Soft Start-up Valve

size A C D E G H J 1(P) 2(A) 3(R) AV2000-m02-1 to 4G(Z)m-A 1/4 1/4 1/4 66 47 24.5 40 33 Width across flats 22 30 AV2000-m02-5 to 6G(Z)m-A AV3000-m03-1 to 4G(Z)m-A 3/8 3/8 3/8 76 50 29.5 40 38 Width across flats 24 35 AV3000-m03-5 to 6G(Z)m-A AV4000-m04-1 to 4G(Z)m-A 1/2 1/2 1/2 98 56 39.5 52 49 Width across flats 30 33 AV4000-m04-5 to 6G(Z)m-A AV5000-m06, 10-1 to 4G(Z)m-A 3/4, 1 3/4, 1 3/

Table of Contents

D-A72/D-A73/D-A80 Band Mounting Style . D-A7xH/D-A80H Rail Mounting Style. D-A73C/D-A80C Rail Mounting Style . D-A90(V)/D-A93(V)/D-A96(V) Direct Mounting Style . D-Z73/D-Z76/D-Z80 Direct Mounting Style. 2-color Indication Type . D-A79W Rail Mounting Style . Solid State Switches . General Purpose Type. D-F79/D-F7P/D-J79 Rail Mounting Style. D-F7NV/D-F7PV/D-F7BV Rail Mounting Style .

Soft Start-up Valve AV2000/3000/4000/5000 1

D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4

Manually Operated Integral Fitting Type/Threaded Type Series LVH

(H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions D G E C M P N L K J H2 F H1 B A Model Body material LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 LVH20 LVH30 LVH40 M5 x 0.8 10 10 54.5 Rc 1/8, 1/4, NPT 1/8, 1/4 27 22 22 76.5 75 33 30 (SUS) Stainless steel 19 13 81 Rc 1/4, 3/8,

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Metric sizes Inch sizes Body class Type LQ-GP J 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 6 06 06 06 8 08 4 04 04 04 04 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J Insert pin material (J/K type only) Nil N Metric size Inch size Nil S Resin Stainless

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Weight (g) d L4 Model L3 D1 T H D2 D3 L1 L2 Max. Min.

AKH/AKB Series

Model D L M M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 3 6 10 17 24 2.8 6.5 14 24 34 5/32 1/4 5/16 3/8 1/2 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Male Connector Type: AKH Millimeter Size Connection thread R Applicable tube O.D.

Check Valve Series AK 1

4 6 8 10 12 3 5 10 17 25 2.8 6.5 14 24 34 9.3 11.6 15.2 18.5 21.7 33.5 37.1 53.3 63.6 70.2 2-Applicable tubing D Inch Size Weight (g) Effective area (mm2) D L M Model Applicable tubing O.D.

Booster Regulator Series VBA1110 to 4200 1

K J H G F E D C B A 475 432 512 472 525 482 562 522 L Booster part no. Tank model VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 VBA2100-03 VBA2200-03 VBA4100-04 VBA4200-04 394 Rc 3/8 VBAT20 VBAT20S 305 206 674 180 200 100 400 Rc 1/2 430 Rc 1/2 444 Rc 3/8 VBAT38 VBAT38S 355 256 824 205 250 150 500 Rc 3/4 480 Rc 1/2 14-9-9

CUJ

, D-F9P, D-F9B Auto Switch Specifications Grommet D-F9 (with indicator light ) D-F9B D-F9N D-F9P Auto switch part no.

Compact Manifold Regulator Series ARM5

Accessory ITV Symbol Description 5 56 IC 5 56 Nil A Pressure switch lead wire length: 0.5 m Pressure switch lead wire length: 3.0 m PVQ Note) Leave the field blank for types without pressure switch. 22 22 26 46 VEF VEP 0.6 0.2 0.4 MPa 0.5 0.1 0.3 6.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Vacuum Manifold for fieldbus system

D side U side -22No. ZKJ-OM00201-D 7.5.

VQ5000

8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) CD2 Note 1) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

Dual Speed Controller with One-touch Fitting Series ASD 1

Applicable tubing O.D. d L2 L3 M L2 L3 M D2 D2 L1 L1 L4 L4 H (Hexagon width across flats) H (Hexagon width across flats) D3 D3 L5 A1 A2 L5 A1 A2 D1 D1 T T Metric Size L4 L5 A1 A2 M Max.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

56.5 51.5 28.6 AS421FE-04-12SK 22 48.9 34.6 12 20.9 105 Reference dimensions of R thread after installation.

CUJ

more KJS23-M3 KJS04-M3 KJH23-M3 KJH04-M3 KJL23-M3 KJL04-M3 KJW23-M3 KJW04-M3 M-3AU M-3ALU MU Bore size (mm) 6, 8, 10 Port size M3 x 0.5 DStroke (mm) 4 or more One-touch fitting AS121F-M3-23 -X AS121F-M3-04 AS131F-M3-23 20AS131F-M3-04 Only applicable to the mounting position shown in Fig. (1) below.

AKH/AKB Series Check Valve with One-touch Fitting

Model D L M M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 3 6 10 17 24 2.8 6.5 14 24 34 5/32 1/4 5/16 3/8 1/2 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Male Connector Type: AKH Millimeter Size Connection thread R Applicable tube O.D.

KA

(mm) Applicable fitting size d 3.2 L Weight (g) D A M Model Urethane Soft nylon Applicable tubing KAR23-04 9.6 4 33.5 34.5 36.5 18.5 18.5 17.5 18 15.5 3.4 2.9 2.0 1.8 5 KAR04-06 KAR04-08 5.6 5.6 6 8 10.4 4 16 12.8 KAR04-10 39.5 37 39.5 10 3.3 2.5 KAR06-08 8 18.5 KAR06-10 6 12.8 KAR06-12 42 4.7 12 20 17 10 3.0 13.1 13.1 Applicable fitting size d 8 KAR08-10 41 4.0 18.0 18.0 10 20 18.5 15.2

Compact Vacuum Unit

With lead wire with connector (Lead wire length: 78.7 inch (2 m)) 0.0 to 14.6 psi (0.0 to 101.0 kPa) 14.5 to 14.5 psi (100.0 to 100 kPa) G E KJ C1 H 04 F Body type Port size H L 02 04 01 03 2 mm one-touch fitting 4 mm one-touch fitting 1/8" one-touch fitting 5/32" one-touch fitting Straight Elbow Metric size Inch size Output specifications A B NPN open collector 2 outputs PNP open collector