SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 18 A 4 A 4 A 4 A 4 39.3 63.3 79.8 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable tube O.D.: 8 10 12 2n2-Rc 1/4, 3/8 [4 (A), 2 (B) port] 2-One-touch fitting

VFR

8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 1.77 (1.72) VFR510 VFR511 Single 5 60 or less 2 position 3 position 1.88 (1.83) VFR520 VFR521 Double 5 60 or less 1.87 (1.82) Closed center VFR530 VFR531 3 80 or less Exhaust center 1.87 (1.82) VFR540 VFR541 3 80 or less 1.87 (1.82) VFR551 Pressure center VFR550 3 80 or less Note 1) [ ]: Denotes the normal position.

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

EX120/121/122

Terminal no. 2 1 5 3 Compliant Brown White Blue Black Gray 1 2 3 4 5 1 2 3 4 5 4 3 4 Compliant 3 4 Plug connector pin arrangement Reverse keyway Socket connector pin arrangement Reverse keyway EX Connections EX9-AC002-3 200 48.1 52 M12 M12 6.4 2 5 1 Terminal no.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

JXCx-OMT0061CN

5.5) B1 A1 5 6 (17.7) (3 ) 2 1 (18) B6 A6 ( 6.3) 16 15 (11) (30.7) 66 - 15.3 [5m ] (1) (2 ) ---A B-1 2 L A A-1 1 B (B-2) 6 B (A-2) 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (3) 5 5m Shiel d Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 A (A-5) 6 B (B-6) 9 B (A-6) 8 3 (4) S 4 (+) B-1 5 (-) A-1 1 (+) B-3 2 A-3 (8) (1) (2 ) (B 1) (14.2) A1 2 1 (17.7) (14) (18) 6 (10.2) A6 B6 5

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

New

35 43 45 37 41 46 48 13.5 Electrical entry Grommet Grommet (with surge voltage suppressor) DIN terminal Port size P Model Q R Q R Q R S 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 29.5 29.5 32 32 63.5 (70) 68.5 (74.5) 76.5 (83) 79.5 (85) 32.5 32.5 35 35 50 (56.5) 55 (61) 63 (69.5) 66 (71.5) 67 67 69.5 69.5 55.5 (62) 60.5 (66.5) 68.5 (75) 71.5 (77) 55 55 57.5 57.5 ( ) are the dimensions

Modular Type Filter Regulator Series AW

66 Mist separator regulator Series AWM Round pressure gauge AWM20 1/8, 1/4 Panel mount 0.3m (95% filtered particle size) AWM30 1/4, 3/8 AWM40 1/4, 3/8, 1/2 Pages 67 through 70 Micro-mist separator regulator Series AWD AWD20 1/8, 1/4 0.01m (95% filtered particle size) AWD30 1/4, 3/8 AWD40 1/4, 3/8, 1/2 Pages 71 through 74 55 Filter Regulator AW10 to 40 Integrated filter and regulator units

CXS

3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D 2 5 2 4.5 6.5 6.5 C 5.5 12.5 20.5 28 28 38 D 5.5 2.5 5.5 3 1 1 6 10 15 20 25 32 15.5 22.5 30.5 38 38 48 4.5 7.5 4.5 7 9 9 Lead wire entry is inward prior to shipment.

MG

@2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

SMC Electronic Switch Series Variations

ISA-2-1 ISA-2-2 ISA-2-3 ISA-2-4 ISA-2-5 ISA-2-6 ISA-2-7 ISAl-1 ISAl-2/ISAl-1 ISAl-3/ISAl-2 ISAl-4/ISAl-3 ISAl-5/ISAl-4 ISAl-6/ISAl-5 ISAl-6 No.

High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

•

;.i Flat type Flat w~h rib (mm) ZPT02 1:6 y H Rat FIalwith rib M_I 1>A 1>8 C 0 E F G 1:4 H ZPT08 ZPno ZPTlOg 10 12 12 21 32.5 56.5 68.5 BaS B9 3 1.7 ZPT13 30 30 30 30 30 30 ZPT13g 13 15 12 21 32.5 56.5 68.5 188.5 89 3 1.8 .

Bag Filter

Applicable model Note 1) Cover 1 FGFC/R Carbon steel 1 FGF1 Cover 1 Stainless steel 1 FGFS/L Stainless steel 1 FGF1 Case 2 Stainless steel 1 Case Note 2) 2 FGFC/R Carbon steel 1 FGF1A FGF-BT01 1 Basket 3 Stainless steel FGF3A-40 3 FGF1B FGF-BT02 1 Stainless steel BT-3S FGF5A-60 5 FGF1A EJ501S1 3 Basket Element 4 Polyester FGF3B-40 3 FGF1B EJ601S1 Stainless steel BT-4S FGF5B-60 5 FGF1

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

1 4 std. 3 8 std. 3 4 1 std. 1 std. 1 2 2 std. 2 3 5 6 8 9 B With bracket 1 Male thread D Drain piping (Except AMC220) (1) (2) 2 Female thread Note 1) Female thread: Available only AMC220, 320, 520.

Series CQ2

Width across flats 55 M36 x 1.5 21 47 50 64 200 30 30 2-Rc 1/2 (port size) 2 x 4-31.5 depth of counter bore 26 40 62 62 4-19 through 182 226 3 5.5 Flat washer 4 pcs. Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

3 2 1 4 3 2 1 Load Load Load Load Main circuit Main circuit (Gray) CH2_OUT1 (Gray) CH2_OUT1 NC NC 4 3 2 1 4 3 2 1 Sensor Sensor (Red) CH3_OUT1 (Red) CH3_OUT1 NC NC (Green) CH4_OUT1 (Green) CH4_OUT1 4 3 2 1 4 3 2 1 NC NC DC () DC () (Blue) (Blue) 52 Series PF2D Description Remote Type/Display Unit PF2D300, 301 RESET button ( + button) If the UP and DOWN buttons are pressed simultaneously

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

, 200 20 25 32 40 50 63 80 100 20 25 32 40 50 63 80 100 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Non-lube Double acting, Up to 1500 25, 50, 75, 100, 125, 150, 200 Single rod (40 to 63) 1/8 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 Note 1) When exceeding the standard strokes above, the particle generation class may not be satisfied

C92

1 !2 !3 No. !4 !5 !6 !7 !8 !