Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

For details, refer to page 8-30-52. Wide range detection type, solid state auto switch (D-G5NBL type) is also available. For details, refer to page 8-30-50.

CNA

(n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different sides RLQ n Same side MLU 10 35 55 75 80 90 75 80 90 75 80 90 1 Different sides 2 ML1C Same side 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30

Air Fittings & Tubing

Weight (g) L A M d 7 34 32 KQ2N04-M5 KQ2N04-01S KQ2N06-M5 KQ2N06-01S 2 6 2 5 M5 X 0.8 29 13 4 2.5 1 8 M5 X 0.8 10 30 14 33 35 37.5 39 41 46 2.5 7 30 31 13 14 6 1 8 10 4.5 1 4 14 14 31.5 33 14.5 14.5 KQ2N06-02S 14 1 4 KQ2N08-02S 17 8 6 3 8 KQ2N08-03S 17 17 7.5 34.5 39.5 16 18.5 30 31 10 3 8 KQ2N10-03S Nipple: KQ2N Part No.

CC

35 18 35 36 25 72 17.5 1 88.2 148.5 103.9 45 CCVS02-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 2 98 148.5 121.8 57 CCVSl1-lG-S M5 X 0.8 5.4 to 7.5 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl2-lG-S 1/2 45 80 86 101 35 18 35 36 25 72 17.5 1 98 148.5 57 88.2 103.9 CCVSl3-lG-S 1/2 45 80 86 35 36 25 72 17.5 98 57 88.2 CCVSl0-S 3/4 66 107 116 135 50

Air-hydro Unit

CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S 66 107 116 50 24 40 28 1 40 27 115 100 62 3/4 180.5 124.9 135 CCVL1-G-S 66 107

CNA

mounting 35 55 75 75 80 80 90 90 With 2 With n 15 90 100 110 120 With 1 With 2 (Different and same) With 1 Same side D-F5lW D-J59W D-F5BA D-F5lF D-F5NTL Different mounting n=2, 3, 4, 35+30(n-2) n=2, 4, 6, 8, 75+30(n-2) n=2, 4, 6, 8, 80+30(n-2) n=2, 4, 6, 8, 90+30(n-2) 25 110 120 130 140 D-A44 (n-2) 25+55 2 n=2, 4, 6, 8, (n-4) 110+55 2 n=4, 8, 12, 16 (n-4) 120+55 2 n=4, 8, 12, 16 (n-

HRX-OM-M090

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

CV/MVGQ

80 + 30 n = 4, 8, 12, 16 75 + 30 n = 4, 8, 12, 16 65 + 30 n = 4, 8, 12, 16 15 + 30 n = 2, 4, 6, 8 n = 4, 8, 12, 16 Data 10-15-77

Bernoulli Gripper

Body Mounting Model Body material Screw size Max. screw-in depth [mm] Tightening torque [Nm] ZNC(20, 30) Aluminum 0.63 ZNC(20, 30)P Resin 0.32 ZNC(20, 30)S Stainless steel 0.63 ZNC(40, 60) Aluminum No restraining force in the horizontal direction Restrain horizontal movement with a guide. M3 x 0.5 6 2.

MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

Electric Rotary Table

to 420 20 to 280 30 to 420 20 to 280 30 to 420 Step Motor (Servo/24 VDC) Pushing speed [/sec] 20 30 20 30 20 30 Max. angular acceleration/deceleration [/sec2] Note 2) 3,000 0.5 Backlash [] 0.05 Positioning repeatability [] Impact/Vibration resistance [m/s2] Note 4) 150/30 Actuation type Special worm gear + Belt drive Max. operating frequency [c.p.m] 60 Operating temp. range [C] 5 to 40 Operating

HRX-OM-R016

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

HRX-OM-R005

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

Compact Guide Cylinder Series MGQ

136 77 136 123 182 123 182 151 411 252 627 175 33 23 44 32 69 121 69 121 111 162 111 162 137 368 230 562 200 30 21 40 29 63 109 63 109 101 146 101 146 126 333 211 509 12 16 20 25 32 40 50 63 80 100 Allowable Rotational Torque of Plate T (N.m) Stroke (mm) 40 Bore size (mm) Bearing type 10 20 25 30 50 75 100 125 150 175 200 MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL MGQM MGQL

HRX-OM-O021

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

SMC Pneumatic Clean Series

101 121 Other dimensions are the same as basic style.

HRX-OM-W058

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 30 Heat radiation Circulating fluid display 1 temperature 30 Circulating fluid set temperature 29 30 MODE Explanation Control the temperature so that the discharge temperature of the circulating fluid is circulating fluid set temperature + offset temperature.

21

25 10 19 10 26 13 10.5 6 34 6 33.4 Width across flats 8 length 3.5 17.5 15 17 9 30 25 10 19 12 26 13 10.5 8 34 6 37.4 Width across flats 10 length 3.5 23.5 20.5 22 10 38 41.2 15 30 14 32 16 13.5 8 42 8 46.4 Width across flats 12 length 3.5 L 30 MM M8 x 1.25 NA 24 NN M20 x 1.5 P M5 x 0.8 RR 9 S 55 U 14 Z 116 ZZ 125 Bore size 20 25 32 40 30 M10 x 1.25 30 M26 x 1.5 M5 x 0.8 9 56 14 120 129

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

IN side, OUT side 4 10 20 30 50 75 75 Prevents vacuum equipment trouble due to airborne contaminants. Mass (g) 22 22 30 30 39 39 Model Tubing size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 7 7 12 12 16 16 6 6 8 8 10 Metric size Unrestricted 360 piping tube mounting.

Metal Seal/Rubber Seal Series VQ Body Ported

AXT661-12A AXT661-14AN AXT661-14AN-6 AXT661-14AN-10 AXT661-14AN-20 AXT661-14AN-30 AXT661-13AN AXT661-13AN-6 AXT661-13AN-10 AXT661-13AN-20 AXT661-13AN-30 AXT661-13A AXT661-13A-6 AXT661-13A-10 AXT661-13A-20 AXT661-13A-30 Note 1) 100/110 VAC for single: AXT661-31A-; for double: AXT661-32A200/220 VAC for single: AXT661-34A-; for double: AXT661-35Aare in accordance with the above table.