MXW Series Long Stroke Slide Table

port Rc (PT) 1/8 9 8-M6 x 1 thread depth 18.5 (Helisert) 8H9 +0.036depth 9 0 Operation direction A Taper thread plug with hexagonal hole 98.6 126 66 55 8 50 37 Y 50 Y 50 11 43 209 Operating port Rc (PT) 1/8 Operation direction B Taper thread plug with hexagonal hole Operation direction B A 28 14 28 14 13 A 12 76 62 17 36 A 38 Z Cross section AA (scale 30%) (N-1) x H G H 9 N-M8 x 1.25 thread

Large Size Vacuum Module: Series ZR

Rc 1/8 Vacuum pressure supply port(PV) 79 70 2 x 4.2 (Mounting hole) PV PD 30 16 11 9 9 1 3 63 6.5 8 1.2 Bracket A Bracket A 4 ZR1-FD 7.2 1 S Digital pressure switch for vacuum Suction filter Attachment D (75.8) 85 1 81 56 PV PD 3 78.8 (2000) Filter block D Note) 1 Dimensions for mounting bracket A 2 Dimensions for mounting spacer A Bracket A part no. : P3270153#1 (Standard accessory) Spacer

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5) 3 . 1 5 tBo\ 5.43 '135) 7 9 9 t203) E t 1 1 6 1 3.62 1 . 1 8 2.05 152\ o55 0.83 121\ Ml2x1 75 0.43 1 1 1 ) M26x1 5 1.57 (40) 4.S6 {126) 1.97 6.38 i162) 5.35 t136) 8.74 t222) 2.83 <72) 5.31 1135) 4 . 1 1 1206) 2.55 (65) 0.55 N4.0) 1 . 1 9 (41) 5 6 7 1215t 'Min.

Cylinder with Lock Series CNS

(same side) (n 4) 2 (n 4) 2 25 + 55 135 + 55 125 + 55 BT-12 BT-12 BT-16 F5W/J59W/ F5BAL/F5F n = 2, 4, 6, 8 n = 4, 8, 12, 16 n = 4, 8, 12, 16 2 pcs.(different side, same side), 1 pc. D-F5W, J59W D-F5BAL D-F59F D-F5NTL 155 35 145 D-A3/A4/G39/K39 BS1-125 BS1-140 BS1-160 (n 4) 2 (n 2) 2 (n 4) 2 155 + 55 35 + 55 145 + 55 "n" pcs.

ZP

(mm) ZP40HN ZP50HN ZP63HN ZP80HN ZP100HN ZP125HN 40 50 63 80 100 125 27 15 1 1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 Misc.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

To order connector cable only Conventional type Connector dimensions (Ground) 4 (Orange) Manual override Brown: 1Blue: 3 + B 9 A 1 3 Black: 4 Interface 33.9 L 35 10 Cable length (L) Part no. Pilot valve (10-SY114) Adapter plate 300mm V100-49-1-2 V100-49-1-1 500mm 1000mm 2000mm 5000mm V100-49-1-3 V100-49-1-4 V100-49-1-7 22 33.9 14 704

Basic Type/Direct Mount Type

1 !4 !2 r i q @5 o u y t #0 @0 @8 !9 @2 @3 @7 18b @4 @9 @6 !5 !6 !3 !0 !1 !4 !2 y r i q 2b 3b CY3RG15 to 63 !9 @2 @0 @3 #0 @5 @8 @7 o u !7 t 18b CY3RG15 CY3RG15, 20 CY3B CY3R CY3B CY3R !9 !8 @2 @1 CY1S CY3RG15 CY1L Switch Rail Accessory CY1H CY1F Switch Rail Accessory Kit B 100 (N) CYR 15 E Bore size (mm) 6 10 15 Kit no.

High Vacuum Angle Valve

40-2 65 171 66 39 11 55 41 67 29 XLC-50-2 70 181 79 31 11 75 52 76 29 9 XLC-63-2 88 206 100 39 11 87 95 70 77 33 9 XLC-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

37-80A-10 SY3000-37-80A-6 SY3000-37-80A-12 SY3000-37-80A-9 For 1 to 8 stations 10-SS5YJ3SA 21 32 For 9 to 16 stations Pilot valve (V111) Adapter plate For 1 to 8 stations 20 41 42 43 Existing valve 10-SS5YJ5SA For 9 to 12 stations (Orange) Manual override For 13 to 16 stations + B A For 1 to 8 stations Interface 10-SS5Y7SA 21 41 For 9 to 12 stations For 13 to 16 stations Note 1) The above

