Stations: 8 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: Rc

Stations: 5 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: Rc

Stations: 5 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: Rc

Stations: 10 Stations, Exhaust Style: Individual Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: Rc

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

Vacuum regulator

Pressure when compression force o f set spring balances with SET. Pressure.

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

Nil S n Mounting style Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Single clevis style Auto switch B Nil Without auto switch (Built-in magnet cylinder) L F G C For the applicable auto switch model, refer to the table below. Auto switches are shipped together, (but not assembled).

VBA-OM-S001

No gap Booster regulator Air tank Booster regulator A B C D E F G H I J K L M Grooves There should be no damage or dust O-rings VBAT05A1 VBA10A VBA11A 150 374 370 307 163 160 100 200 Rc 3/8 257 60 Rc 1/4 20 Air tank There is a slight play on the diagonal parts.

VBA-OM-P018

VBA2 VBA1 () 30 IN 1.5MPa VBA1A 2MPa, O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT 4 11 () 1 VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22~24Nm(R3/8) OUT O Rc1/4 O A B C D E F

VBA-OM-S008

VBA11A 150 337 370 307 163 160 100 200 Rc 3/8 257 60 278 130 regulator A B C D E F G H I J K L M URL http://www.smcworld.com Rc 1/4 20 Rc 1/2 39 IN port Rc3/8 Rc 3/8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3 5207 8249 Fax: +81 3 5298 5362 170 180 120 312 2008 SMC Corporation All Rights Reserved Assembly dimensions OUT port (J) Maintenance 411 IN port (I) Akihabara

VBA-OM-S006

VBAT10S-Y-4 () VBAT-U 30 1 1 VBA1 4 O VBA1 1 /VBAT5S-Y-4 1 1 / 1 VBAT-U 1 1 ( 3 ) VBAT-V1 () () / / VBAT-M46C / VBAT-M46 VBAT05S1-U-X104 2 OUT VBAT-M46C VBAT05S1-U-X104 VBAT10S1-U-X104 IN VBAT05S1-U-X104 VBAT10S1-U-X104 VBA1 VBA1/VBA2 VBA2 5.3kg 8kg 5L 10L OUT 3/8 1/2 TSG R0003-2007 1.5MPa SUS304 0~75 oC 1/4 IN 3/8 O VBA1 1 SMC VBAT-V1 1 VBA11A 150 337 370 307 163

Sine Rodless Cylinder/Direct Mount Type Series REAR

Grease pack part no.: GR-S-010 (10 g) Scraper NBR Cushion seal Chromated NBR Magnetic shielding plate Clear anodized Rolled steel plate Switch rail 27 Aluminum alloy Magnet 28 Nickel plated Hexagon socket head cap screw 29 #0 Chromium steel Wear ring C Special resin 26 to 29 are non-replaceable parts, so they are not included in the seal kit. 163

e-Rodless Actuator

Reference formulae [Dynamic moment at impact] Use the following formulas to calculate dynamic moment when taking stopper impact into consideration. m : Load mass (kg) F : Load (N) FE: Load at acceleration and deceleration (N) a : Set acceleration (m/s2) : Set speed (mm/s) M : Static moment (Nm) FE = m a Nominal size Maximum load weight (kg) 16 5 25 10 L1 : Distance to the loads center of

06-rear-e

Grease pack part no.: GR-S-010 (10 g) Scraper NBR Cushion seal Chromated NBR Magnetic shielding plate Clear anodized Rolled steel plate Switch rail 27 Aluminum alloy Magnet 28 Nickel plated Hexagon socket head cap screw 29 #0 Chromium steel Wear ring C Special resin 26 to 29 are non-replaceable parts, so they are not included in the seal kit. 163

Peltier-type Chiller Thermo-con/ Compact Type

Air 2 Peltier-type Chiller Thermo-con/Compact Type Air-cooled HEF Series Application Examples Cool Diode Laser Cool Optical Camera C-mount lens F-mount lens Microscope C-mount TV adapter Data analyzer Compatible with digital cameras Microscope Cooling Plate Laser Oscillator Cool Power Device Beam Bumper Cooling Glass Heat Exchanger Circulation Between Gas Generation Analyzer and Jacketed

Manifold Specifications

Option 05 5 stations 10 10 stations Dimensions 65 (89.5) [68] 2-7 91 (115.5) [94] Mounting hole n-Rc 1 4 4-Rc 3 8 ( ): DC [ ]: AC, with indicator light n L L1 L2 2 87 100 3 125 138 4 163 176 5 201 214 6 239 252 7 277 290 8 315 328 9 353 366 10 391 404 L1 = 38n + 11, L2 = 38n + 24 n: Station Formula for manifold weight M = 0.16n + 0.1 (kg) 4-16-4

Stations: 3 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc

Stations: 12 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: Rc

Stations: 3 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: T (NPTF)

Stations: 8 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 02 (1/4 Individual Exhaust), Thread: F (G)