Series VQ Base Mounted Metal Seal/Rubber Seal

G H J1 J2 K Q R1 R2 V Note 1) Refer to p.1.10160 for details.

EXxx-OMW0014CN

8 error 0Module 8 1Module 8 Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01 1 Valve 2, 3 diagnostics 01 2 Valve 4, 5 diagnostics 01 3 Valve 6, 7 diagnostics 01 4 Valve 8, 9 diagnostics 01 5 Valve 10, 11 diagnostics 01 6 Valve 12, 13 diagnostics 01 7 Valve 14, 15 diagnostics 01 Valve diagnostics 2 . 5-5 Valve diagnostics 2 Bit 0 Valve 16, 17 diagnostics

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

GE4F Piping*15 Body One-touch fitting Straight: 40 g Rear: 55 g Straight: 48 g Rear: 63 g Screw-in Straight: 60 g Rear: 75 g Straight: 72 g (G1/4: 117 g) Rear: 87 g (G1/4: 132 g) Flow adjustment valve +34 g Lead wire +35 g Bracket +20 g Panel mount adapter +15 g DIN rail mounting bracket +65 g Weight 11 2-Color Display Digital Flow Switch PF2M7(-L) Series *1 Refer to the Recommended pneumatic

125

How to Order Sub-plate and Base Gasket Body size 22 42 VEX VEX VEX1 2 9 A VEX4 2A 1 A Port size Thread type Port size Thread type Symbol Port size A 1/8 B 1/4 Symbol Thread type Nil Rc F G N NPT T NPTF Symbol Port size A 1/4 B 3/8 C 1/2 Symbol Thread type Nil Rc F G N NPT T NPTF Sub-plate Base gasket VEX1 11 2 VEX4 4 Options/Part Number Description Part number VEX312-01 02 VEX322-01 02 VEX33202

Flow Control Equipment

ASV How to Order AK 01 06 S AS 1 1F G 2 2 ASS Body size 1 2 3 4 Options M5 S None Sealant 1 8, 1 4 8 3 Applicable tube O.D.

5 Port Air Operated Valve

A, B port size Port size M5 x 0.8 1/8 1/4 3/8 Symbol M5 01 02 03 VFA1000 VFA3000 VFA5000 VFA1000 Double type only Thread type (Including pilot port) Nil F N T Rc G NPT NPTF M5 is available with Nil only.

AR20-B to AR60-B

Example) AR30-03BG-NR-B-X425 Symbol Description Nq Body size 25 30 40 50 60 Symbol Description Nq Body size 20 25 30 40 50 60 Nw Pipe thread type Nil Rc N NPT F G + Nw Pipe thread type Nil Rc N NPT F G + 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + Ne Port size Nil Without mounting option B*2 With bracket a Mounting Option *1 H With set nut (for

CYP

Static moment m x g = 1 9.8 (50 + 48) 103 Review M2. Since M1 & M3 are not generated, review is unnecessary. = 0.96 [Nm] 2 = M2/M2 max = 0.96/4 = 0.24 M Guide shaft mounting surface L1 B We = 5 x 103 m g U = 5 x 103 1 9.8 300 = 14.7 [N] Me3 = 1/3 We (L2 + A) 103 3.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

CYPSeries

-01-06-X214 10-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 1.

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-06-X214 1.

F

16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

HRX-OM-M090

output 1 operation A Selected for contact output 1 AL.01 Contact output 2 function RMT Contact output 2 operation A Selected for contact output 2.

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

Booster Regulator/Air Tank

Description 1 Piston seal 2 large 1 small 2 1 each large and small 2 1 2 Governor assembly 4 3 Check valve 2 4 Gasket 2 Rod seal 5 1 8 8 12 Mounting screw 6 12 7 Cover C assembly 1 Grease pack 1 2 1 2 1 The grease pack has 10 g of grease.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

Metric size Inch size 3.2 01 03 05 07 09 11 23 04 06 08 10 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Control type 4 6 8 10 0 1 Meter-out Meter-in Use 1/8" tube.

Direct Solenoid

SP O2('5 (1'{' NPIF PORTg |l{ct-uDEs 1 Block XI 01 t2 3 Soc Hd Sc.ws NXT010.19A (1G24X1%1 1 Gaskol NXT010.14 2 Fltlsh Plugs r/4"NPT ORDERII{G PART NO. SP O30' (3,l .

AN

ANA1-01 to 06 ANA1-06: PP How to Order ANA1-01 to 20 A1 03 AN Port size Symbol Port size Connection 01 1 8 02 1 4 03 3 8 04 1 2 Screw-in 06 3 4 1 4 10 1 12 1 1 2 1 14 20 2 Model (One-touch fitting connection) C08 (8 One-touch fittings size) Effective area (mm2) Weight (g) ANA1-C08 11 5 58 16 A B Dimensions (mm) Model One -touch fitting size 8 10 12 C10 (10 One-touch fittings size) One-touch