V100

r e w q r e w q VG VP S070 VQ VKF N.C.

SY

The minimum order quantity is 10 pieces. Order in multiples of 10.

Made to Order

Plug) FAFB C + Stroke S A + Stroke x 2 (RA) MC E + Stroke B + Stroke Common Dimensions (mm) Slide DB Bore size (mm) Standard stroke (mm) B C DA FA FB G GA GB H J L MA MM ML NN HA E MT K MB A MC Ball bushing 12 16 20 25 32 40 50 63 6 6 8 8 8 8 9 9 8 8 10 10 12 12 16 16 26 30 36 42 48 54 64 78 19 19 30 30 38 38 60 60 5 5 6 6 10 10 12 12 51 58 68 82 100 108 139 153 8 8 10 10 12 12 16 16 18 22

Table of Contents

1 e + !

CA2

size (mm) 40 50 63 80 100 Stroke range up to 500 up to 600 up to 600 up to 750 up to 750 B B1 C A AL D E F G H H1 J K KA M MM N S S ZZ 156 169 180 214 225 ZZ 146 159 170 204 215 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 15 17 17 21 21 51 58 58 71 72 8 11 11 13 16 M8 x 1.25 6 7 7 10 10 14 18 18 22 26 11 11 14

A

NPT A mm B mm C mm S Y M B O L S NAMF150-N02 14" 139 63 10 NAMF250-N03 38" 152 76 10 NAMF350-N04 12" 184 90 10 NAMF450-N06 34" 205 106 10 NAMF550-N10 1" 239 122 10 NAMF650-N14 112" 321 160 10 NAMF850-N20 2" 403 220 10 Note) (N)AMF AMF Japanese NAMF North American H O W T O O R D E R O D O R R E M O V A L F I LT E R S E R I E S (N)AMF IN, OUT R E V E R S E D I R E C T I O N R (N)AMF B O D

Table of Contents

hole) 1.5 IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA IDF-TR500-2 Output sealing C A Output outlet Input fuse 5A Voltage selector B 220V INPUT 200V 230V 240V E D 4-5.5 x 10 long hole F Input cord 2 m Transformer part no.

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Aluminum High Vacuum Angle Valve

) 1.3 x 10-8 Nil A B C None w, e w e DSeal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 XSA 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Modular Design with Uniform Body Style

1 q r e w t i y u o !0 !

Table of Contents

AS321FE AS331FE AS421FE AS431FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Model Connection threads R/NPT M L1 L2 H G F M E A B 1/8 LQ1R12-M LQ1R11-M 3 4 2 12 18.5 11.5 10 4 15.5 8 1/8" Class 1 LQ1R43-M LQ1R42-M LQ1R41-M LQ1R36-M LQ1R35-M LQ1R34-M LQ1R33-M LQ1R32-M LQ1R31-M LQ1R24-M LQ1R23-M LQ1R22-M LQ1R21-M 12 10 12 6 8 10 6 8 10 4 6 4 6 19.5 1/8" 4 16 28 16.5 15 6 12 14 22 1/4" (E) 2-B L1 M 19 1/4" 25 F 5 36.5 23 20 9 18 17 1/4 G H 21 3/8" 27 (A) (E) Class 2

5

auto switches D-M9lV D-A9lV D-M9lWV D-M9lAV D-A9l D-M9lW D-M9lA D-M9l D-P3DWA Note 1) REB With 1 pc. 5 5 10 10 (5) 15 (10) 15 (5) 15 With 2 pcs. 5 10 10 10 15 (10) 15 (5) 15 REC Note 1) 25 is only applicable for the D-P3DWAl.

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E Weight Refrigerant R134a (HFC) IDU E IDF-TR500-2 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 500 VA Singlephase Singleturn 128 131 105 97 70 5.8 kg 200, 220 230, 240 VAC (50/60 Hz) 100 VAC (50/60 Hz) IDF-TR1000-2 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 1 kVA 146 143 132 110 82 9 kg IDF-TR 3, 4 C VOLTAGE SELECTOR Refrigerant

Smooth Cylinder/Low Speed Cylinder

T1 Applicable mounting bracket Bore size (mm) E 2 x O counterbore 2 x D through REC Joint part no. B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

Electric Actuator/Slider Type

Vertical Mounting, Ball Bushing Bearing r Over 40 stroke e 35 stroke or less 100 100 LEYG32L LEYG32L Load mass m [kg] Load mass m [kg] 10 10 LEYG25L LEYG25L 1 1 0.1 0.1 1000 1000 10 100 10 100 Eccentric distance L [mm] Eccentric distance L [mm] The limit of vertical load mass varies depending on lead and speed.

MGP

MGPL (ball bushing)/Dimensions A, E (mm) (mm) E E A 10 to 39st 43 49 A Bore size (mm) Bore size (mm) 10 to 74st 42 46 75 to 100st 60.5 64.5 101 to 250st 85 95 10 to 74st 0 0 75 to 100st 18.5 18.5 101 to 250st 43 49 40 to 100st 55 65 101 to 250st 85 95 10 to 39st 1 3 40 to 100st 13 19 101 to 250st 43 49 12 16 12 16 A E A E Bore size (mm) Bore size (mm) 20 to 74st 53 53.5 75 to 200st 84.5 85

Air Cylinder

A AL B1 CD CI CL CX CZ D E F FL G H H1 I K KA L MM NA NN P RR S U Z ZZ 20 18 15.5 13 9 24 25 10 19 8 20 0 0.033 13 10.5 8 41 5 28 5 6 30 M8 x 1.25 24 M20 x 1.5 1/8 9 62 14 133 142 25 22 19.5 17 9 30 25 10 19 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 30 M10 x 1.25 30 M26 x 1.5 1/8 9 62 14 137 146 32 22 19.5 17 9 30 25 10 19 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 30 M10 x 1.25 34.5 M26 x 1.5

SQ1000/2000

): SQ1241 Double (latching): SQ1240 t e q w t e q w SQ1241 SQ1240 (A)(B) (A)(B) 4 2 4 2 5 1 3 5 1 3 (R1) (P)(R2) (R1)(P)(R2) Double (double solenoid): SQ1241D Double (double solenoid): SQ1240D y e e q w y e q w e SQ1240D SQ1241D (A)(B) (A)(B) 4 2 4 2 5 1 3 u 5 1 3 u (R1)(P)(R2) (R1)(P)(R2) 3 position: SQ1 41 3 4 5 3 position: SQ1 40 3 4 5 y e e q y w e e q w u u SQ1540 SQ1440 SQ1340 SQ1541

VFS

EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.