Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0

Mechanically Jointed Rodless Cylinder Series MY1

m1 x g x X m2 x g x X m4 x g x Z M1 M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

MY1

MY1B32-500 Average operating speed a 300mm/s Mounting orientation .. Horizontal mounting 1. Horizontal mounting 2. Wall mounting P. 58 z y x y x z W: Work piece (2kg) 3. Ceiling mounting P. 42 4.

SY

Without indicator light/ surge voltage suppressor Without indicator light/ surge voltage suppressor Type of actuation With indicator light/ surge voltage suppressor With indicator light/ surge voltage suppressor R, U types S, Z types R, U types S, Z types 19 or less 26 or less 2 position single 18 or less 18 or less 22 or less 2 position double 32 or less 32 or less 38 or less 3 position

CJ2

+ Stroke 5 Z + Stroke (mm) Data Stroke 5 to 15 16 to 30 31 to 45 46 to 60 S 30.5 39.5 43.5 57.5 Z 63.5 72.5 76.5 90.5 Note) 1.

LJ1H

1 1 C G LJ1 10 S W X10 Guide type Slider guide S X10 Non-standard motor Series Series 10 Series 20 Series 30 Limit switch 10 20 30 Nil W None B contact specification 2 pcs.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

mm/s or less !

MY1

Piston speed (mm/s) Piston speed (mm/s) 1.

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Compact Cylinder

12 to 25 Without auto switch CQ2 B 32 10 Z S 32 to 50 32 10 Z S M9BW B CDQ2 With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting Nil 2 pcs. 1 pc. n pcs.

NCQ2/CQ2

Series (N)CQ2 Made to Order Individual Specifications 6 Symbol Cylinder Tube: With Concave Boss on Head End -X1876 D(C)(M)(Z) S(M)(Z) T(M)(Z) C Q2 C Q2K C Q2 S X1876 Mounting Bore size Stroke With concave boss on head end The specifications are the same as those of the CQ2 series.

4/5 Port Solenoid Valve

Z R U T Light/surge voltage suppressor Without light/surge voltage suppressor Nil S Z With surge voltage suppressor (Non-polar type) Power saving circuit is not available in the case of W type.

Smooth Cylinder/Low Speed Cylinder

on head cover: Axial location (R) S + Stroke Z + Stroke For details of the mounting nut, refer to page 1250.

5-Port Solenoid Valve

Nil Internal pilot R External pilot Non-polar U V S Positive common Z V NS Negative common NZ V V t Back pressure check valve (Built-in valve type) Nil None H Built-in * Select R, U, S, or Z for the valve when the SI unit specification is positive common.

LVQ

T) V N 1 2 1 2 1 2 1 2 LVQ3 S, LVQ4 S LVQ5 S, LVQ6 S M V A B SMC U C A B Z D (Max. T) View Z LVQm0-S shown.

Table of Contents

S L, Z S L, Z 1 1 1 1 4 1 2 PB AC 2 Ordering example (Example) Series VXR22, Rc 1 1/4, 200 VAC, Conduit terminal (Part no.)

15

[mm/s] (Operating condition) a1: Acceleration [mm/s2] T1 = V/a1 [s] T3 = V/a2 [s] = = 0.57 [s] T2: Constant speed time can be found from the following equation.

5

+0.1 A NA B 0 0.3 S + Stroke H U CZ 0 0.3 Z + Stroke R ZZ + Stroke (mm) * A clevis pin and retaining rings are included.

Compact Hydraulic Cylinder

CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 253 Series CHSD Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M mB mC A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) E GB H M J NA NB S Z GA K P Y

Table of Contents

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,