Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

(A) (A) 2(A) 2(A) 2 2 3(R) (P)1 3(R) (P)1 i i 1 (P) 3 (R) 1 (P) 3 (R) u u Component Parts Replacement Parts No. 1 2 3 4 5 6 Description Body Piston plate End cover Piston Spool valve assembly Spool spring Description Sub-plate Note) Note White White White Note Aluminum die-cast Part no.

60

Orifice symbol (Diameter) Solenoid valve (Port size) 1 (2 mm) 2 (3 mm) 3 (4.5 mm) 4 (6 mm) VXK21 VXK22 VXK23 Model 01 (1/8) 02 (1/4) Port symbol (Port size) 02 (1/4) 03 (3/8) 02 (1/4) 03 (3/8) Table (3) Rated Voltage/Electrical Option Model Part no. Table (4) Bracket Part No.

Stainless Steel One-touch Fittings Series KG

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

2/3 Port Valve

IN Model Port size Rc(PT) Orifice size (mm) Model Solenoid coilO Coils: Class B, Class H 1 8 1 4 , VX211 0 2 2 3 4.5 3 1 8 1 4 , VX212 0 2 1 8 1 4 , VX213 0 2 VoltageO 1 4 3 8 , VX222 0 2 AC Standard Option 100V, 200V 48V, 110V, 220V, 240V 1 4 3 8 , 4.5 VX223 0 2 1 4 3 8 , 6 VX224 0 2 1 4 3 8 , 8 VX2250 DC Standard Option 24V 12V 3 8 1 2 , 1 4 , 10 VX2260 1 4 3 8 , 3 VX232 0 2 1 4 3 8 , 4.5

Speed Controller for Low Speed Operation Series AS-M Standard Type (Metal Body)

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

O.D. mm Connection threads R Note 1) Weight g D2 M L2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37 39.5 KPQL04-M5 KPQL04-01 KPQL04-02 KPQL06-M5 KPQL06-01 KPQL06-02 KPQL08-01 KPQL08-02 KPQL10-02 KPQL10-03 KPQL12-03 KPQL12-04 8

Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS

Flow Rate and Sonic Conductance AS121F-M3 AS121F-M5 AS131F-M5 AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS131F-M3 Model AS121F-M5-02 2, 3.2, 4 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Metric size Tubing O.D. 1/8" , 3/16" 1/8" , 5/32" 1/8" , 5/32" 3/16" , 1/4" , 1/4" , 5/16" , 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 1/4" , 5/32" 5/16" 3/8" Controlled

Series KG Stainless Steel One-touch Fittings

L1 L2 M Nylon Urethane Weight (g) D 1 8 KGF04-01 KGF04-02 KGF06-01 KGF06-02 KGF06-03 KGF08-01 KGF08-02 KGF08-03 KGF10-02 KGF10-03 KGF12-02 KGF12-03 5.6 15 23 11 16 14 11 13 15 17 13.1 13.1 14 27 31 27.5 31 33.5 29 32.5 33.5 34.5 36.5 35 37 41 4 10 5.6 1 4 17 14 17 19 14 17 19 17 19 17 1 8 15 22 25 17 24 24 27 30 36 31 1 4 12 6 3 8 1 8 1 4 3 8 1 4 3 8 1 4 3 8 11 13 14 14 15 8 18.0 18.5 26.1

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Type M5 Port size Elbow Universal 2 3 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 Universal type 01 02 03 04 Applicable tubing O.D.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

Flow Rate and Sonic Conductance AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 Model AS121FM AS131FM Symbol Metric size 6,8 8,10 1/8",5/32",3/16",1/4" 3/16",1/4" 5/16" Tubing O.D. 3.2,4 3.2,4,6 4 6 1/4",5/16" 3/8" Inch size 1/8",5/32" 5/32" 3/16" Air flow (L/min(ANR)) 12 38 7 Controlled flow Sonic conductance dm3/(sbar) 0.04 0.12 0.02 Flow Direction Symbols on Body Critical pressure ratio 0.25

