-fl Seies

qn D N coreclor.

3 Port Solenoid Valve/

254.2 AW30-03G-A Y300T-A E300-03-A VP744-5DZ1-04-X538 34.4 75.2 118.7 262.7 AW40-04G-A Y400T-A E400-04-A VP744-5DZ1-04-X555 34.4 75.2 160.2 304.2 AW40-04G-A Y400T-A E400-04-A 17 VP500/700-X536, X538, X555 Specific Product Precautions Be sure to read this before handling.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

qn D N coreclor.

Series IDG

Note 2) When symbols C or D are specified, an auto drain with a part number shown on page 18 is mounted.

IDG

Note) When the symbol C or D is designated, the same part number of an auto-drain listed on page 14-19-33 will come together.

5 Port Solenoid Valve SY Series

It is already built-in to the rectifier circuit. 50 60 110 VAC Hz [115 VAC Hz] 3 50 60 50 60 50 60 4 220 VAC Hz [230 VAC Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A A B C D E F A B C D A B C D A B C D A B C D Tubing O.D. PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

Quick Exhaust Valve Series AQ

Applicable tubing O.D. d VCHC ASS ASR ASQ KE TMH M1 L3 L2 L1 D2 Weight (g) D1 Weight (g) D1 L1 L2 L3 L4 M1 M2 Model Tubing O.D. d Model Tubing O.D. d AQ240F-04-04 AQ240F-04-00 12.9 14.3 5.2 39.2 6 4 9.3 5 4 10.0 9.3 39.2 5.2 13.7 23.5 12.9 12.9 AQ240F-06-06 AQ240F-06-00 13.7 15.4 6.2 40.7 8 6 6 10.0 11.6 6 11.6 40.7 6.2 14.7 26.7 13.7 13.7 AQ340F-06-06 AQ340F-06-00 13.7 19.5 6.3 44.8 13 6

AS-FPQ/AS-FPG

Metric sizes Type 04 06 08 10 12 4 6 8 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 01 02 03 04 M5 x 0.8 1/8 1/4 3/8 1/2 With One-touch fitting Clean specifications Metal parts material Q G Brass (electoless nickel plated) Stainless steel 304 Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06 15

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

AIR COMBINATION

AC-OMT0014-A PRODUCT NAME AIR COMBINATION MODEL/ Series AC10(A,B)-A AC20(A,B,C,D)-B AC25(B,C)-B AC30(A,B,C,D)-B AC40(A,B,C,D)-B AC50(A,B)-B AC55(B)-B AC60(A,B)-B Contents PAGE 1. PRECAUTION FOR SAFETY 18 2. APPLICATION 9 3. SPECIFICATIONS. . . 9 4. SERIESMAP AND COMBINATION OF EQUIPMENT. . . 10 5. HOW TO ORDER 1118 6. ATTACHMENTS / ACCESSORIESOPTIONSPART NUMBER 19 7.

DOC1003626

Fig.1-3 shows the location of the communication port. 14 1 Contact input / output signal connector D sub 25 female pin (socket) type 25 13 1 6 Serial communication connector D sub 9 female pin (socket) type 9 5 Fig.1-3 Communication port HRS400-A-46 1.3 Communication port 1-5 DOC1003626 Chapter 1 Read before using 1.4 Touch panel flow Press the [Comm.

Modular Type Air Filter Series AF

M5 01 02 03 04 06 10 D AF30 to 60 Flow direction: Right to left AF10 to 60 F Note 2) Note 3) Bracket is not assembled and is supplied loose at the time of shipment. Note 4) Applicable tube O.D for auto drain connection should be 3/8" in case NPT thread port is chosen.

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

HRX-OM-Y120

Both ends of the communication connection (the end nodes) need to be connected to the higher level computer. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers.

Miniature Regulator Series ARJ210

IC Electroless nickel plated Dimensions VBA Caution F A Model ARJ1020F-M5-04 B 10.4 C 4 D E G H J K 21 VE 10.6 (Width across flats: 10) 1. Release the lock to adjust the pressure. After the adjustment, engage the lock. Failure to observe this procedure could damage the handle or cause the outlet pressure to fluctuate.

Speed Controller with

AS2002F-04 When connecting 4 pcs. and mounting L-brackets on both sides Speed controller AS2002F-04 4 pcs. L-bracket AS-20L 2 pcs.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

Manually Operated Integral Fitting Type/Threaded Type Series LVH

Note LVH 1 y t r PP Actuator section Integral fitting type PFA LVD Stainless steel With reducer 2 Body Threaded type PPS LVQ i PFA 3 Diaphragm PTFE LQ1 End plate PPS 4 PFA body only Insert bushing 5 PFA LVN 6 PFA Nut t y PP Lever 7 TL/TIL PFA Collar 8 LQ3 Dimensions/Integral Fitting Type N G A D L 4 x M K Non-locking type Locking type 60 (H2) (H1) C B A E J B (F) Dimensions (mm) A B C D