Setting spring Setting knob Flapper Diaphragm C Nozzle Diaphragm A Fixed orifice Diaphragm C SUP.side passage BLEED Exhaust valve SUP OUT Main valve Valve guide Exhaust F i x ed ori f i ce S UP F or ce N F o rce N Nozzle flapper MPa/ m Diaph.(C) m 2 Main valve MPa/ m (S) 1 1 Setting spring N/m Displ Press Press.
ZP2VB6-05 Workpiece Not gripped 1 cup gripping 2 cups gripping 3 cups gripping -27No.
ZP2VB6-05 Workpiece Not gripped 3 cups gripping 1 cup gripping 2 cups gripping -28No.
ZP2VB6-05 Workpiece Not gripped 1 cup gripping 2 cups gripping 3 cups gripping -33No.
Workpiece ZP2VB6-05 Not gripped 1 cup gripping 2 cups gripping 3 cups gripping 1 cup gripping 2 cups gripping 3 cups gripping -90 -80 -70 -60 -50 -40 -30 -20 Vacuum pressure [ kPa] -10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure [MPa] Exhaust Characteristics by using the vacuum saving valves: ZP2V-B06-05 This data shows the data at the workpiece with no air leakage. -33No.
IR3000 : G43-2-01 G43-P2-N01-X30 IR3010 : G43-4-01 G43-P4-N01-X30 IR3020 : G43-10-01 G43-P10-N01-X30 Set pressure Thread type NIL:Rc F:G 0: 0.01~0.2MPa 1: 0.01~0.4MPa 2: 0.01~0.8MPa N:NPT (Note 3) The pressure gauge is not attached and becomes bundled shipment. 4. Marking on product Product name plate MAX.SUP.PRESS. MAX.SUP.PRESS. MAX.SUP.PRESS.
User setup Object Dictionary Index Base Type Value Text 0 0.1 ms 1 1 ms 0800 USINT 2 10 ms 3 20 ms 0 1 ms 1 15 ms 0801 USINT 2 100 ms 3 200 ms 0 Offset binary 1 Sign & magnitude 0802 USINT 2 2's complement 3 Scaled 0 None 1 2 value average 0803 USINT 2 4 value average 3 8 value average 0 -10+10 V 1 -5+5 V 2 -20+20 mA 3 010 V 0804 USINT 4 05 V 5 15 V 6 020 mA 7 420 mA 0 010 V 1 05 V 0805 USINT
, 24V (power supply) F GND (0V) Black G Shield GND (connected to F.G.)
ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 3 17.5 22 13 ZPG13U-7A-X2 13 15 13 ZPG13C-7A-X2 13 15 1.8 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20U-7A-X2 20 23 ZPG20C-7A-X2 20 23 1.7 19.5 24 4 19.5 24 15 ZPG25U
21.5 LQ1R2E-F3/16" 2.9 LQ1R2F-F 1/8" 1.8 LQ1R3A-F 3/8" 1/4" 3.6 21.5 LQ1R24-F 4 2.6 LQ1R2F-F 3 1.8 LQ1R31-F 10 1/4" 5.8 21.5 LQ1R3B-F 1/4" 3.6 LQ1R3C-F 3/8" 3/8" 25.5 5.8 25 LQ1R3D-F 1/4" 3.6 LQ1R3F-F 3/8" 1/8" 34.5 19.7 5.8 18.5 LQ1R4A-F 1/2" 3/8" 24 7.4 5 20 9 18 17 36.5 21.5 LQ1R32-F 8 5.5 LQ1R33-F 6 3.6 LQ1R34-F 10 3/8" 25.5 24 23 5 9 18 36.5 7.4 20 17 23 25 LQ1R35-F 8 5.5 LQ1R36-F 6
LJ1H303NDStroke -F-X70 LJ1H303SEStroke -F-X70 LJ1H303PAStroke K-F-X70 LJ1H303NAStroke K-F-X70 Combinations other than the above cannot be manufactured.
L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 NAN110-N01 NAN110-N01 NAN200-N02 NAN200-N02 NAN110-N01 24 Q Q Q Technical Reference 35 19.4 Q Q Series VQZ100200300 Q 5 5
Refer to pages starting with 181 for mounting. 30 100 95 95 B 8(4)-6.2 (160) () () 110 95 20 95 A () () (140) A B 100 200 300 400 500 600 700 800 900 1000 1200 Stroke Model LG1H202SC-100-F LG1H202SC-200-F LG1H202SC-300-F LG1H202SC-400-F LG1H202SC-500-F LG1H202SC-600-F LG1H202SC-700-F LG1H202SC-800-F LG1H202SC-900-F LG1H202SC-1000-F LG1H202SC-1200-F 50 150 250 350 450 550 650 750 850 1050
5 6 E F Circuit diagram Note 1) The above dimensions are for ZQ1 1U-J2 L-F .
L Foot N Non-lube F Front flange Lock direction F* Steel tube T Center trunnion D Both directions * Steel tube is not available with auto switch capability.
B Basic style Type L Axial foot style Locking direction N Non-lube F Rod side flange style F Steel tube T Center trunnion style D Both directions Auto switches are not available with steel tube.
B Basic style Type L Axial foot style Locking direction N Non-lube F Rod side flange style F Steel tube T Center trunnion style D Both directions Auto switches are not available with steel tube.
For VXE21: VVX21-3A-F For VXE22: VVX22-3A-F For VXE23: VVX23-3A-F Voltage L (With light) Voltage symbol 5 6 24 VDC 12 VDC Seal material: FKM How to Order Manifold Assemblies (Example) Enter the valve and blanking plate to be mounted under the manifold base part number. Example VVX211CF-05-1. 1 set VXE2111A-1G1 . 4 sets VVX21-3A-F . 1 set is the symbol for mounting.