Note 2) D-Y59A, D-Y7P, D-Y59B D-Y69A, D-Y7PV, D-Y69B Note 2) Note 2) D-Y7NW, D-Y7PW, D-Y7BW D-Y7NWV, D-Y7PWV, D-Y7BWV D-F7BA D-F7NT D-F79F D-F7LF Note 1) Indicates auto switches for REAR10/15/20 and REBR15.

CRB2/CRBU2/CRB1

D-T991: Right-hand type D-T992: Left-hand type D-S99(V)1, D-S99(V)2 DC (+) Brown [Red] Main circuit of switch Main circuit of switch Main circuit of switch OUT Black [White] DC () Blue [Black] D-S99V1: Right-hand type D-S9PV1: D-S99V2: Left-hand type D-S9PV2: D-S9P(V)1, D-S9P(V)2 DC (+) Brown [Red] OUT Black [White] DC () Blue [Black] D-T99(V)1, D-T99(V)2 D-T99V1: Right-hand type D-T99V2:

Auto Switch Guide

> D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-C7/C8, D-C73C/C080C, DE7A/E80A, D-Z7/Z8, D-9/9A, D-A9/A9V, and D-A79W type The above auto switches do not have internal contact protection circuits. 1.

Auto Switch Guide

> D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-C7/C8, D-C73C/C080C, DE7A/E80A, D-Z7/Z8, D-9/9A, D-A9/A9V, and D-A79W type The above auto switches do not have internal contact protection circuits. 1.

Auto Switch Guide

> D-A7/A8, D-A7H/A80H, D-A73C/A80C, D-C7/C8, D-C73C/C080C, DE7A/E80A, D-Z7/Z8, D-9/9A, D-A9/A9V, and D-A79W type The above auto switches do not have internal contact protection circuits. 1.

High Vacuum Angle Valve

Symbol Nil Auto switch model r Auto switch type t Number of auto switches/Mounting position Mounting position Valve open/closed Valve open Valve closed Quantity Remarks Without auto switch (without built-in magnet) Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) Without auto switch 2 pcs. 1 pc. 1 pc.

Cylinder with Lock

same surface) 1 15 10 D-A5m D-A6m n 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 10 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 20 15 D-A59W n 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 2 (Different surfaces, same surface) 1 25 20 D-F5NTL n 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 20 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 D-Y59m D-Y7P D-Y7mW D-Z7m D-Z80