OMU0023

If the least significant bit was "1", exclusive OR the content with A001h after the 1-bit shift. bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 A001h 1 0 1 0 0 0 0 0 0 0 0 0 0 0 0 1 High byte "CRC16(H)" Low byte "CRC16(L)" ExOR Step Hex Arithmetic content flag 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 Preload Fh 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 Load 1st byte "01h" 0 0 0 0 0 0 0 0 0 0 0 0 0 0 0 1

Vacuum

Rolled steel WCS4 x 0.7 WCSs x 0.8 WCSG x 1 WCSS x 1 WCS10 x 1 20+Slroke s16-a32 26 1 4 M4 x O.7 5 M5 x 0.8 6 1 8 4 12 40 1 9 . 5 7.6 Depth 12.5 1 5 . 5 85.5 29 1 6 M4 xO.7 M 6 x 1 O 8 20 5.5 9 t o 46 9.5 Deplh 8 13.5 19.5 96 20 M5 x 0.8 A M8 x 1.25 10 28 5.5 9 20 50 9.5 Deplh I 1 9 24.5 104 42 24 N,l5 x 0.8 1 0 [,110x 1.25 32 6.6 13.5 24 52 1'l Depth 1 1 . 5 21 30.5 I t o ' shorrer DdRle

Vacuum

.1, .r"iF. stde .orri"tg) 9 i!

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

18 18 13.5 SMC 9 (Rc(PT)1/4) (Rc(PT)1/4) 9 2-Rc(PT)1/4, 3/8 R1, R2 port M5 X 0.8 (Not applicable to standard.)

Rotary Table/Rack & Pinion Style Series MSQ

M6 x 1 M8 x 1.25 WD 3.5 4.5 4.5 5.5 WC 3H9 4H9 4H9 5H9 WB 15 20.5 23 26.5 WA 59 65 68 77 UU 17.7 25 25 31.4 SU 45 60 65 75 SF 13 12 14 15 SE 9 10 11.5 14.5 SD 92 117 127 152 Q S 34 37 40 46 JJ M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 YA YB YC JU M8 x 1 M10 x 1 M10 x 1 M14 x 1.5 P M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 WF 8 10 10 12 Size XA XB XC 3.5 4.5 4.5 5.5 3H9 4H9 4H9 5H9 27 36 39 45 32 43 48 55 10

0.55

Note VP344 VP544 VP744 VP 3 1 202 00 8 Gasket HNBR VP300-217-1 VP500-217-1 VP700-217-1 VP300-202-l VP500-202-l VP700-202-l 9 Sub-plate Aluminum die-casted Hexagon socket head bolt (1 pc.)

VM

Recommended tightening torque Unit: Nm Connection thread 3/4 28 to 30 1/8 7 to 9 1/4 12 to 14 3/8 22 to 24 1/2 28 to 30 1 36 to 38 Torque 5-8-23

New

Torr (mmHg) 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 3. Mount a valve with its coil position upward, not downward. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump on the secondary side.

S Couplers Series KK/KKH/KK13

Body size KK3P-50N KKH3S-50N 5/8 5/8 -60N -60N 6/9 6/9 1/8 1/8 -65N -65N 6.5/10 6.5/10 KK4P-50N KKH4S-50N 5/8 5/8 -60N -60N 6/9 6/9 -65N -65N 6.5/10 6.5/10 1/4 1/4 -80N -80N 8/12 8/12 -85N -85N 8.5/12.5 8.5/12.5 Series KKH are only available as sockets.

Auto Switch Guide

(Including nut, screw, (spacer)) Applicable bore size (mm) 12 BQ-1 BQ-1 Cylinder series 40 BQ-2 BMU1-025 80 BQ-2 32 BQ-2 BMU1-025 50 BQ-2 BMU1-025 100 BQ-2 25 BQ-1 BMU1-025 140 BQ-2 160 BQ-2 125 BQ-2 BQ-1 20 63 BQ-2 BMU1-025 16 BQ-1 CDQ2 MDU RSDQ MK, MK2 CE1 CXT BQ-1 BQ-2 BQ-1 BQ-2 BQ-2 BQ-2 [Mounting screws set made of stainless steel] The set of stainless steel mounting screws (with nuts

Dual Speed Controller with One-touch Fitting Series ASD

9 @0 @1 Note Material PBT PBT PBT Brass Brass Brass Brass Brass Brass(3) No. q w e r t y u i o !