HRX-OM-R016

Table 5.18-11 List of set value Set value Explanation Initial value (Default setting) Setting/checking are not available unless the serial protocol setting is simple communication protocol. 7 7 bit 8 bit Parity check (simple communication protocol) Setting and checking 21. Press the [SEL] key once.

HRX-OM-W038

Table 5.19-11 List of set value Set value Explanation Initial value (Default setting) Setting/checking are not available unless the serial protocol setting is simple communication protocol. 7 7 bit 8 bit Parity check (simple communication protocol) Setting and checking 21. Press the [SEL] key once.

Air Cylinder NCA1 Series

8 1 1/8 3 1/16 5 7/8 3 1/4 6 1/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 6 3/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8

NCA1

/8 3 1/4 6 1/4 8 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 3/16 5 7/8 3 1/4 6 3/8 8 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 7/16 5 7/8 3 1/4 6 5/8 10 1 3/4 1 1/4-12 2 2.375 3/8 1 1/8 3 1/8 7 1/8 4 1/8 7 1/4 10 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 1/8 4 1/8 7 3/8 10 2 1/2 1 7/8-12 3 3.125 1/2 1 1/2 3 1/2 7 1/8 41/8 7 5/8 12 2 1 1/2-12 2 1/4 2.625 3/8 1 1/4 3 1/4 7 5/8 4 5/8 7 7/8 12 2 1/2 1 7/8-12

SMC

2.5 +0.025 0 HA GA 3H9 depth 2.5 +0.025 0 B A NN-M4 x 0.7 thread depth 8 4 6.5 1 7 7 12 3.2 B A 11 5.5 5.5 11 H (NN1) x H G Section AA Section BB (mm) Model F 20 30 20 28 38 ZZ 64 74 84 106 122 M 42 52 62 84 100 Z 41.5 51.5 61.5 83.5 99.5 K 22.5 32.5 42.5 52.5 62.5 J 17 27 40 50 60 I 10 10 7 19 25 NN 2 2 3 3 4 H 25 35 20 30 24 G 6 6 11 13 17 N 4 4 6 6 6 HA 20 20 20 30 48 GA 11 21 31 43 41

ASR

7 !7 !4 !1 !6 !6 !8 !8 AS w q w q ASP @0 e @0 e ASN @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 AQ i ASV ASQ530F-02 type ASQ630F-03 type ASQ530F-02 type ASQ630F-03 type y !5 !3 y u AK !5 !7 !7 ASS !4 !1 !2 !4 !1 !8 !8 ASR !6 !6 ASF t q t q @0 r @0 r @1 !0 !9 !6 !7 @1 !0 !9 !6 !7 Component Parts Note Material Note Description Description Material No. q w e r t y u i o !0 !1 !2 !3 No. !4 !5 !6 !7 !8 !

MB

7 !

Series VQ Base Mounted Metal Seal/Rubber Seal

Use the manifold specification from to specify. 0 1 2 3 4 5 6 7 Sl unit output No.

LEY-OM007

.9,10 2.1 /LEY /P.13,14 3.1 /LEYG 3 /P.9,10 2.1 /LEY /P.13,14 3.1 /LEYG / 4 / P.41 7.2 / P.42 7.2 5 6 /P.35 5. 7 8 0 () /P.21 4.3[] 9 /P.21 4.3[] /P32 4.4 INC/ /P.21 4.3[] 11 /P.44 7.3 12 /P.45 7.3 No. 2 / 1 -51- 15ms 2 IN* 30ms No.

Rotary Actuator/Vane Style Series CRB1

Applicable shaft type: Z Applicable shaft type: J X = CRB2 Y = X = (mm) (mm) CRBU2 Y X Y X Size Size 4 to 19.5 4 to 19.5 4 to 19.5 4 to 39.5 50 50 CRB1 4 to 21 4 to 21 4 to 21 4 to 45 63 63 Y = 4 to 23.5 4 to 23.5 4 to 23.5 4 to 53.5 MSU 80 80 5 to 30 5 to 30 5 to 30 5 to 65 100 100 CRJ Symbol: A58 The rotation axis is reversed. The long shaft and short shaft are shortened.

