MGC

25 25 140 M5 X 0.8 38 80 80 30 60 30 25 44 47 98 13 31 12 21 52 M6 X 1 30 32 153 M5 X 0.8 46 80 95 37 70 30 50 53 112 16 28.5 38 12 21 60 M6 X 1 35 32 161 Rc(PT)1/8 50 82 105 37 80 25 60 63 132 20 47 33 12 25 70 M8 X 1.25 40 38 188 Rc(PT)1/8 60 92 125 44 95 20 70 73 162 25 58 82.5 40.5 14 26 M8 X 1.25 45 50 241 Rc(PT)1/8 75 104 150 55 115 20 Without rear plate Long stroke Bracket mounting

Magnetic Separator FHM Series

Micromesh element Element size Description Model Port size Micromesh element (With relief valve) EM040-12 3/8, 1/2 55 x L90 FH34 FH44 FH54 FH64 (Refer to P. 511.) EM910-12 3/4, 1 74 x L117 EM140-12 Line filter 1 1/4, 1 1/2 74 x L195 EM930-12 2 88 x L282 EM240-12 2 1/2, 3 119 x L280 EM810-12 3/4, 1 65 x L95 EM910-12 1 1/4, 1 1/2 74 x L117 FH100 (Refer to P. 518.)

SX

Speed controller Silencer Tube x Length Speed controller Silencer SX3140-01 SX3120-C6 AS3001F-06 AN110-01 AS2051F-06 AN120-M5 T0604 x 1 m T0806 x 1 m AS3001F-08 T0604 x 1 m T0806 x 1 m AS3001F-08 SX5140-02 SX5120-01 AS3001F-06 AS3001F-06 AN101-01 AN101-01 AS4001F-10 T0604 x 1 m T1075 x 1 m T1209 x 1 m AS3001F-06 T0604 x 1 m AS3001F-06 T1075 x 1 m AS4001F-10 SX7140-03 SX7120-02 SV AS200-02

Table of Contents

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Electric Actuator with Integrated Guide

500 to 600 mm strokes 22.5 19 B: Stroke + 75 10 19 Stroke + 95 64 Motor unit2 D section detail (Sensor rail dimensions) Stroke + 169 40 10 Work piece mounting reference plane1 30 5 5.8 3.3 4.9 1 4 15 30 33 E section detail (Switch rail T-slot dimensions) Body mounting reference plane1 17.5 Pitch = 100 60 (n1-1) x pitch 47.5 Section AA n1 100 200 300 400 500 600 n2 1 1 1 1 2 2 Stroke Model

V

4 VXD2130-02 10 1.9 34 0.5 0.4 0.9 0.7 0.02 0.7 0.5 3/8 VXD2130-03 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 3/8 VXD2140-03 15 4.5 80 1.5 0.7 0.7 1 1 0.02 0.02 0.5 1/2 VXD2130-04 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 1/2 VXD2140-04 15 5.5 100 0.7 0.7 1 1 0.02 1 1 3/4 VXD2150-06 20 9.5 170 0.7 0.7 1 1 T E C H N I C A L SPECIFICATIONS E N E R G I Z E D C L O S E D T Y P E S E R I E S VXD 1MPa = 145PSI

0.4

C10: 10 N11: 3/8" C12: 12 (Double sided type) ( ) 7 6 5 4 3 2 1 n D side Station U side VFR VQ7 M12 57.2 R R OUT 76.7 76.5 X 3 3 67.2 72 IN X B B B B B B B 49.5 46.2 P 12 P 12 25.6 30 25 A 1 A 1 A A A A A 10 13.5 M12 21.5 13 (7.5) 25 55 18 One-touch fitting [4(A), 2(B) port] Applicable tube O.D.: 4, 5/32" 6, 1/4" 8, 5/16" n: Stations L: Dimensions n L 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 L1

KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A D1 6 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

Series KP/KPQ/KPG

Polyurethane Coiled Tubing Series10-TCU Specifications Model 10-TCU 10-TCU 10-TCU 10-TCU 10-TCU 10-TCU 10-TCU 0425B-1 0425B-2 0425B-3 0604B-1 0604B-2 0604B-3 0805B-1 Number of cores Tubing O.D. mm Tubing I.D. mm Fluid 2 cores 3 cores 1 core 2 cores 3 cores 1 core 1 core 4 6 4 8 5 2.5 Air Maximum operating pressure at 20C (68F) 0.8MPa (116 psi) Burst pressure Operating temperature Material

Series KP/KPQ/KPG

Polyurethane Coiled Tubing Series10-TCU Specifications Model 10-TCU 10-TCU 10-TCU 10-TCU 10-TCU 10-TCU 10-TCU 0425B-1 0425B-2 0425B-3 0604B-1 0604B-2 0604B-3 0805B-1 Number of cores Tubing O.D. mm Tubing I.D. mm Fluid 2 cores 3 cores 1 core 2 cores 3 cores 1 core 1 core 4 6 4 8 5 2.5 Air Maximum operating pressure at 20C (68F) 0.8MPa (116 psi) Burst pressure Operating temperature Material

HRX-OM-X037

method Air-cooled refrigeration Refrigerant R410A(HFC) Quantity of refrigerant kg 1.8 1.8 Control method PID control Ambient temperature C 2 to 45 Circulating fluid CH1 : Clear water 1, DI water (pure water) 9 CH2 : Clear water 1,DI water (pure water) Set temperature range C CH1 : 5 to 35 / CH2 : 10 to 40 Cooling capacity2 kW 10 1 8 21.5 1 8 Heating capacity3 kW 1.5 1 4.0 1 Temperature stability

HRX-OM-M090

HRS012/018--10-T/MT HRS012/018/024/030--20-T HRS012/018/024/030--20-MTNote 1) Applicable model Rated flow50/60Hz Note 2) 3) 7(0.36MPa)/10(0.42MPa) 10(0.44MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Pump 18/22 Maximum flow rate (50/60 Hz) L/min Maximum pump head (50/60 Hz) m 55 70 60 Output W 320 550 Circuit protector 15A (10 A for standard) A 15 Recommended earth leakage breaker capacity 15

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

Digital Digital Digital 0.01 to 1 0.02 to 2 0.05 to 5 0.1 to 10 0.3 to 25 0.5 to 50 1 to 100 2 to 200 Power supply voltage Rated flow range [L/min] 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 2 to 200 5 to 500 10 to 1000 20 to 2000 5 to 500 10 to 1000 20 to 2000 0 to 0.5 0 to 1 0 to 3 0.5 to 0.5 1 to 1 3 to 3 30 to 3000 10 to 1000 20 to 2000 60 to 6000 120 to 12000 24 VDC 10% PF3A7 H 12

0.4

NM M5T N9 N7 N3 N1 Symbol 1/8" 5/32" 1/4" 5/16" 10-32UNF (M5 thread) Mixed Applicable tubing O.D.

MHZ2/MHZJ2

MHZ2-25D (N) 4 55 6.3 10 MHZ2-10S (N) Normally closed Normally open 6 115 24 16 MHZ2-16S (N) 10 240 28 20 MHZ2-20S (N) 14 435 45 25 MHZ2-25S (N) 12 4 55 10 MHZ2-10C (N) 31 Single acting type, normally closed 6 115 16 MHZ2-16C (N) 56 10 240 20 MHZ2-20C (N) 83 14 430 25 MHZ2-25C (N) Note 1) Values for pressure of 0.5MPa, gripping point L= 20mm, at center of stroke.

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet Flat Type with Groove A 3 30.5 11 1.2 11 04 6 37 14 14.5 10 47 18 20.5 J K Width across flats E 3 30.5 11 1.8 11 6 37 14 14.5 10 47 18 20.5 06 08 N S U F GN GS HS 7 15 55 36.5 1.2 10 20 62.5 44 06 08 15 55 36.5 1.8 20 62.5 44 04 JB K ZP3 T UM B5 C2 3 31.5 12 11 J K 10 6 38 15 14.5 10 48 19 20.5 JB K 15 56 37.5 10 20 63.5 45 10

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

mm] JSXD30 Series 1/4, 3/8, 1/2 10 100 JSXD40 Series 3/8, 1/2 15 200 JSXD50 Series 3/4 20 430 Grommet Stainless steel NBR Air JSXD60 Series 1 25 DIN terminal Brass 580 N.C.

VQ7-6/7-8

62 50 38 62 50 38 R2 R1 P R1 R2 P Indicator light Indicator light Mounting hole 2-6.5 42.5 42.5 2-6.5 42.5 42.5 Mounting hole G1/2 (Cable 8 to 10) G1/2 (Cable 8 to 10) 137.5 137.5 125.5 125.5 93 93 25 (X port) 25(X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 1/8 2-3/8 1/4, 3/8 X (PE) port 1/8 R1, R2 port 2-3/8 P Port 1/4, 3/8 X(PE) port P port 3-10-8 9 ISO Standard Solenoid Valve: Size

CE

For detailed specifications, refer to page 10-20-1.

CE

For detailed specifications, refer to page 10-20-1.