Compact Rotary Actuator Series CRQ2

1 !8 !9 !2 u t e o @3 @1 @4 @0 @6 @0 CRA1 CRQ2 q w r y !5 i MSQ q w r y !5 !6 i MSZ CRQ2X MSQX MRQ With cushion Size 20/30/40 With auto switch and cushion Size 20/30/40 !3 !0 !3 !0 !4 !7 !1 !9 !2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

Bag Filter

Legs (with bolt, nut, flat washer) Element 4 Polyester FGF-OP01 (Set) FGF5-60 5 FGF1 6 Carbon steel 1 5 Hinge bolt Carbon steel Eyenut 6 Carbon steel FGFS1 NBR FGF-KT01 1 O-ring 7 Washer 7 Carbon steel FGFL1 FKM FGF-KT02 1 8 Parallel pin Carbon steel FGF-KT03 (Set) Polypropylene/ NBR FGFS1 1 9 Lifter Carbon steel Holder (with O-ring) 8 Handle 10 Carbon steel FGF-KT04 (Set) Polypropylene

OMR0032

Open collector input Turn ON No. 1 and No. 4, and (b) 5 VDC+/5% R1 = 220 turn OFF the others. Turn ON No. 3 and No. 6, and (c) Differential input R3 = 120 turn OFF the others. ON ON ON 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 (a) Open collector input (24 V) (b) Open collector input (5 V) (c) Differential input 36 - (4) Pulse input circuit example i.

rep-modular-e

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Modular Pressure Control Equipment F.R.L. Replacement Procedure

8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

PFxx-OMA1007

NOR 2 Flow rate diagnostic 0: Normal 1: HHH 3 Temperature diagnostic 0: Normal 1: HHH/LLL 4 Pressure diagnostic 0: Normal 1: HHH/LLL 5 Force AMS mode 0: No forced 1: Forced 6 Error 0: Normal 1: Abnormal 7 System error 0: Normal 1: Abnormal -81No.PF-OMA1007-B Byte 24 and 25 Details Bit Description Value 0 SSC1 1: Output pressure value is within 10% of the target value. 0: Other than the above

2-Color Display Digital Flow Switch Series PFM

Piping Variations PFM Female thread: Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8, 1/4 One-touch fitting: 4, 6, 8, 1/4 Bottom Straight Bottom Straight PFMV Without flow adjustment With flow adjustment PF2A S S 1 2 1 2 S S 1 1 2 2 PF2W PF2D IN 1 IN 1 IN IN IF S S 1 2 S 1 2 S 1 2 1 2 IN IN 1 IN IN 1 Mounting Bracket Bottom mounting Panel mount DIN rail Through-hole mounting 901 Main Functions Selection

Auto Switch Guide

(Including bracket, screw) CLS Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 CLQ Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

Modular F.R.L. Units

27 33.5 33.5 P2 1/8 1/8 1/8 1/8 1/8 M 30 30 41 50 50 T 55 55 65 70 70 P1 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 AR20-A AR25-A AR30-A AR40-A AR40-06-A 37.5 37.5 37.5 42.5 42.5 67.4 70.4 83.5 100 101.5 Note) The total length of B dimension is the length when the filter regulator knob is unlocked. 50 Modular Type Lubricators Series AL AC AFARAL AWAL AFAR AFAFMAR AWAFM AF AFM / AFD AR

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x 0.7

Auto Switch Guide

(Including bracket, screw) RS Q G Auto switch mounting screw M2.5 x 10 l (D-E7A/E8A) M2.5 x 12 l (D-M5/M5W/M5T) Applicable bore size (mm) 6 BP-1 10 BP-1 15 BP-1 RS H A Cylinder series CDJP-D 1. Insert the auto switch mounting nut into the auto switch mounting groove and then set the switch at the mounting position by sliding. 2.

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

Large Size Vacuum Module: Series ZR

Both sides Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 station only 1 1 1 station only Thread type 6 stations only All stations A 6 Nil F G Note) Rc 6 6 stations only A All stations T NPTF When the spacers are attached to the specified locations, specify all spacers.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Series PF2D5 RESET SET PF2D300-A(-M) Panel fitting dimensions 3 x 7.2 (=21.6) 8-M3 36 +0.5 0 6.4 OUT2 NC Sensor 8 Load 4 OUT1 Black Main circuit 1 2 3 4 7 3 Load +0.5 0 Brown + 6 2 19.4 Blue 5 1 12 to 24 VDC 5 6 7 8 Series PF2D5 PF2D301-A(-M) The applicable panel thickness is 1 to 3.2 mm.

MXW Series Long Stroke Slide Table

through hole 5.1 GG HH H 7 depth 5.5 6H9 +0.03 NN-M6 x 1 thread depth 12 0 Bottom through hole 5.1 F E 6H9 +0.03depth 5.5 0 HH H Model E F G GG J K L N NN Z 48 MXW20-150 113 216 101 29 169 41 66 6 1 412 52 MXW20-175 140 237 128.5 50.5 194 66 91 6 1 462 48 MXW20-200 164 264 152 56 219 91 116 7 1 512 52 MXW20-225 189 288 177.5 73.5 244 116 141 7 1 562 48 48 MXW20-250 215 312 203 59 269

Clean Regulator/Fluororesin Type

ARM 2 2 3 3 3 4 4 5 5 6 6 2 2 2 3 3 4 4 5 5 6 6 1 2 1 2 3 1 2 1 2 1 2 A B C A B A B A B A B 6 x 4 4 x 3 10 x 8 8 x 6 6 x 4 12 x 10 10 x 8 19 x 16 12 x 10 25 x 22 19 x 16 1/4" x 5/32" 3/16" x 1/8" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 1/2" x 3/8" 1" x 7/8" 3/4" x 5/8" SMC SMC SMC ARP P U Panel mount union Union IR-A IR SMC IRV : Basic size : With reducer

Compact Cylinder with Lock Series CLQ

1 u @5r @6 @6 !5 !5 @1 q @9 @7 @4 e #2 #0 i @2!9wy!6@3 A B CLJ2 CLM2 A CLG1 CL1 B Extension locking Without magnet !0o#1 @8 t MLGC Section A-A' CNG MNB !3 @0 CNA CNS Section B-B' (Both ends tapped) CLS Retraction locking CLQ Section B-B' (Through-hole) !4 !7 !8 #3 RLQ MLU MLGP ML1C With bumper Rod end male thread Note) The sectional drawing above shows the locked condition.

REC

M10 x 1.25 Up to 1000 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 40 M14 x 1.5 Up to 1000 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 NN P S X Y Z ZZ Bore (mm) Stroke range 20 M20 x 1.5 Up to 700 1/8 146 20 8 21 215 25 M26 x 1.5 Up to 700 1/8 146 20 8 25 219 32 M26 x 1.5 Up to 1000 1/8 159 20 8 25 232 40 M32 x 2 Up to 1000 1/4 181 23 10

Digital Flow Switches Series PF2A

Terminal block numbers 5 6 7 8 4 3 2 1 The applicable panel thickness is 1 to 3.2 mm.

17

1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !