SY

SS5Y34, #1 (#1 + #5 + #6 + #7 + #17) SS5Y3-45FU-B .

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Body (Material: SCS13) Refer to the page 22 for the maintenance parts. 5 Series XMC, XYC Dimensions XMC/Angle type C D L2 (KF flange) Fd Fc Fn C (Fc) L1 (K flange) (CF flange) J H B G A A L2 (mm) Model A 110 120 171 183 209 250 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn 95 110 Fd 34 70 114 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H J P.C.D L1 6-4.4 6-6.6 8-8.4 XMC

ZP

Thread dia. 4, 6 Nylon tube, 4, 6 Urethane tube 4, 6 Nylon tube, 4, 6 Urethane tube 6 Nylon tube, 6 Urethane tube 2 x 4, 3.5 x 7, 4 x 10 Thin section series (10 to 16) 2 to 8 10 to 16 20 to 32 40 to 50 M5 x 0.8, M6 x 1 M4 x 0.7, M5 x 0.8 M5 x 0.8, M6 x 1 M5 x 0.8, M6 x 1 M6 x 1, M8 x 1 M6 x 1, M8 x 1 M5 x 0.8, M6 x 1, M8 x 1.25 M6 x 1, M8 x 1.25 Pad Type Pad form Flat with ribs Deep Bellows

Metal Seal/Rubber Seal Series VQ Body Ported

SI unit output no. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no.

RQ

-X 32, 40 YA-03 56 55 18 6 2050, 63 YA-05 67 100 22 8 80 YA-08 83 195 28 10 Allowable Eccentricity Data 100 YA-10 100 340 36 12 32 40 50 63 80 100 Bore size (mm) Type B Mounting Bracket 1 1.5 2 Eccentricity tolerance 0.5 Backlash Joints are not included with the A or B type mounting brackets. Order them separately. (Example) Bore size 40 Part no. Type A mounting bracket .

•

ZPRI6Il is_ f8 .16 25 33. 50 5 I 6 '7 , ZPRlOO 1 0 1 2 15 24 32.9 49 5 6 6 51 , 50 51 51 50 48 ZPR25 I 48 51 50 48 Appl/cable tube (mm) .P Applicable tube 0 .0 Q ' R .s ,.4 4 20.6 15.6 16.6 ZPR32 ZPR40 56 54 56 54 57 55 56 54 lOA 12.8 ,.6 6 .21.6 ZI!

PC Wiring System

Dimensions 10.5 10.5 178 (3.6) 1 C H C H R S 16.7 OUT IN AX/ 140A 28.3 0 45 4.1 53.5 5.1 (3.7) 55 1 1F 16 D 4 0 2 3 5 6 7 8 9 A B C E F 10 11 12 13 14 15 17 18 19 1A 1B 1C 1D 1E + + + + + + + + + + + + + + + + 4.5 5 5 Refer to page 50 in CAT.E02-20 for the junction cable part number.

VFR

Air release valve Air release valve 1 station 1 station Control unit Control unit 1 station 1 station Pressure switch Pressure switch Connector terminal no. 2 station 2 station 2 stations 2 stations 3 stations 3 stations 3 stations 3 stations 4 stations 4 stations 4 stations 4 stations 5 stations 5 stations 5 stations 5 stations 6 stations 6 stations 6 stations 6 stations Connector terminal

CXS

Dual-Double-Rod Type CXSW Series CXSJ 6, 10 How to Order Piping Standard piping Axial piping Nil P CXS P 6 M 50 A90 J S Number of auto switches 2 pcs. 1 pc.

RLQ

T3 Cylinder with Bypass Piping Component Parts T2 63.4 73.8 80.3 T3 57.8 67.8 74.3 TH 47.9 57.3 57.3 TP Rc, NPT, G 1/8 Rc, NPT, G 1/4 Rc, NPT, G 1/4 T1 81.4 93.3 99.8 No. 1 2 3 4 Description Qty. 1 1 1 1 Part no.

