CM2

41 47.3 8 10 46.5 M14 x 1.5 32 With Air Cushion Built-in One-touch Fittings Bore size (mm) Bore size (mm) ZZ Z N NA NN P S Q P N1 WB G WA Bore size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 37 62 15 24 M20 x 1.5 1/8 6 8 8.5 13 17.5 21.5 25 25 25 152 41 62 15 30 M26 x 1.5 1/8 6 8 13 17.5 10.5 24.5 32 32 32 154 41 64

Air Cylinder Series CA2

to 500 30 27 71 60 22 44 16 32 10 60 9.0 12 80 42 100 15 8 M8 x 1.25 50 20 to 600 35 32 81 70 27 52 20 40 10 70 9.0 12 90 50 110 17 11 M8 x 1.25 Up to 600 63 35 32 101 85 27 64 20 40 10 86 11.5 15 105 59 130 17 11 Up to 600 20 to 600 M10 x 1.25 80 40 37 119 102 32 78 25 52 14 102 13.5 18 130 76 160 21 13 Up to 750 20 to 750 M12 x 1.75 100 Up to 750 20 to 750 40 37 133 116 41 92 30 52 14

AC Servo Motor Driver (Pulse input type/Positioning type ）

STARTUP 41 to 4-37 4.

CL

CLS CLQ Bore (mm) Z Y ZZ M8 x 1.25 PH P PG PL S PW X 21 N NA LZ MM NN K LH LC LD LS LX LT 55 1/8 1/8 1/8 1/4 M20 x 1.5 196 8 20 38 127 20 22 19.5 3.2 40 167 6.8 24 15 4 25 5 20 MLGP M26 x 1.5 M10 x 1.25 210 8 25 20 41 137 24 27 24 55 3.2 40 177 6.8 30 15 4 28 5.5 25 M26 x 1.5 M10 x 1.25 212 8 25 20 41 139 24 27 24 55 3.2 40 179 6.8 34.5 15 4 28 5.5 32 RLQ M32 x 2 M14 x 1.5 250 10 27 23 41

CA2

+0.1 +0.070 0 up to 600 20 to 600 35 32 27 52 20 40 10 17 11 M8 x 1.25 18 70 38 7 18.0 12 63 +0.3 +0.1 +0.070 0 up to 600 20 to 600 35 32 27 64 20 40 10 17 11 M10 x 1.25 18 85 49 7 25.0 16 MB 80 +0.3 +0.1 +0.084 0 up to 750 20 to 750 40 37 32 78 25 52 14 21 13 M12 x 1.75 22 102 61 10 31.5 20 100 +0.3 +0.1 +0.084 0 up to 750 20 to 750 40 37 41 92 30 52 14 21 16 M12 x 1.75 26 116 64 10 35.5

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

44.5 37 24 16 61.5 26.5 32 64 20 3/4" 26 30 74 78 41 49 26 74 30 41 78 49 1" 24 22.5 26.5 24.5 67.5 62.5 70 64.5 32 24 37 29 78 74 41 49 8 18 36 70 67.5 32 37 24 26.5 67.5 70 32 37 24 22.5 67.5 62.5 26.5 24.5 32 24 70 64.5 37 29 3/4" 1/2" 22.5 19.5 24.5 22.5 62.5 57 64.5 60 24 21 29 25 26 30 74 78 41 49 26 74 30 41 78 49 1" 16 17 49 50 16 20 24 67.5 26.5 32 70 37 3/4" 341 Series LQ3 Space

CL

I NA N S PW ZZ Z PG P NN MM ZZ PL H GR GQ Bore (mm) 20 168 1/8 1/8 1/8 1/4 20 24 20 15 22 5 37 28 181 4 8 M20 x 1.5 38 4 6 5 127 41 M8 x 1.25 19.5 25 182 25 30 24 15 27 5.5 41 33.5 195 7 8 M26 x 1.5 41 7 9 6 137 45 M10 x 1.25 24 32 184 32 34.5 24 15 27 5.5 41 37.5 197 7 8 M26 x 1.5 41 7 9 6 139 45 M10 x 1.25 24 40 217 40 42.5 24 21.5 29 7 45 46.5 233 8 10 M32 x 2 41 7 11 8 167 50 M14 x 1.5

A

, 200, 300, 500 177 136 27 16 52 57 71.5 M14x1.5 24 5 15 50 200, 300, 500 194 144 32 20 64 71 85.5 M18x1.5 22.5 7 18 63 200, 300, 500 196 145 32 20 77 84 98.5 M18x1.5 21 7 18 Bore (mm) L M N O P Q R S T X Z 32 41 34 5.5 M6X1 Rc(PT)1/8 56 20 2.5 57.5 30 18 40 41 40 5.5 M6X1 Rc(PT)1/8 62 20 2.5 64.5 30 18 50 51 50 6.6 M8X1.25 Rc(PT)1/4 61.5 20 2.5 76.5 35 22 63 51 60 9 M10X1.5 Rc(PT)1/4 64

5

(mm) Bore size A AL B1 CD CI CX D E F FL G H H1 I K KA L MM NA NN 20 18 15.5 13 8 20 12 8 20 0 0.033 13 10.5 8 41 5 28 5 6 12 M8 x 1.25 24 M20 x 1.5 25 22 19.5 17 8 22 12 10 26 0 0.033 13 10.5 8 45 6 33.5 5.5 8 12 M10 x 1.25 30 M26 x 1.5 32 22 19.5 17 10 27 20 12 26 0 0.033 13 10.5 8 45 6 37.5 5.5 10 15 M10 x 1.25 34.5 M26 x 1.5 40 24 21 22 10 33 20 14 32 0 0.039 16 13.5 11 50 8 46.5 7 12

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

Port size M5 x 0.8 t 10.5 15 18 20 t 10.5 15 18 20 Series Assembly part no.

