High Vacuum Angle Valve None XLFV16-30-1-2 XLFV25-30-1-2 XLFV40-30-1-2 XLFV50-30-1-2 XLFV63-30-1-2 XLFV80-30-1-2 Yes XLFV16A-30-1-2 XLFV25A-30-1-2 XLFV40A-30-1-2 XLFV50A-30-1-2 XLFV63A-30-1-2 XLFV80A-30-1-2 XLG General use None XLG16-30-1-2 XLG25-30-1-2 XLG40-30-1-2 XLG50-30-1-2 XLG63-30-1-2 XLG80-30-1-2 High temperature None XLG16-30-1H-2 XLG25-30-1H-2 XLG40-30-1H-2 XLG50-30-1H-2 XLG63-30-1H-2 XLG80-30-1H-2 *
[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 8 1 to 14 1 to 8 15 4 to 18 1.5 to 9 1.5 to 18 1.5 to 9 20 4.5 to 20 1.5 to 10 1.5 to 20 1.5 to 10 30 5 to 22 2 to 13 2 to 22 2 to 13 40 18 to 30 4.5 to 15 18 to 30 4.5 to 15 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to
bAs B6.type B (n ~ 2.4 _ l) 0.5 50.5 :"'Hs 43.5 15 +50( 0" ) 75 +55(n2) 15 75 ~ ' B6lype I><>S'KSlype 3.5 3.5 A 2 ( n ~ 2 . 4.~--' ) 10 26.5 25 26.5 D-G5 K5 type G 35+30(n-2) 35 100 100+ loo(n2) i D-A31ype 1><>3 ' K3 type 50.5 ~Hs 38 43.5 1.5 1.5 A 0 DA3 type 24.5 24.5 23 B 35+3O (n2) 5O+5O(n 2) 35 55 D-A4 type D-G3K3 type !
60 l66l 8.03 t2a4) 4,66 '220) 1.57 4.02 h02) t.o7 (78) 0.98 (25) 2.05 (52) t.55 i14l 0.43 121) ).43 t l l I 1.89 (44) M22xL5 1.46 ) 7 9 (20t 457 1 1 1 5 1 1 . 1 0 (2Al r.21 :;dd5r 3 1 . 5 : 3 : l 2.36 (60) 2.gJ 171) 9.25 t235) I0.04 t255) 2.56 (65) 0.49 1 2 5 ) 1 . 1 5 t80l 9.61 1244\ (264) 1.57 4.57 ( 1 1 6 ) 3.62 (92) 1 . 1 8 (30) 2.05 (52) ).55 (14) 0 4 3 t21) 1.43 l l 1 ) 2.25 (54) M26xl
M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 Rc 1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9
55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121 144 H J XYD-25 XYD-40 XYD-50 XYD-63 XYD-80 100.2 130 178 209 268 16 20 20 20 20 7.5 15 17.5 19.5 26.5 10 Stainless steel High Vacuum Angle/In-line Valve Manual Valve/Bellows Seal Series XMH, XYH How to Order XMH XYH 16 25 Angle type In-line type 1 2 3 2.
40 (67) TI/ TIL Conduit terminal: T PA 92 2 PAX PB (2.3) 98 104 (7.5) (5.5) 25 52 55 (33) 36 G 1/2 (27) 30 (27) 30 11 14 IN OUT Bracket 50 (52) (67) 24 26 (28) 2-Rc 1/4, 3/8, 1/2 22 28 40 59 2 : Port size Rc 1/2 17-3-49 8 The VX series will be revised shortly.
8 1 8 .13 (57) NARM1000 (79 X n) + 25 Individual IN 1 8 1 8 Common IN (188 X n) + 43 1 4 1 8 .3 (136) NARM2000 Individual IN (187 X n) + 45 1 8 1 8 Space Saving How to Order Option NARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Note1) Pressure gauge for 1MPa is used.
3 4 5 0 15 10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation
46 52 65 75 95 114 32.5 38 46.5 56.5 72 89 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 27 27 31.5 31.5 38 38 13 14 15.5 16.5 19 19 1/8 1/4 1/4 3/8 3/8 1/2 16 16 16 16 16 16 84 84 94 94 114 114 4 4 5 5 5 5 4 4 5 9 11.5 17 M6 X 1.0 M6 X 1.0 M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 6.5 9 10.5 12 14 15 6 6 7 7 10 10 47 51 58 58 72 72 M10 X 1.25 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5
HRX-OM-R016 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.3.3 Types of hazard labels . 1-3 1.3.4 Locations of Hazard Labels . 1-4 1.4 Other Labels . 1-5 1.4.1 Product Label . 1-5 1.5 Safety Measures . 1-5 1.5.1 Safety
0 () 1 2 () 3 () 4 5 6 1 7 8 9 ON 10 11 12 13 1 14 2 15 Word2/ Word Bit 0 OFF ON*1 1-7 () 2 8-9 1:ABS() 2:INC() *2 10-15 () Word3 Word Bit 3 0-15 1 1 mm/s Word4,5 Word Bit 4 0-15 () (-)(+)*3 0.01 mm 5 0-15 () Word6 Word Bit 6 0-15 1 *1 1 mm/s 2 *1 ON ONOFF PLC *2 1(ABS)2(INC) *3 20(P.83) -39- Word7 Word Bit 7 0-15 1 *1 1 mm/s 2 Word8 Word Bit 8 0-15 *1 1% Word9
2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model CXS6-10 CXS6-20 CXS6-30 CXS6-40 CXS6-50 68.5 10 15 23 55 78.5 20 20 33 65 88.5 30 25 43 75 98.5 40 30 53 85 108.5 50 35 63 95 8-29-7 8 Series CXS Dimensions: 10, 15 ZZ Stroke SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G0.2 (G) A P H 6.3 5 X (Hexagon socket head cap screw) F (Through-hole) N E M4 x 0.7 x 14.5l, M4 x 0.7 (Hexagon bolt)
HIROSE ELECTRIC CO., LTD. 55 2 x M2.6 x 0.45 Socket side 14 25 1 13 Terminal no. 47.04 Note 1) Types with 15 pins are also available. Refer to page 561 for details. Note 2) Lengths other than the above are also available. Please contact SMC for details. Note) For CE compliant models, DC-type only.
HIROSE ELECTRIC CO., LTD. 55 2 x M2.6 x 0.45 Socket side 14 25 1 13 Terminal no. 47.04 Note 1) Types with 15 pins are also available. Refer to page 561 for details. Note 2) Lengths other than the above are also available. Please contact SMC for details. Note) For CE compliant models, DC-type only.
508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15 32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C
1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !
1 !2 !3 !4 !5 !6 !7 1 1 1 1 1 1 1 q 2B 2D e r t y u i o !
(They can also be validated by parameters.) 6) A sequence should be implemented to turn ON the RDY relay after confirming that there is no trouble with the servo (ALM signal is ON). 13 Series LG1H Nonstandard Motors / Yaskawa Electric Corporation Drivers Dimensions 45 2-6 149 160 6 50 55 130 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 6 7 8 10 13 Pin No. 14 15 16
20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move.