Metal Seal/Rubber Seal Series VQ Body Ported

Each number of replacement parts are included in one set. : Number of stations (01 to 16) !1 and !2 are in one set. Note 1) (3) (1) No. Part no. Description Material Number Note 2) Note 3) 2 VVQ1000-105A-3!1 Tie-rod bolt Carbon steel (2) 1 !

reduces flow setting time

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 0 2 06 AS 1F S E M5 Body size 1 S Body size 2/3/4 AS 01 2 0 2 1F S 06 With indicator Made to Order Refer to page 598 for details. Body size 2 1/8, 1/4 3 3/8 4 1/2 Seal method Nil Without sealant S With sealant Type 2 Elbow 3 Universal Note) Face seal type is used for the G thread type. Select Nil/Without sealant.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield (3) Cable color Terminal No.

modular-press-e

Model name Model AMR3000 AMR4000 AMR5000 AMR6000 :E3-02 :E3-03 :E4-02 :E4-03 :E4-04 :E5-04 :E5-06 :E6-06 1:E6-10 1 4 3 8 1 4 3 8 1 2 3 4 3 4 Adapter assembly Note 7) 1 2 Float style auto drain (AMR100) Note 8) AD33-X203 AD33X202 AD33-X210 AD33-X201 AD33-X203 AD33-X202 IS1000-01 (0.4 MPa setting) AD33-X210 AD33-X201 Compact pressure switch Elbow (R x Rc) Note 9) 135510 135613 135510 135613

Modular F.R.L. Pressure Control Equipment

Model name Model AMR3000 AMR4000 AMR5000 AMR6000 :E3-02 :E3-03 :E4-02 :E4-03 :E4-04 :E5-04 :E5-06 :E6-06 1:E6-10 1 4 3 8 1 4 3 8 1 2 3 4 3 4 Adapter assembly Note 7) 1 2 Float style auto drain (AMR100) Note 8) AD33-X203 AD33X202 AD33-X210 AD33-X201 AD33-X203 AD33-X202 IS1000-01 (0.4 MPa setting) AD33-X210 AD33-X201 Compact pressure switch Elbow (R x Rc) Note 9) 135510 135613 135510 135613

Compressed Air Cleaning Filter Series

8, 1/4 300 250C 1/4, 3/8 750 350C 3/8, 1/2 1,500 Piping support type AMG 450C 1/2, 3/4 2,200 550C 3/4, 1 3,700 650 1, 1 1/2 6,000 850 AMG150C to 550C AMG650/850 1 1/2, 2 12,000 2C 1/8, 1/4 300 Large dust particle filtration, Oil droplet separation Large dust particle filtration, Oil droplet separation 4C 1/4, 3/8 750 8C Main Line Filter 3/8, 1/2 1,500 Piping support type 11C 1/2, 3/4 2,200

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread

I

Direct Piping 1/8 T1 NPTF 1/8 P I P I N G S P E C I F I C AT I O N S S W I T C H S P E C I F I C AT I O N S 01 Direct Piping PT 1/8 T1 NPTF 1/8 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output S W I T C H S P E C I F I C AT I O N S 65 3 Wire Output PNP 25 3 Wire Output NPN 26 3 Wire Analog Output W I R I N G S P E C I F I C AT I O N S 0.6m L Grommet entry 3m lead W I R I

HEC-OM-S008

CONTENTS 1 Preparation for Communication . 1-1 2 Specifications of Communication Method . 2-1 3 Communication Format (same as current HEC series) . 3-1 3.1 Control code used for communication . 3-1 3.2 Command code list . 3-1 3.3 Communication procedures and format . 3-2 3.4 Calculation of Check Sum . 3-4 4 Details of Communication Format . 4-1 4.1 Temperature setting (without writing FRAM