3

C 1 B A Basic (mm) (mm) T 9 10.5 MKB20-Z MKB25-Z Model Yh9 18 23 A B C E F G 36 40 47 52 36 40 35.5 40.5 18 21 17.9 22.5 S 28 27.5 Clamp stroke Model Rod state 0 0.043 0 0.052 20 mm Q R 112.5 142 113.5 143 30 mm Q R 132.5 172 133.5 173 10 mm Q R 92.5 112 93.5 113 Retracted Extended Retracted Extended MKB20-Z 72 82 92 MKB25-Z 73 83 93 Note) The above figure is with the auto switch (D-M9) mounted

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

ZPT/ZPX

Silicon rubber Urethane rubber Fluoro rubber EPR 178 144 143 141 139 350 301 299 414 365 363 Add or deduct the weight shown in the table on the left for other materials. 71 38 37 83 50 49 149 115 114 112 110 40 50 63 80 100 125 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 How to Order A14 H N 40 ZPT Vacuum entry/Mounting thread diameter (Vacuum entry port) Pad diameter (mm) 40, 50

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

But, F mark is indicated on the inside of the pad when the plate is removed. 260

2–4

-RA Both ends tapped (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1

Compact Cylinder/Guide Rod Type Series CQM

2 x RA 2 x 2 x OA CQS Both ends tapped (CQMA) CQ2 RQ (mm) CQM Without auto switch With auto switch Bore size (mm) Stroke range (mm) P P EA EB EC MU A B F Q A B F Q TN TF TN TF 5 5.5 11.5 M5 x 0.8 40 23 32 10 to 50 50 33 7.5 10.5 45 43 34.4 Rc 1/8 NPT 1/8 G 1/8 7.5 10.5 G 1/8 Rc 1/8 NPT 1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc 1/8 NPT 1/8 G 1/8 8 11 G 1/8 56.5 39.5 8 11 52 50 41.4 Rc

Low Profile Slide Table Series MXF

Table displacement due to pitch moment load Table displacement due to yaw moment load Table displacement due to roll moment load Table displacement of section A when loads are applied to the section F with the slide table retracted. Table displacement when loads are applied to the section marked with the arrow at the full stroke.

pa

N T, F, N are options.

3 Position Cylinder Series RZQ

N] F=x PA+ x PC F= x PA+( ) x PC F=x PA+ x PB+( ) x PC F= x PA , and are piston areas.

IDX-OM-W011

O N 3 ( ) 5 /1 ( ) I D F Seri es 141 14 1 I D XO M W 011 14 T 144 PE 1 2 3 LN PE PE: L N: LN PE M 3 6. 5m m 1. 25m m 2 ( ) ( ) I D F Seri es 144 14 2 I D XO M W 011 14 T 145 I D F4E8E10T I D F4E8E20T I D F11E20T AC100/100,110V (50/60Hz) PE N L 1 2 AC200/200,220V (50/60Hz) PE N L 1 2 TB 3 TB 3 TDR MC TDR MC TDR ILS TDR ILS MC MC OLR OLR MC MC CM MC CM MC PTC PTC C11 PRS

End Lock Cylinder Series CBG1

TA DL2 TF TG A S + Stroke H NA F ZZ + Stroke Section TA With non-locking type manual override (suffix N) With locking type manual override (suffix L) HN HR MO RF WL WL KA 0.1 C 8-J NA (mm) Stroke range Bore size (mm) A AL B1 C D DL2 E F GA GB H H1 HR HN (max.)

3 Position Cylinder Series RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Mass (g) CRBU2W10 CRBU2W15 CRBU2W20 CRBU2W30 90 CRBU2W40 90 Model (size) Vane type 180 270 90 180 270 90 180 270 180 270 180 270 90 Rotating angle Single vane Double vane D469 47.1 47.5 47 73 72 72 143 142 263 258 491 480 140 255 Body of rotary actuator Auto switch unit + 2 switches 30 30 50 60 46.5 Angle adjuster 30 47 90 150 203 90 100 90 100 90 100 90 100 90 100 Rotating angle 158 308

RZQ

N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.

XLAQ/XLDQ

U U M V E A V L Heater (Option) (Maintenance space) Indicator Auto switch (Option) B L K S H J M G A A (mm) Model A 189 198 B 66 79 C 2 2 D 11 11 E 55 75 F 41 52 G 63 68 H 20 20 J Max. 5 Max. 5 K L XLDQ-40 XLDQ-50 65 70 143 153 474 XLAQ/XLDQ Series Glossary of Terms 2 Shaft Sealing Method 1 Seal Materials Bellows Bellows offer cleaner sealing with reduced particle generation and less outgassing

CQM

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com (KB) D-A7/A8 Auto switch KA A + Stroke B + Stroke W L S EA EB EC M J 2 x 2-OA 2 x 2-RA Both ends tapped style (CQMA) (mm) Without auto switch With auto switch Stroke range (mm) Bore size (mm) P P EA EB EC B F Q A B F Q A TN TF NN NN TN TF 5 5.5 11.5 M5 x 0.8 M5 x 0.8 40 23 32 10 to 50 50 33

Stations: 4 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 14 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 7 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 20 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc