3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

A 4 B 2 14 Stations 4 P=10.5 17.7 D side 2n-M5 8 8 44 30.5 67 (Single, rubber) 69.5 (Single, metal) A 4 14.5 B 2 95 (Double) 103.5 (3 Position) 300 (Lead wire length) 14 6.5 Cover diameter 1.6 Cross section 0.34mm2 M5 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc(PT)1/8 R1, R2(EXH) port 15 16.5 16.5 15.5 15.5 33 57 (30.5) 7 2-Rc(PT)1/8 P(SUP) port 2-M5 X

Vacuum Pad

Vacuum Pad Selection (1) Based on the workpiece size, the pad diameter is 4 mm (1 pc.). (2) Using the formula on the front matter 13, confirm the lifting force.

Vacuum Pad

Vacuum Pad Selection (1) Based on the workpiece size, the pad diameter is 4 mm (1 pc.). (2) Using the formula on the front matter 13, confirm the lifting force.

Vacuum Pad

Vacuum Pad Selection (1) Based on the workpiece size, the pad diameter is 4 mm (1 pc.). (2) Using the formula on the front matter 13, confirm the lifting force.

Vacuum Pad

Vacuum Pad Selection (1) Based on the workpiece size, the pad diameter is 4 mm (1 pc.). (2) Using the formula on the front matter 13, confirm the lifting force.

Table of Contents

P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P611010-1 P611070-1 P611090-1 P611060-1 P611080-1 P612010-1 P411020-1 P411030-1 P411040-1 P411050-1 Series Vane type Unit part no.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

PA 1 2 1 2 3 4 1 2 3 4 5 6 1 2 3 4 1 2 3 4 1 2 3 4 1/8" 1/8" PAX 1/8" 1/8" PB 1/4" 1/4" 1/4" 1/4" 3/8" 3/8" 3/8" 3/8" 1/2" 1/2" 1/2" 1/2" 3/4" 3/4" 3/4" 3/4" 1" 1" Note) For each body class, the second and later numbers or symbols indicate reducing.

0.4

13 to 24 stations/Double wiring P/S kits for 2 to 24 stations/Single wiring L0 kit : Stations (1 to 8) L1 kit : Stations (1 to 8) L2 kit : Stations (1 to 8) !

Mechanically Jointed Rodless Cylinders

1 1 Applicable cylinder Model Common JJ L P LD H G Adjustment range Adjustment range Ea Eb Ea Eb MY316 MY320 MY325 MY332 MY340 MY350 MY363 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 1 1 1 1 1 1 1 1 1 1 1 72 90 100 38 50 55 60 32 36 40 20 21 22 22 M8 x 1.25 M8 x 1.25 M10 x 1.5 M4 x 0.7 M4 x 0.7 M6 x 1 M6 x 1 6.5 6.5 9 4.5 4 5.5 5.5 10 10 12 12 16 16 19 6 6.5 9.5 9.5 11 11 14 Applicable

ZP3

Form w 1 Material C 04 4 4.5 1.2 7 6 0.5 06 6 6.5 N S U F GN GS HS A 0.8 08 8 8.5 10 10 11 9 7 1 13 13 14 1.2 16 16 17 B ZP3 (10 to 16) (4 to 8) UM 2 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 4 to 16 w q ZP3 T N 04 A5

17

D 40 55 74 H 3.2 4.5 4.5 J 35 40 47 MM 5.5 6.5 6.5 A 63 76 92 B 78 94 112 C 39 47 56 F 100 124 144 Ea 1 1 1 Eb 1 1 1 MY-J25 MY-J32 MY-J40 MYAJ25 MYAJ32 MYAJ40 55 60 72 22 22 32 M6 x 1 M6 x 1 M8 x 1.25 5.5 5.5 6.5 12 12 16 9.5 9.5 11 Mounting direction (2) B1 28 40 44 Adjustable range Applicable cylinder MY1B25 MY1B32 MY1B40 Applicable cylinder MY1B25 MY1B32 MY1B40 A2 B2 C2 D2 F2 K2 Q2 Part

V

4 09 5/16 11 3/8 Tube T01 1/8NPT T02 1/4NPT 06 6mm Tube 08 8mm Tube 10 10mm Tube 01 Rc 18 02 Rc 14 Operating Temperature Range 5 ~ 60C / 40~140F N Canada, USA Other (PT) Lubrication Forbidden N O Z Z L E D I A M E T E R V A C U U M P O R T 05 0.5mm 07 0.7mm 10 1.0mm 13 1.3mm 06 6mm Tube 08 8mm Tube 01 Rc 18 02 Rc 14 07 1/4 Tube 11 3/8 Tube T01 1/8NPT T02 1/4NPT S Y M B O L S T Y P E I N L

SZ3000

L 20 46 (7.5) L 14 1 8 55 47.04 (35) (25) 5.5 Approx. 10 25 13 2-M2.6 x 0.45 Socket side Rail mounting hole pitch 12.5 Plug connector HDB-CTF Terminal No.

LVQ

Symbol 07 11 13 19 25 1/4 3/8 1/2 3/4 1 Note) Refer to page 540 for How to order fitting parts. Select the fittings of the same size as the one at the valve side.

Rotary Table/Rack & Pinion Style Series MSQ

1 1 1 1 12 12 12 12 12 12 12 1 1 1 1 4 4 4 Parts included 13 13 13 13 17 17 17 1 1 1 1 4 4 4 in seal kit 17 17 17 17 18 18 18 4 4 4 4 4 4 4 18 18 18 18 27 27 27 4 4 4 4 2 2 2 27 27 27 27 29 29 29 2 2 2 2 4 4 4 A grease pack (10 g) is included.

Electric Actuator with Integrated Guide

9 4-M6 x 1 1.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

8 1/8 1/4 1/4 M5 x 0.8 Port size Rc, NPT, G 1/8 1/8 1/4 1/4 1/8 1/8 1/4 1/4 Bore size, Standard strokes (mm) Standard stroke Bore size (mm) Model 20 15 RSH 32 20 RS1H 50 30 63 30 RS1H 80 40 Mass (kg) DBore size (mm) Rod end configuration Action Mass -X 0.41 20 Double acting type 0.75 32 Individual -X Lever with built-in shock absorber type Double acting spring type 2.03 50 Single acting

Cylinder with Lock Series CLS

(Different surfaces, Same surface), 1 pc. 125 25 135 150 25 + 55 (n2) 2 125 + 55 (n4) 2 135 + 55 (n4) 2 150 + 55 (n4) 2 n pcs. (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) 2 pcs. (Different surfaces, Same surface), 1 pc. 145 35 155 170 D-F5NTL 35 + 55 (n2) 2 (n = 4, 8, 12, 16) 145 + 55 (n4) 2 155 + 55 (n4) 2 170 + 55 (n4) 2 n pcs.

24

1 pc. 5 *1 5 2 pcs. 10 *1 10 D-A9V 1 pc. 5 2 pcs. 10 D-Z7 D-Z80 1 pc. 5 *1 5 2 pcs. 10 D-Y59 D-Y7P 1 pc. 5 *1 5 2 pcs. 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc. 5 *2 2 pcs. 10 *2 D-Y7BA 1 pc. 5 *2 2 pcs. 10 *2 D-P3DWA 1 pc. 15 2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.

VQ7-6/7-8

AXT500-13 VQ7060-13-2 VQ7060-13-1 VQ7060-13-3 37 x 1.6 Gasket Gasket A Gasket B Gasket C O-ring Mini Y seal Pilot valve assembly Double check spacer DIN terminal q w e r t y u i o MYN-11 MYN-16 VQZ110QVV71-FPG UKL-S1 3-10-10 11 Series VQ7-6 Manifold Specifications How to Order Manifold VV71 6 02D 02R VK Air release valve coil rating Stations 1 1 station VZ Silencer box Nil 1 2 3 4 9 None