CE2

E D C 0 1 2 3 4 3 2 1 Counter value 10-12-55

VQ5000

Bottom ported drawing VQZ 16 M5 ground screw VQD SMC 4(A), 2(B) port 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 Rc 1/8 PE port Rc 1/8 External pilot port 5-Rc 1/2 1(P), 4(A), 2(B), 5(R1), 3(R2) port 3 position double check: VQ5650 1-G H 2 position double: VQ5250 1-G H 3 position closed center: VQ5350 1-G H 3 position exhaust center: VQ5450 1-G H 3 position pressure center: VQ5550

5

Rod flange: CG1YF F FT 4 x FD FX0.15 B E 0 0.05 H B FX0.15 Head flange: CG1YG 4 x FD E 0 0.05 FX0.15 B FT F B FX0.15 ZZ + Stroke (mm) Flange Bore size (mm) B E F FX FD FT H Head flange ZZ 20 40 12 2 28 5.5 6 35 120 25 44 14 2 32 5.5 7 40 126 32 53 18 2 38 6.6 7 40 128 40 61 25 2 46 6.6 8 50 147 50 76 30 2 58 9 9 58 171 63 92 32 2 70 11 9 58 171 80 104 40 3 82 11 11 71 207 100 128 50 3 100

Brake mechanism added

(n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 60 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 65 + 30 (n 4) 2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 10 + 30 n (n = 2, 4, 6, 8 ) Note 1) (n = 4, 8, 12, 16 ) Note 2) 2 (Different surfaces, Same surface) 1 95 100 D-M9A 85 15 80 (n 2) 2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 85 + 40 (n 4) 2 (n = 4, 8, 12, 16 ) Note 2) 95 + 40 (n 4) 2 100 +

AR Series Modular Type Regulator

Nq Body size 10 20 25 30 40 Symbol Description Nw Pipe thread type Nil Metric thread (M5) V Rc V V V V N NPT V V V V F G V V V V + M5 M5 V 01 1/8 V 02 1/4 V V V V 03 3/8 V V V 04 1/2 V 06 3/4 V + Ne Port size a Mounting Nil Without mounting option V V V V V B Note 2) With bracket V V V V V H With set nut (for panel mount) Note 3) V V V V V + Option Note 1) Nr Nil Without pressure gauge

CJ2X/CUX/CQSX/CQ2X/CM2X

wire Connector 24 V Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) Grommet 2-wire 12 V With diagnostic output (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V Solid state switches marked

CJ2X/CUX/CQSX/CQ2X/CM2X

wire Connector 24 V Diagnostic indication (2-color indication) Grommet 3-wire (PNP) 3-wire (NPN) IC circuit 5 V, 12 V Grommet 2-wire 12 V Connector Relay, PLC Yes 24 V 3-wire (NPN) 5 V, 12 V Diagnostic indication (2-color indication) IC circuit 3-wire (PNP) Grommet 2-wire 12 V With diagnostic output (2-color indication) 4-wire (NPN) IC circuit 5 V, 12 V Solid state switches marked

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Optional Parts ARP20(K) ARP30(K) ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G36-4-01 G46-4-02 Round type Note 2) 0.4 MPa Square embedded type Note 3) GC3-4AS [GC3P-010AS (Pressure gauge cover only)] G36-2-01 G46-2-02 Round type Note 2) 0.2 MPa Square embedded type Note 3) GC3-2AS [GC3P-010AS (Pressure gauge cover

VXD21/22/23

PA IN PAX Solenoid coil PB Coil: Class B, Class H Rated voltage Model AC Standard Option 100 V, 200 V 48 V, 110 V, 220 V, 240 V Orifice size (mm) Model Port size 10 VXD2130 Rc 1 4, 3 8, 1 2 Rc 3 8, 1 2 Rc 3 4 DC 24 V 12 V 15 20 VXD214 VXD215 VXD226 VXD227 VXD238 VXD239 2 0 Standard Option 2 0 2 0 Rc 1 25 Material 2 0 32A 35 40A 40 2 0 Body Seal Brass/BC6, Stainless steel NBR, EPDM, FKM

KJ

KQ 2 H 05 S 34 M H With thread seal Nil None S With thread seal One-touch fittings D Applicable tubing O.D.

7ND9071en

/ 3.3 scfm (spool valve 2) 12 Nm3/h / 7.1 scfm (spool valve 3) 38 Nm3/h / 22.4 scfm (spool valve 6) Consumption with 4 bar / 60 psi supply in steady state position: < 0.6 Nm3/h / 0.35 scfm (spool valves 2 & 3) < 1.0 Nm3/h / 0.6 scfm (spool valve 6) Electronics ND9000H and ND7000H Electromagnetic compability acc. to Emission: EN 61000-6-4 (2007) + A1(2011) Immunity: EN 61000-6-2 (2005) Safety

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

NWFS2mO.P.3IT-l (Prug-in Vpe) NwFs2mo.P.3lT2 (Nm prus-in gpe) lspedty'l/8 (o1) ot 1t4 (o2 ) EXH Relocation spacer NWFS2OOGR-8]T1 (Prus-in Vps) NWFS2OOCR.3I T-2 (Non plugin type) (Speciry 1/8 (01) or 1/4 (02)) lnterface Sped Control WFSI22 (Non dug-in typ) Interface Regulator NARBF2OoOm-P-r (Plugin typ) NARBF2OOGq)-P.2 (Nm plug-in type) e e I{7,*l "fl_iql

VXP21/22/23

-8/ 2 0 # 7 -. ,. 8/ 2 0 ( 7 8 7 # 7 # 7 2 0 -8 73 2 0 # ./ Material VXP227 VXP238 VXP239 2 0 ,,. 8/ 8/ ./ ./ 2 0 ! "#! &*)! '$()! $%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)

HRX-OM-O021

1 Part number of product HRS Series 2.1 Part number of product 2-1 HRX-OM-O021 Chapter 2 Name and Function of Parts 2.2 Name and Function of Parts Fig. 2-2 Names of each part Table 2-1 Accessories list 1 Alarm code list label 1pc. 2pcs. 2 Operation Manual (Jpn: 1pc.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Kit How To Order: VQZ200/300 Body Ported Manifold Preferred Option Program VV3QZ 2 2 08 00T C Series DIN rail mount D None DIN rail mounting (DIN rail standard length) 2 3 VQZ200 VQZ300 Kit C Connector Number of stations 02 2 stations 20 20 stations How To Order: VQZ200/300 Body Ported Valve For Manifolding N7T VQZ 1 2 2 5 L Series Port size {2(A) port} 2 3 VQZ200 Body width 15mm VQZ300

RHC

A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 6 1/8, 1/4 500 1.5 0 1,000 2,000 3,000 6 1

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

1 2 18.6 24 22.4 54.6 47.1 44.5 37.0 ASV Universal Type/Inch Size AK H D1 Applicable tubing O.D. d ASS (Hexagon width across flats) M ASR L3 A ASF L4 L5 D3 D2 L1 Connecting thread T L2 Uni thread H D1 D2 L1 L2 L5 A Max.