Intrinsically Safe Valve

21 1.9 79.6 21 73 42 B B B B 11.1 31.5 6 x 1/4" {P(1), EA(5), EB(3) port} 55.2 M5 x 0.8 (External pilot port) 21 (Pitch) P = 19 Stations 1 n 2 81.5 56.2 52.8 A A 9.4 41 28.9 B B 7 2n x 1/4" {A(4), B(2) port} (Pitch) P = 19 24 L-type plug connector with cover (LL) 53-SS5Y7-42Terminal type (TT) 53-SS5Y7-42L (Lead wire length) 120.5 37.1 L (Lead wire length) 81.5 Stations Stations 81.5 53.5

•

Refer to pages 7 to 10.

VZ3000

Round head combination screw Round head combination screw M2.5 x 7 (With spring washer) Blanking plate (With spring washer) Individual SUP Spacer Assembly Gasket DXT192-40-2A Round head combination screw Gasket Applicable base VV5Z3-20 VV5Z3-21 Applicable base VV5Z3-20 VV5Z3-20P VV5Z3-21 M2.5 x 40.5 (With spring washer) DXT192-13-3A Round head combination screw Individual EXH Spacer Assembly

Step Motor Controller

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

EXxx-OMN0035CN

8 0 1 2 3 4 5 6 7 Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 14 15 16 17 18 19 20 21 0 1 2 3 4 5 6 7 Bit 0 Bit 1 Bit 2 Bit 3 Bit 4 Bit 5 Bit 6 Bit 7 (EX600-DMF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 3 Bit 1 Bit 3 Bit 5 Bit 7 2 Bit 0 Bit 2 Bit 4 Bit 6 4 Bit 1 Bit 3 Bit 5 Bit 7 -55No.EX-OMN0035CN-A EX600-DME EX600-DMF -56No.EX-OMN0035CN-A (DC24 V10%) -57No.EX-OMN0035CN-A

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

58

Refer to pages 7 to 10. NBR Tube gasket 20 NBR Piston gasket 21 For types with built-in magnet or with auto switch.

Pin Cylinders Series CJP2/CJP

I-P006A I-P010A I-P016A Y-P006A Y-P010A Y-P016A 5 +0.040 0 0.020 0.045 +0.040 0 3 3 3 6 9 12 3.5 M3 x 0.5 3 5 4 5 6 5 6 12 3.5 M3 x 0.5 3 5 4 5 6 6.5 +0.048 0 0.030 0.060 +0.048 0 5 5 5 10 13.6 16 5.5 M4 x 0.7 5 8 6.3 7 10 6.5 10 16 5.5 M4 x 0.7 5 8 6.3 7 10 7 +0.048 0 0.030 0.060 +0.048 0 6 6 6 12 15.8 19 7 M5 x 0.8 6 10 7.8 9 16 7 12 19 7 M5 x 0.8 6 10 7.8 9 16 Knuckle pin Trunnion pin

High Power Cylinder Series RHC

NC E FL AL E NA B WH 10 10 FT H2 K F N JD N JC A S + Stroke H F ZZ + Stroke (mm) A AL B C D E F FL FD FT FX FY FW FZ GA GB H1 H2 Bore size (mm) 20 38 18 68 15.5 53.5 32 47.5 40.5 5 10 8 14.5 16 11.5 7 6 51 21 25 44 22 70 19.5 56.5 36 49.5 45.5 6 12 8 18 16 11.5 7 9 53 27 32 50 22 72 19.5 55 44 51.5 51.5 6 12 9 18 19 14.5 7 9 55 33 40 60 24 84 21 56 53 51.5 61.5 8 16 11 20.5 21 16.5 9 9 66

HRX-OM-R026

Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes and remodies . 7-4 7.3.2 How to release the fan breaker trip . 7-8 7.3.3 How to release the pump thermal trip . 7-10 7.4 Other Errors . 7-12 Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Control of Circulating Fluid, facility water Quality