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Symbol Unit mm J J J mm Nm Nm Nm Nm Nm mm/s Definition Symbol Definition Symbol Unit mm/s kg kg kg kg Va W Wa We Wmax K An (n = 1 to 6) E Ea Emax Ln (n = 1 to 3) M (Mp, My, Mr) Ma (Map, May, Mar) Me (Mep, Mey) Mea (Meap, Meay) Mmax (Mpmax, Mymax, Mrmax) V Average speed Load mass Allowable load mass Mass equivalent to impact Max. allowable load mass Load factor Allowable load mass coefficient

(MPa) Pv: Maximum operating pressure for vertical operation (MPa) WBmax: Maximum load weight (kg) when loaded directly on the body W: Load weight (kg) WB: Connection bracket weight (kg) : Guides coefficient of friction Lo: Distance from cylinder shaft center to work piece point of application (cm) L1: Distance from cylinder shaft center to connection fitting, etc.

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

MJ 0.2774 Weight Power g 0.0353 oz W 0.7376 kg 2.2046 lb kW 1.341 1.3559 N. m 0.1383 kg. m t t . l b tt. lb psi psi psi psi psi psi psi mm3 cm3 (cc) Area in2 645.16 in'?

\/o 5r.0 44.0 N/A ftlA N/A 35.019.23 kg 127 .0 51,0 57.2 0ElUl4.0lUlx2(M(S) 50 15. 90.5 l?

B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80

CXTM (Slide bearing) CXTL (Ball bushing bearing) Maximum load mass (kg) (1) (1) (2) (2) Allowable static mass (kg) Table displacement (mm) Allowable static mass (kg) Table displacement (mm) Series Performs the function of a cushion and adjusts the stroke 5 mm on each side, or 10 mm for both sides.

(Current model: 4.2 kg) AFF AM AMD 80D 4.7 kg Max. 52% lighter AFF AM AMD New New Current model 90D 5.0 kg (Current model: 10.5 kg) Increased air flow capacity due to lower pressure drop which contributes to energy saving Max.20 % increase 20% increase Flow capacity: 14.5 m3/min (ANR) Pressure drop reduced Pressure drop: 5 kPa or less Current model For AFF/AM/AMD90D Pressure drop AFF AM

(lbs) 2 x 7 through CKZT40-A015CS CKZT40-A015RS CKZT40-A015LS 0.49 (1.08) 0.51 (1.12) 0.51 (1.12) 200.02 900.1 117 48 16 220.1 150.2 50 How to Order Right type CKZT50 A015 C S 44 34 Arm position 48 68 C R L Center Right Left 20 Center type Left type Mounting hole 2 x D1H7 through Symbol D1 6 8 D2 9 10.2 2 x D2 through S B (9) 300.2 300.02 1050.1 Weight kg (lbs) CKZT50-A015CS CKZT50-A015CB

Load weight W (kg) MX 3. Operating pressure P (MPa) P 0.7 MPa MTS 4.

www.stevenengineering.com l 300 200 300 MGTL80 CX P = 0.5 MPa m 200 MGTM80 100 P = 0.5 MPa Load weight m(kg) Load weight m(kg) D40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 -X 50 40 25, 50st 10 30 205 4 3 2 20 Data 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P =

kg kg kg Allowable load weight coefficient Allowable moment coefficient Damper coeficient Workpiece mounting coefficient 8-6-7 8 Series MXF Operation Guide for Slide Table MXF Mounting of Slide Table Precautions The slide table can be mounted from 2 directions.

The product weight decreases by 1 kg for Option-Z. 9.1 Specifications HRR Series 9-2 HRX-OM-X071 Chapter 9 Documents 9.1.2 HRR050-W-Table 9-2 Specifications [HRR050-W-20/40-] Model HRR050-W-20HRR050-W-40Cooling method Water-Cooled refrigerated type Refrigerant R410A(HFC) Quantity of refrigerant kg 0.59 0.62 Control method PID control Ambient temperature andhumidity and altitude 12 Temperature

[kg cm2][oz cm2] JL : Load inertia moment converted into equivalent value on servo motor shaft . [kg cm2][oz cm2] : Brake time constant . [s] te : Delay time of control section . [s] There is internal relay delay of about 10ms. 10 5 10.

Dew point indicator purge air flow rate Port size (nominal size B) Weight kg [lb] (with bracket) Part no. Applicable models 3/8, 1/2 1/4, 3/8 BM64 BM65 IDG30L, 50L IDG60L, 75L, 100L 0.74 (0.87) [1.63 (1.92)] 0.77 (0.90) [1.70 (1.98)] 1.50 (1.65) [3.31 (3.64)] 1.65 (1.80) [3.64 (3.97)] 1.80 (1.95) [3.97 (4.30)] Note 1) With no freezing.

1000 1000 100 80 500 400 300 500 400 300 63 100 80 50 40 200 200 63 100 100 32 50 40 Load weight: m(kg) Load weight: m(kg) 50 40 30 50 40 30 32 20 20 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK ASIA SOUTH KOREA SMC Pneumatics Korea Co., Ltd.

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke 1 5 0.3 Model CYP15 CYP32 Stroke (mm) 25 30 CYP15 CYP32 1MPa = 145 psi 1 kg = 2.2046 lb 1Nm = 0.7375 ftlb 1in = 25.4mm 16 17 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke 1 5 0.3 Model CYP15 CYP32 Stroke (mm) 25 30 CYP15 CYP32 1MPa = 145 psi 1 kg = 2.2046 lb 1Nm = 0.7375 ftlb 1in = 25.4mm 16 17 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Calculation: (Example 1) MUB40-15S(T)Z Basic weight 0.60 kg (Example 2) MUC50-5S(T)Z Basic weight 1.02 Mounting bracket weight 0.40 1.02 + 0.40 = 1.42 kg 15 Plate Cylinder: Single Acting, Spring Return/Extend Series MU Construction Spring return q !8 !4 !1 r !0 !2 w y e u t !6 i o !7 B !3 B section MU25 Spring extend w i !0 o !8 t !5 q !7 r e u !1 !2 !6 y !4 A B !