Stations: 5 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 6 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 11 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Stations: 16 Stations, Exhaust Style: Common Exhaust, A Port Size: 1/8 Common Exhaust/Individual Exhaust, Thread: NPT

Electro-Pneumatic Proportional Valve

Base mounted Body ported Base mounted Voltage 5 6 24VDC 12VDC Port size Nil M5 01 01F 01N 01T Without sub-plate (PVQ13, 33) With sub-plate (PVQ13 only) Rc 1/8 G 1/8 NPT1/8 NPTF 1/8 Electrical entry Orifice size L type plug connector, with lead wire (PVQ13 only) M type plug connector, with lead wire (PVQ13 only) Grommet (PVQ31, 33) L 03 04 06 08 16 23 40 0.3mm ( for PVQ13) 0.4mm ( for PVQ13

Thermo-chiller

heat C [cal/(kgfC)] 41F (5C) 1.00 4.2 x 103 1.00 1 x 103 1.02 3.91 x 103 1.02 0.93 x 103 1.02 3.91 x 103 1.02 0.93 x 103 50 (10) 1.00 4.19 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.93 x 103 59 (15) 1.00 4.19 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.93 x 103 68 (20) 1.00 4.18 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.94 x 103 77 (25) 1.00 4.18 x 103 1.00 1 x 103 1.01 3.91 x 103 1.01 0.94

HRS100/150

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

energy saving effect

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 4 18 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 25.4 25.9 25.4 22.9 26.3 26.8 25.6 26.1 32.6 30.6 37.6 33 34.1 34.1 8 M5 22.5 10 4 4 4 18 4 10 14 1/8 1/4 19.5 17 7 12 M A L H Connection threads 8 M5 23 12 5 6 10 10

Air Slide Table

For lubrication, specialized grease GR-F is recommended.

NCQ2/CQ2

Note 2) Not available with bore size over 63mm, or strokes over 100mm. 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 80 mm 100 mm 125 mm 140 mm 160 mm 180 mm 200 mm Body option Mounting B A D L G F Nil F C M Through hole (std.)

Lightweight and Compact

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For auto switch mounting position and its mounting height, refer to page 7-6-103.

MY1

8 MY1HG-F (W) Component Parts Description Material Note No.

Stability of suction position,

Displacement NBR (N): Silicone rubber (S): Urethane rubber (U): FKM (F): Mark-free NBR (CL): ZP3E-32UM ZP3E-80UM 3 6 Displacement [mm] Displacement [mm] 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-100UM ZP3E-40UM 3 8 Displacement [mm] Displacement [mm] 6 2 N, S, U, F, CL N, S, U, F, CL 4 1 2

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

KPGH04-02 KPGH06-M5 KPGH06-01 KPGH06-02 KPGH08-01 KPGH08-02 KPGH10-02 KPGH10-03 KPGH12-03 KPGH12-04 KPQH04-M5 KPQH04-01 KPQH04-02 KPQH06-M5 KPQH06-01 KPQH06-02 KPQH08-01 KPQH08-02 KPQH10-02 KPQH10-03 KPQH12-03 KPQH12-04 24.4 24.9 23.5 21.4 25.3 25.8 23.7 24.6 30.7 29.1 36.1 30.9 32 32.2 8 M5 x 0.8 21.5 10 4 M A L 17 4 4 4 10 14 18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5

53

3.91 x 103 1.02 0.93 x 103 10C 1.00 4.19 x 103 1.00 1 x 103 10C 1.02 3.91 x 103 1.02 0.93 x 103 15C 1.00 4.19 x 103 1.00 1 x 103 15C 1.02 3.91 x 103 1.02 0.93 x 103 20C 1.00 4.18 x 103 1.00 1 x 103 20C 1.01 3.91 x 103 1.01 0.93 x 103 25C 1.00 4.18 x 103 1.00 1 x 103 25C 1.01 3.91 x 103 1.01 0.93 x 103 30C 1.00 4.18 x 103 1.00 1 x 103 30C 1.01 3.91 x 103 1.01 0.94 x 103 35C 0.99 4.18 x 103

Mechanically Jointed Rodless Cylinder Series MY1

MY2H G D Za MY3A MY3B 4 x MM E1 E1 MY3M E4 E4 E3 E3 C E2 E2 F B G D Section Za detail (Adjustable range) Section Z detail (Adjustable range) Q P Zb JJ F B3 K B2 H B1 C1 Z B F A L 2 x 2 x LD Section Zb detail (Adjustable range) H A H A holding bolt (mm) B C D F G 90 H A Model MY-J50 MY-J63 Applicable bore size MY1B50 MY1B63 110 110 55 70 126 37 J C2 C 131 130 65 80 149 100 37 K L P Q E3 E4

Digital Flow Switch (Integrated display type) ( compatible)

103 103 L 0.00 to 999,900.00 100.00 3 (103) 00.0 103 to 9,999.00 103 103 L 0.00 to 9,999,000.00 1,000.00 4 (104) 0.00 106 to 99.99 106 106 L 0.00 to 99,990,000.00 10,000.00 5 (105) 0.00 106 to 999.90 106 106 L 0.00 to 999,900,000.00 100,000.00 6 (106) 00.0 106 to 9,999.00 106 106 L 0.00 to 9,999,000,000.00 1,000,000.00 : The units on the right side of the sub screen will flash. : When the