Direct Operated

Valve / Body type 1 3 5 Solenoid valve option Refer to Table (2) shown below for availability.

One-touch Fittings

2 3.2 4 6 8 10 12 16 V V V V V V How to Order P.174 Variations P.175 Dimensions P.176 Metric P.173 2 3.2 4 6 8 10 12 16 V V V V V V V How to Order P.186 Variations P.187 Dimensions P.188 Inch P.185 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V V How to Order P.196 Variations P.197 Dimensions P.198 Inch P.195 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" V V V V V V Gasket Seal (Uni Thread) Connection

DOC1023126

Perform wiring referring to the wiring diagram below. 38 - NPN type PNP type Input power Input power supply supply IO connecter IO connecter 24VDC 24VDC IN0 1 IN0 1 IN1 2 IN1 2 RESET 3 RESET 3 (Unused) (Unused) Not connected. 4 Not connected. 4 Load Load OUT0 5 OUT0 5 Load Load OUT1 6 OUT1 6 Load Load OUT2 7 OUT2 7 Load Load ALARM 8 ALARM 8 Caution The parallel input/output of this electric

High Vacuum Angle Valve, XL Series

Aluminum (setting temp.: 120C [248F]) Stainless steel (setting temp.: 120C [248F]) Uniform baking temperature Excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. 3, 4, 5 3 120 120 Comparison with KF25 flange 100 100 Body 1 4 Temperature (C) Body 2 80 5 2 Temperature (C) Body 3 1 1, 2

SMC CORPORATION OF JAPAN

The Logic Function Blocks .5-1 5.1 The AND Block . 5-1 5.2 The OR Block . 5-1 5.3 The NOT Block . 5-2 5.4 The XOR Block (Exclusive OR) . 5-2 5.5 The NAND Block (Not AND) . 5-2 5.6 The NOR Block (Not OR) . 5-3 viii PneuAlpha 6.

Digital Flow Switch (Integrated display type)

Press the SET button between 2 to 5 seconds. Press the SET button for 5 seconds or longer.

Electric Actuator / Guide rod Slider

100 100 900mm 1000mm 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 Overhang direction:L3[mm] Overhang direction:L3[mm] 250 250 600mm stroke L3 m 200 200 500mm or less 150 150 600mm stroke or less 100 100 50 50 0 0 0 1 2 3 4 5 0 1 2 3 4 5 Workload[kg] Workload[kg] 300 300 250 250 Overhang direction:L4[mm] L4 m Overhang direction:L4[mm] 600mm stroke 200 200 600mm stroke or

Secondary Batteries

(P) 3 (EB) 3 position pressure center (A) 4 (B) 2 5 5 (EA) 1 (P) 3 (EB) Rated voltage 4 position dual 3 port valve: N.C.

25

Transition wiring cable length (same cable length) m Power supply cable length: 3 m Transition wiring cable length (same cable length) m Power supply cable length: 10 m Bar length symbol 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 2.

CL

2 !3 !4 !5 !6 !

CLQ

2".

CLK1

Reed switch Choke coil 5 32 22 5 13.6 500 (3000) [5000] 2 x 2-6 Resistor Depth of counter bore 2.4 2-3.4 through LED Zener diode D-P70 4 20 Blue () [Black] Brown (+) [White] D-P75 Reed switch Lead wire: Oil and fire resistant 0.75mm x 2 Effective operating range 3mm Case: PBT resin Fire resistant (UL94-V0) Resistor Operating range (Refer to the table below.) l 16 Most sensitive position LED

HEC_001W-E

3 5 SPECIFICATIONS -5-1 5.1 SPECIFICATIONS OF HEC001 -5-1 TABLE5-1 SPECIFICATIONS OF HEC001 -5-1 5.2 SPECIFICATIONS OF HEC003 -5-2 TABLE5-2 SPECIFICATIONS OF HEC003 -5-2 5.3 PERFORMANCE CHART -5-3 5.3.1 PERFORMANCE OF HEC001 -5-3 1) COOLING CAPACITY -5-3 2) HEATING CAPACITY -5-4 3) PRESSURE LOSS OF RADIATING WATER -5-5 5.3.2 PERFORMANCE OF HEC003 -5-6 1) COOLING CAPACITY -5-6 2) HEATING CAPACITY

CRJ

2 With external stopper/CRJU !3 !8 !4 !5 !8 !7 !

Hydraulic Filters

AC125 AC250 DC8 DC14 DC30 DC125 DC250 5 5 5 5 5 0.4 0.3 1.5 1 0.7 0.5 4 4 2.5 1.5 1.3 0.8 3 3 3 0.1 0.05 5 4 3 3 3 0.1 0.05 4 4 0.4 0.3 Reset button COM. Precautions 1. The figures in the above table indicate stationary current. 2. An inductive load has a power factor (AC) of 0.75 or more, and a time constant (DC) of 7 msec or less. 3.

PFxx-OMY0005

[F30] Setting of accumulated value hold completed : The value is stored in memory every 2 or 5 minutes.

CRQ2

18 65 27 10 13 11.4 13.5 19 36 4 4 2.5 83 4 33 4 20 40 139 177 5 37 5 M6 x 1 depth 7 0 0.03 93 11 20 15 14 17 25 73 32.5 2 20 5 3.5 39.5 5 Dimension AU does not indicate the dimension when shipped because of the adjustment section.

HRS100/150

as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 V V (400 V as standard, 200 V as an option) HRSH090 Inverter type 0.1 5 to 40 V Indoor use (Only 200 V as an option) (400 V as standard, 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 V V V V V (Only 200 V as an option) 97 Thermo-chiller Standard Type HRS100/150 Series

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

Applicable Auto Switch Model

Note 2) Refer to p.5.3-5 for lead wire length.