Ejector Valve Unit Series ZYY/ZYX 1

ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSE1-00-55 Model -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) -X129 (-X130) Sensor type Diffusion type semiconductor pressure sensor Set pressure range 0 to 101 kPa Hysteresis 1 to 10% of set pressure (Adjustable) 3% full span or less (Fixed) 1 to 10% of set pressure (Adjustable) 1% full span or

VXR21/22/23

Port size 04 06 10 12 14 20 LVH 1 2 3 4 Refer to page 17-3-16 for ordering coil only. 1 1 1 2 LVD 1 4 1 2 Thread type Nil T F N LVQ Rc NPTF G NPT Refer to the table (1) given below for availability.

SFOD-OMT0005CN

(5) (1) 2 (3) (4) () ON OFF BUSY SVRE ON SETON (7) INP 0mm/s -57- 14 14.1 [5m ] (1) (2) LE CP A B-1 2 (L) A A-1 1 B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield (3) Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 S 9 B A-6 8 3 (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 5 6 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 [820m] LE-CP(1) (2) * * A B-1

Compact Electric Actuator Series LG1

Zout 4.7k 4.7k SP + 21 CZ Z (Pin 14 is GND) 26 FG CN I/F 12 Series LG1H High Rigidity Direct Acting Guide Type Nonstandard Motors/Mitsubishi Electric Corporation Drivers Dimensions (Without RS-232C option unit) 100 40 1-5 hole 5 5 5 5 120 130 5 5 Summary of input/output signals (connector CN-1/F) Pin No. 1 2 3 4 5 7 8 9 10 Pin No. 11 12 13 14 15 16 17 19 20 Signal name Digital output power

Possible to transfer a workpiece at low-speed.

12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 Rc 1/8 M10 x 1.5 15 M6 x 1 M10 x 1 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 Rc 1/8 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 In addition to Rc 1/ 8, G 1/ 8, NPT 1/ 8 and NPTF 1/ 8 are also available. 338 MSQX Series Low-Speed Rotary

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc 1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9

LG1H

MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LG1-1-G05 1 (for motor) 2 LG1-1-R05 MR-JCCBL5M (for encoder) DP9320081-2 (for motor) DP9320089-2 (for encoder) LG1-1-Y05 3 1 When the Matsushita Electric Industrial Co., Ltd. motor driver is selected, in addition to the cable, a power connector (MOLEX 556910R) and an interface connector (Sumitomo/3-M Limited 10126-3000VE) are also required

Air Pilot Operated Series NVSA

Jr., l,t, 3 . j ':;',14 . , : ; , , I r , ' ' . , I I I I r . . , , r , , , , . . , , . . r l r l , r r t r t r r _ : , r r r t , r ' : , ' , , , r , , , . , , . ' 1 1 1 i , , 1 : : : ; , , , , 1 ' . 1 i , , , " " ' . , : : ; : : l i , : , : : . l i : : ; , , , , : : , : , , ; , , , " . : : : ; ; : : , : . : . 1 ; i : : : : : : : : : ; ; " ' . 1 , , r 1 1 i , r r " : : " ' l i , ' r . : 1

Modular Type Filter Regulator Series AW

66 Mist separator regulator Series AWM Round pressure gauge AWM20 1/8, 1/4 Panel mount 0.3m (95% filtered particle size) AWM30 1/4, 3/8 AWM40 1/4, 3/8, 1/2 Pages 67 through 70 Micro-mist separator regulator Series AWD AWD20 1/8, 1/4 0.01m (95% filtered particle size) AWD30 1/4, 3/8 AWD40 1/4, 3/8, 1/2 Pages 71 through 74 55 Filter Regulator AW10 to 40 Integrated filter and regulator units

Title not found

Port Thread Optional Specitications Standard specif icalion CE marked . 17. 18. 19 For manifold mountinq 2. 3. 15 CE marked DeviceNet comoatible 4,5.6.8. 14 CE marked 1 6 oreset tvoe 4 , 5 . 7 , 1 0 DeviceNet comoalible 5. 6, 8. 14 1 6 Dreset tvDe 5.7.10. 16 0 1s hiqh speed response Digital input type Reverse output 1 2 . 1 3 CE marked lar manilold mountinq 3. 15 CE rnarked 0.1s high speed

Environment

20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move.

Vacuum

20 30 46 80 91 9.9 zPlouo souo 7 u02 2 1.2 12 0.8 u04 4 4.4 1 . 6 7 12 0.8 u06 7 2.5 7 12 0.8 u08 I 7 12 1 u10 1 0 12 1 2 3 u13 1 3 1 5 4 1 3 7.7 1 2 u16 1 6 1 8 1 3 8.2 '12.5 3.5 u20 20 1 5 14 4 u25 1 5 1 4 4 u32 32 4 1 5 1 0 14.5 4 5 u40 40 43 7 1 8 18.5 I u50 50 53 7 1 8 19.5 7.5 D l 0 1 0 1 2 10.7 D16 1 8 11.7 7 D25 2A 4 15.5 20 1 0 D40 40 43 7 1 8 24.2 29 126 Uacuum Pad/Gomp serles zPR

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 R 12 15 18 23 27.5 34.5 6.5 7.5 8 10 10 13 13 M3 x 0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20

Digital Flow Switches, Series PF2A, Series PF2W

Pin description PF2A7H-(-M) 68 69 1 DC(+) 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30V 80mA or less OUT1 Black Load H 0V Blue 50msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 11/2, NPT 11/2, G 11/2 Rc

Series CE1

, 300, 500 193 144 32 20 64 71 85.5 M18 X 1.5 22.5 7 18 200, 300, 500 194 145 32 20 77 84 98.5 M18 X 1.5 21 7 18 P T* X M N O Q Z L Bore size (mm) 32 40 50 63 Rc(PT) 1/8 57.5 41 34 5.5 M6 X 1 56 30 14 Rc(PT) 1/8 64.5 41 40 5.5 M6 X 1 62 30 14 Rc(PT) 1/4 76.5 49 50 6.6 M8 X 1.25 61.5 35 19 Rc(PT) 1/4 89.5 49 60 9 M10 X 1.5 64 35 19 * Refer to p.4.4-8 regarding the rod end nut which is included

100

material 1 Resin Refer to . on page 14 for replacement parts. 10 Sound absorbing material 2 Resin 11 Valve plate PBT Specific Product Precautions Refer to m on page 14 for replacement parts. 12 Knob POM 13 Needle Brass (Electroless nickel plating) 14 Port block assembly Aluminum alloy/NBR/Stainless steel Refer to b on page 14 for replacement parts. 15 Supply valve, Release valve Refer to

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Environment

1 Controller/Driver type*1 !

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

1 !6 !

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.