XM, XY

) (CF flange) A B K S M J H G A (mm) Model A 123 170 183 217 256 B 48 66 79 100 117 C 1 2 2 3 3 D 40 55 75 87 114 Fn 95 110 Fd 70 114 Fc 26 41 52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6 x 6.6 8 x 8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type XLA G Fd XL C XLQ (K flange) XM XY XM XY J K H B

CYP

-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

CYPSeries

10-ASD330F-01-08 10-ASD230F-M5-06 2.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

-ASD330F-01-08 10-ASD230F-M5-06 2.

CM2

CM2 H L 40 F A J 150 Standard DM2 C H L 40 F A J C73 150 With auto switch Rod boot Without rod boot Nylon tarpaulin Heat resistant tarpaulin Bore size 20mm 25mm 32mm 40mm Air cylinder with auto switch 20 25 32 40 Number of auto switches S n J K 2 1 n Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switches.

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

6.5 29 32.5 3H9 3 15.5 3H9 3 7 912 Rotary Table MSQ 1122Dimensions: Size 10, 20, 30, 50 Basic type: MSQBA 1122XB effective depth XC WB effective depth WC 2 XA 8 x WD depth WE (Circumference: 8 equivalents) 4 x JJ depth 8 WA 2 2 x J through JA counterbore depth JB 45 22.5 BE WF WF BD 2 x M5 x 0.8 Port (Plugged) Effective depth FB DD M5 x 0.8 depth 5 (Vacuum suction port) D BB DE 2 x P Port

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

F F F F F Bore size 20 Bore size 25 800 8 3 7 6 5 4 8 3 7 1 6 4 1 5 500 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 0.05 0.1 0.5 1 2 Load (kN) Load (kN) Bore size 32 Bore size 40 800 6 8 6 4 8 3 7 5 3 7 4 5 1 500 1 Stroke (mm) 100 50 0.05 0.1 0.5 1 2 3 0.1 0.05 0.5 1 2 5 Load (kN) Load (kN) 20 Series CHN Technical Data 3-1 Cylinder Cushion Selection Procedure Caution Use a cylinder cushion within

MLGC

2 No.

MLGC

2 No.

CRQ2

Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 TA 0.6 30 BU 2-M5 x 0.8 through (Opposite side 7.6 counter bore depth 4.2) B With double shaft DD W D H 2 10 2-M5 x 0.8 (port size) (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

2–4

12 2 x 2-OB counterbore with depth RB 2-M5 x 0.8 Auto switch 2-HB through F Q 2-HA through KA IB IA 2-N through T EB EA M KA (KB) 2 x 2-OA V (RB) Note) 2 x 2-RA L M Flat washer W B + Stroke EB A + Stroke EA 20, 25 (mm) With auto switch HA OA Without auto switch A 31.5 Stroke range (mm) Bore size (mm) EB F HB IA IB NN NN EA A 26.5 B 17 B 22 12 16 20 25 8-32UNC M3 x 0.5 4-40UNC M4 x 0.7

MLGC

EK M : Kinetic energy (J) : Load weight (kg) + Weight of movable part (kg) : Piston speed (m/s) EK= 2 M 2 Allowable Kinetic Energy When Locking 40 1.19 {12.1} 32 0.67 {6.8} 25 0.42 {4.3} 20 0.26 {2.7} Bore size (mm) Piston speed (m/s) J {kgf cm} Stopping Accuracy (Not including tolerance of control system.)

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

socket head taper plug) 2-P (Hexagon socket head taper plug) 2-P 2-P (Hexagon socket head taper plug) 1 1 NE PP QQ XXSS RR SS H TT UU PH RW VV UU G A N T-slot for body mounting Z + stroke (mm) P M5 x 0.8 Rc 1/8 Rc 1/4 Model MY2H16G MY2H25G MY2H40G MM M4 x 0.7 M5 x 0.8 M6 x 1 L 80 110.8 180 LD 3.4 5.5 9 LB 50.4 71.7 80.3 LA 70 100 158 J M3 x 0.5 M5 x 0.8 M6 x 1 H 28 37 58 GB 17 19.5 31.5

High Power Cylinder Series RHC

In-line type 0.1 0.3 1-A 2-B 1-C 2-A 2-B 1-A 2-B 2-A 2-B 2-B 2-B 2-B 2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS421F (26) AS431F (24) AS4200 (26) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS420 (102) AS421F (24) AS431F (24) AS4001F (16) AS4200 (26) AS420 (102) AS420 (102

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

CXT

Rc 1/8 D-X G G 2-RB2015 (Option) 2 HT F A L 20HN (Max.)

T

(mm) Thread Weight g Applicable tubing A B C D E F H Model 3 2 1 M3 x 0.5 M5 x 0.8 M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 x 1 .2 4 Thread Component Parts E D Material Brass Brass No. 1 2 3 Description Sleeve Barb fitting Gasket Note Electroless nickel plated Electroless nickel plated F K NBR, Stainless steel M B C A H Width across flats H Barb elbow: M-3ALU-2, M-5ALHU-2 D Applicable