Compact Guide Cylinder

Grease pack part number: GR-S-010 (10 g) M3, M5, Rc port, NPT port Use the correct tightening torques listed below.

PC Wiring System

Dimensions 10.5 10.5 178 (3.6) 1 C H C H R S 16.7 OUT IN AX/ 140A 28.3 0 45 4.1 53.5 5.1 (3.7) 55 1 1F 16 D 4 0 2 3 5 6 7 8 9 A B C E F 10 11 12 13 14 15 17 18 19 1A 1B 1C 1D 1E + + + + + + + + + + + + + + + + 4.5 5 5 Refer to page 50 in CAT.E02-20 for the junction cable part number.

Pneumatic Transfer System Series MF

Nil S n Auto switch type Bore size Nil Without auto switch 15 32 15mm 32mm Refer to the table below for auto switch part numbers. Curved type Air supply unit Note 1) RS RT RG Lateral curve Inside curve Outside curve Qty.

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~:;:--l' VAC Vacuum load lock chamber Digital pressure switch Digital Pressure Switch Series ZSE6/ISE6 (For vacuum) (For positive pressure) Model 1~SV(S % F ,S, ) ".

4/5 Port Air Operated Valve Series SYJA3000 1

Valve model Type of actuation Port size 1 4/2 (P A/B) Flow characteristics Note 2) Note 3) Effective area mm2 4/2 5/3 (A/B EA/EB) Weight (g) Pilot port size Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] b Grommet Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center Single Double Closed center Exhaust center Pressure center 48

4/5 Port Air Operated Valve SYJA3000 Series

VPA 0.4 0.3 VPA3 0.2 0.1 0.2 0.3 0.4 0.5 0.6 Operating pressure range MPa Flow Rate Characteristics/Weight Type of actuation Valve model Port size 14/2 (PA/B) Flow rate characteristics Note 2) Effective area mm2 4/25/3 (A/BEA/EB) Note 3) Pilot port size Weight (g) Cv C [dm3/ (s bar)] b Cv C [dm3/ (s bar)] b Single Double Closed center Exhaust center Pressure center Single Double Closed center

5 Port Air Operated Valve

1.0 0.9 VTA 0.8 Pilot pressure (MPa) VGA Pilot pressure range 0.7 0.6 VPA 0.5 VPA3 0.4 0.3 0.2 0.1 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Operating pressure (MPa) 1499 VFA1000/3000/5000 Series Flow Rate Characteristics/Weights Port size Flow rate characteristics Note 1) 14/2 (PA/B) 4/25/3 (A/BEA/EB) Weight (g) Note 2) 1, 4, 2 (P, A, B) 5, 3 (EA, EB) Type of actuation Valve model C[dm3/ (s/

Low Maintenance Filter Series FN1

Description Material 1 2 3 Stainless steel SUS304 Cover 4 EZH710AS-149 Stainless steel SUS304 Element Stainless steel SUS304 Bowl JIS B 2401-1A-P185 NBR Stainless steel SUS304 V-band 5 O-ring FPM JIS B 2401-4D-P185 Note Replacement parts No. Description Material NBR JIS B 2401-1A-P85 4 O-ring FPM JIS B 2401-4D-P85 9

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

PVT317-53-1A 1 pc.

Digital Pressure Switch

Connector pin numbers -19No.PS-OMU0003-D Internal circuit and wiring examples Z/ISE20A(F)---Output specification -S/-R (Analog output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analog output 1 to 5 V Output impedance 1 k S: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24

Digital Pressure Switch

Connector pin numbers -20No.PS-OMU0006-D Internal circuit and wiring examples Z/ISE20B(F)---Output specification -S/-R (Analog output mode) Switch output NPN open collector output type-2 output Max. 28 V, 80 mA Residual voltage 1 V or less R: Analog output 1 to 5 V Output impedance 1 k S: Analog output 4 to 20 mA Max. load impedance Power supply voltage 12 V: 300 Power supply voltage 24

Digital Pressure Switch

0.01 s increments Hysteresis Hysteresis mode Variable from 0 2 Window comparator mode Short circuit protection Provided Voltage output 3 Output voltage (Rated pressure range) Voltage output: 1 to 5 V2.5%F.S.

AMR3000 to 6000

AMR3000 1349161A 13579 135711A 135011 G75 135714 AMR4000 131515A 135511 13154A 131514 G90 635327 AMR5000 131515A 13589 135811A 131613 G100 635327 AMR6000 131614A 13569 135614-1A 135413 G115 63555 Diaphragm ass'y Element (1) Body Housing Bowl Bonnet Brass Stainless steel NBR Fiber Aluminum alloy Aluminum alloy Aluminum alloy t y u i o !

VT317

PVT317-53-1A 1 pc.

SYJA3000

SYJ7000-21-1A 1 pc. 0.2 Caution Be Sure to read before handing.

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

AMR3000 to 6000

Description AMR3000 1349161A 13579 135711A 135011 G75 135714 AMR4000 131515A 135511 13154A 131514 G90 635327 AMR5000 131515A 13589 135811A 131613 G100 635327 AMR6000 131614A 13569 135614-1A 135413 G115 63555 Diaphragm ass'y Element (1) Body Housing Bowl Bonnet Aluminum alloy Aluminum alloy Aluminum alloy Brass Stainless steel NBR Fiber q w e r t y u i o !

Unit Manifold Valve

Description Barb fitting One-touch fitting PV060-73-1A KJS02-M3 Socket Part no. Connector cable The minimum ordering quantity is 10 pcs. 4 Compact Direct Operated 3 Port Solenoid Valve Series VV061 Dimensions VV061-04 LED indicator 38.6 32.6 2-2.2 (Mounting hole) 6 Solenoid valve No.

VQZ1000/2000/3000

Note 2) Except VQZ1000 VQD Cylinder port N1 N3 N7 N9 N11 M5 02 Symbol 1/8" 5/32" 1/4" 5/16" 3/8" 1/4 thread M5 thread Applicable tubing O.D.

S

Note 2) For the S0700 series, SI unit models EX180-SDN1, EX180-SDN2, or EX180-SMJ1 cannot be selected as S kit (SDQl, SDV2).