Modular/F.R.L. Units Series AC

27 4.5 5.5 12 127 30 3.2 141 123 29 43 24 33 5.5 7 14 161 160 41 4 194 166 186 41 57 35 7 7 14 161 160 41 4 194 166 186 41 57 35 7 9 18 195 194 50 4 226 200 220 48 75 40 9 9 18 195 194 50 4.6 226 200 220 48 80 40 9 11 20 272 271 70 6.4 303 276 296 60 96 50 11 11 20 287 286 70 6.4 318 292 312 60 96 50 11 11 20 288 287 70 6.4 319 293 313 60 101 50 11 Note) For the AC20 only, the position

SMC Pneumatic Clean Series

MM Relief port FX 20, 25 Eh8 D FZ I 20 to 32 Standard port Relief port Width across flats NA 4-FD 45 1.5 AL 32, 40 A F N K N S + Stroke FT H FY Z + Stroke ZZ + Stroke 40 (mm) 4 7 FD E 20-0.033 0 52 40 40 34 B FX FZ FY G FT 13 8 AL D K MM NA NN B1 B2 Bore size ZZ Z H H2 H1 S P N I F C2 A 66 60 60 60 75 75 75 11 8 8 8 40 32 25 20 24 22 22 18 50 45 45 41 8 8 8 6 6 5 22 17 17 13 41 32 32 26

JIS Standard Hydraulic Cylinder

Related Products 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C YH2-06C YH2-06B YH2-10C M5 x 0.8 +0.07 0 +0.07 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 +0.07 0 +0.084 0 +0.1 0 +0.1 0 +0.1 0 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M16 x 1.5 L1 DM5 x 0.8 M6 x 1.0 25 76 60 41 32 16 16 12.5 20 M20 x 1.5 M5 x 0.8 M6 x 1.0 31.5 90 70 50 40 20 20 16 20 M24

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

20 20 23 Z 8 8 8 10 LD 4 4 4 4 LT LS 25 28 28 30 Bore size 40 47 47 54 13 17 17 22 26 32 32 41 26 26 26 31 41 45 45 50 5 6 6 8 8 8 8 10 21 25 25 27 149 153 155 191 The bracket is shipped together.

0.55

Piping specifications Manifold base Weight: W [g] Stations: n Applicable valve Applicable stations Note) Series Base model 1P (SUP) port type 3R (EXH) port type Port size VV3P3-41 Common VP300 2 to 20 stations W = 110n + 90 1/4 VP344 VV3P3-42 Individual VV3P5-41 Common VP500 Common 2 to 20 stations W = 190n + 150 3/8 VP544 VV3P5-42 Individual VV3P7-41 Common VP700 2 to 20 stations W = 410n

Table of Contents

20 20 74.5 90 98 30 35 40 19 25 25 20 23 25.5 29 32 32 VX31 VX32 VX33 1 4 1 8 3 8 1 4 27.5 27.5 3 8 1 4 17-3-85 6 The models VX31/32/33 have been revised.

CM2

I-020B I-032B I-040B E1 L1 MM H A1 MM +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 +0.058 0 +0.058 0 +0.070 0 0.1 0.2 0.1 0.2 0.1 0.3 9 14 10 16 20 36 M8 X 1.25 9 9 10 14 18 46 66 41 9 M8 X 1.25 M10 X 1.25 9 14 10 18 20 38 9 9 10 14 22 48 69 45 9 M10 X 1.25 M14 X 1.5 15.5 16 20 14 22 24 55 12 16 20 24 69 92 50 12 M14 X 1.5 Double Knuckle Joint (mm) Bore size 20 25/32 40 A L NX2 R2 U2

Table of Contents

-12S 90 12 9 11 9 20 105 Normally open Normally closed MHKL2-16S 16 17 14 14.6 28.6 165 MHKL2-20S 20 32 18 16 34 314 MHKL2-25S 25 53 22 19 41 565 MHKL2-12C 12 11 11 9 20 105 L1 MHKL2-16C 16 22 14 14.6 28.6 166 L2 MHKL2-20C 20 40 18 16 34 314 MHKL2-25C 25 63 22 19 41 565 Note) At the pressure of 0.5 MPa, when gripping point L is 20 mm.

LEC-OM071xx

Pn081 Pn100 2 Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 Speed Loop Integral Time Constant Pn101 15 to 51200 0.01 ms 2000 Immediately Tuning Pn102 2 Position Loop Gain 10 to 20 0.1/s 400 Immediately Tuning Pn103 2 Moment of Inertia Ratio 0 to 20 1% 100 Immediately Tuning 5.8.1 Pn104 2 2nd Speed Loop Gain 10 to 20 0.1 Hz 400 Immediately Tuning 2 2nd Speed Loop Integral Time

AC

Pressure Characteristics Initial setting P1: 0.7MPa P2: 0.2MPa Q: 20 l/min (ANR) Model Part No. A 30 41 136314 136414 ARM2500 ARM3000 B 34 40 C 70 75.5 D 5.4 6.5 E 15.4 8 F 55 53 G 2.3 2.3 Precautions Be sure to read before handling.