Square Tube Type Air Cylinder Series MB1

6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 4 4 5 9 11 .5 17 6.5 9 10.5 12 14 15 178 186 210 210 258 258 90 90 102 102 124 124 184 192 218 218 268 268 12 16 20 20 25 30 30 35 40 45 45 55 13 13 14 14 20 20 47 51 58 58 72 72 46 52 65 75 95 114 22 30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800

MG

1 !2 !3 !4 !5 !6 !7 !8 !

SYJ300/500/700

VKF (A) 2 (A) 2 X X VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN 4-4-55 56 Series SYJ300/500/700 Specific Product Precautions 1 Be sure to read before handling.

JXCx-OMT0061CN

A-4) 13 A (B-5) 7 A (A-5) 6 S B (B-6) 9 B (A-6) 8 3 (14.2) (2 ) 2 1 (8) (1 ) B1 A1 (14) (18) (17.7) 6 5 (3 ) 2 1 B6 A6 15 16 (11) (30.7) 15.2 [820m] (1) (2) -L A B-1 2 A A-1 1 B (B-2) 6 8 8m* B (A-2) 5 COM-A/COM B-3 3 A 10m* COM-B/ A-3 4 B 15m* (3) Shield C 20m* Vcc (B-4) 12 GND (A-4) 13 A (B-5) 7 * A (A-5) 6 B (B-6) * 9 B (A-6) 8 3 (14.2) (2 ) 2 1 ( (14) (1 )

PSxx-OMV0003CN

SW / [2 ] 2 HYS 0 1 HYS 2 Wind OUT1 3 Wind OUT 4 Wind HYS 5 6 HYS 7 Wind OUT2 8 Wind 9 Wind 10 11 12 13 14 15 OUT1 16 OUT2 17 NPN/PNP 18 Line 19 OFF() () -70No.PS-OMV0003CN-G 16 16 16 Line 1 (11seg) 16 16 16 Line 24 (7seg) -71No.PS-OMV0003CN-G , (1015 ) -72No.PS-OMV0003CN-G ,, (), No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 -73No.PS-OMV0003CN-G No.7

Modular Type Filter Regulator Series AW

66 Mist separator regulator Series AWM Round pressure gauge AWM20 1/8, 1/4 Panel mount 0.3m (95% filtered particle size) AWM30 1/4, 3/8 AWM40 1/4, 3/8, 1/2 Pages 67 through 70 Micro-mist separator regulator Series AWD AWD20 1/8, 1/4 0.01m (95% filtered particle size) AWD30 1/4, 3/8 AWD40 1/4, 3/8, 1/2 Pages 71 through 74 55 Filter Regulator AW10 to 40 Integrated filter and regulator units

New

Port size P Model Q R Q R Q R S 3 A 4 B 5 C 6 D VXZ2 VXZ2 VXZ2 VXZ2 1/4, 3/8 1/2 3/4 1 29.5 29.5 32 32 63.5 (70) 68.5 (74.5) 76.5 (83) 79.5 (85) 32.5 32.5 35 35 50 (56.5) 55 (61) 63 (69.5) 66 (71.5) 67 67 69.5 69.5 55.5 (62) 60.5 (66.5) 68.5 (75) 71.5 (77) 55 55 57.5 57.5 ( ) are the dimensions of Normally Open (N.O.). < > are the dimensions of aluminum body.

High Vacuum Angle Valve, XL Series

The sealing force for the valve (6) comes from the spring (5) , and is constant. Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Guide Cylinder Series MGG

5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !0 #1 A' For ball bushing #5 @5 #0 @8 !7 @6 !3 #8 !2 @1 !0 @9 For slide bearing y For long stroke For 100 @7 For 80, 100 View A-A' Parts list Parts list No. Description No.

Standard Combinations

SUP 1/8 11 (0.60) 10 (0.54) VHS20 1/8 1/4 16 (0.87) 14 (0.76) 1/4 14 (0.76) 16 (0.87) VHS30 OUT IN 1/4 3/8 29 (1.57) 31 (1.68) 1/4 36 (1.95) 27 (1.46) B 3/8 VHS40 3/8 40 (2.17) 38 (2.06) 1/2 42 (2.28) 55 (2.98) Note) Use an air filter on the IN side for operating protection. EXH.