LEC-OM071xx

Byte Data 1 CD 2 AB 3 34 4 12 8.12.2 Specifying Units The units for the user command and parameter data can be selected. The system of units is set in the common parameters. For the details on the common parameters, refer to 8.27 Common Parameters. (1) Speed The following units can be selected. Settings are made with common parameters 41 and 42.

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

248 237.5 213 17.5 199 7 260.5 250 237 12 223 8 285.5 275 261 12.5 247 9 310.5 300 285 13 271 10 335.5 325 309 13.5 295 11 360.5 350 333 14 319 12 385.5 375 357 14.5 343 L1 L2 L3 L4 L5 1.2-97 Type 41 42 Type 41P 42P Type43 Type43P Manifold Options For types 41P, 42P, 43P Blanking plate assembly For types 41, 42, 43 Blanking plate assembly Series Assembly part no.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

AC

Model Port size A B C D M N P R B B E F G H J K L AL 58 90 117 117 154 164 195 200 205 M5 X 0.8 11 17 25 35 37.5 40.5 48 48 48 70 103.5 140 150 184.5 189.5 268 282 282 26 56.8 60.8 60.8 65.5 69.5 75.5 75.5 78 25 40 53 53 70 70 90 95 95 29 45 58.5 58.5 77 82 97.5 102.5 102.5 25 30 41 41 50 50 70 70 70 4.5 5.5 7 7 9 9 12 12 12 20 24 35 35 40 40 50 50 50 17.5 22 34.2 34.2 42.2 46.2 55.2 55.2

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

-40 VV5Z5-41 VV5Z5-42 Before using, refer to page 3-3-8.

VQ5000

4 (A) port 13.52 (B) port 2 4 SMC SMC 2 4 A B 40 53 66 162 50 41 37 31.5 18 A B A B 53 40 66 B A 1 3 5 14 12 35 53 2-6.5 Mounting hole Manual override 5 1 3 12 14 Manual override 35 53 2-6.5 Mounting hole 18 31.5 37 41 50 98 G1/2 Electrical entry G1/2 PE X Electrical entry R1 R2 P 18.4 PE X 27.5 27.5 Rc 1/8 PE port Rc 1/8 External pilot port R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

U 19.5 22.5 24.5 27.5 31.5 35 41 47.5 U 23 26 28 31 35 38.5 44.5 51 U 26 29 31 34 38 41.5 47.5 54 U 22 25 27 30 34 37.5 43.5 50 12 16 20 25 32 40 50 63 7-6-83 84 Series CQ2KW Dimensions: 12 to 32/Without Auto Switch Basic style (Through-hole): CQ2KWB 12, 16 20, 25 12 to 25 2-H thread effective depth C (Also back cover) 2-N through (Port size) Piston rod cross section Width across flats K2

CQ2

Bore (mm) C1 X H1 L1 12 16 20 25 10.5 12 14 17.5 M5 X 0.8 M6 X 1.0 M8 X 1.25 14 15.5 18.5 22.5 9 10 12 15 M10 X 1.25 Standard (mm) 10st A 10st B Bore (mm) E E2 I K M L N D C E1 O U W H F S 5st 5st 38 40.5 41.5 42.5 6.5 Depth 3.5 12 16 20 25 36.5 39 41 42.5 41.5 44 46 47.5 33 35.5 36.5 37.5 23 26 30 33 13 15 17 19.5 14 17 19 22 7 8.5 10.5 12 32 38 47 52 5 6 8 10 22 28 36 40 3.5 3.5 5.5 5.5

Table of Contents

Back port (Refer to P . 8-12-3.)

Air Slide Table

Page 29 16 Page 35 20 Page 41 25 Page 47 When the features as shown below are required for 8 and 12 sizes, refer to the MXQC, single side-ported type as well.

SMC Pneumatic Clean Series

32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5 32-0.039 0 21 82 36 10 8 M32 x 2 21.5 41.5 19 Air cylinder CM2 2122CM2/ 101110112122Head side flange style (G) / CM2G, CM2G With rubber bumper Standard

Plug-in/Plug Lead: Single Unit

VQ0 55.5 M5 ground screw VQ4 34.5 U side n VQ5 12 X VQZ B 2 A 4 6 B A VQD B 2 A 4 SMC SMC SMC SMC SMC 5 B A A 4 B 2 4 B A L2 L1 A 4 B 2 3 B A A 4 B 2 2 B A P = 41 58.5 34.5 48 P = 41 A 4 B 1 B A 2 68.5 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n 9 445 465 8 404

SYJ300/500/700

12 12 12 20 20 20 20 54.5 54.5 54.5 54.5 57.6 Refer to page 4-4-61 for dimensions with connector cable. 4-4-41 42 Series SYJ700 Manifold Specifications Manifold Specifications Type 20 Type 21 Type 40 Type 41 Type 42 For internal pilot Model Type 21R Type 41R Type 42R For external pilot Single base/B mount Manifold type Common SUP, common EXH P (SUP), R (EXH) 2 to 20 stations Valve stations

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Type 41 Applicable solenoid valve 10-SYJ314M-(-Q) 10-SYJ324M-(-Q) How to Order 10 SS3YJ3 41 05 M3 Type 41 Type S41 Pilot valve is on the A port side. ( ) Clean series Applicable blanking plate assembly Refer to page 610.

Electric Actuator/Slider Type

Note 12) For an actuator with lock, add the power consumption for the lock.

ZX

to plug connector Y 24 VDC and 12 VDC are applicable to 0.45 W.

Floating Joint

-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Compact Cylinder

) 35.5 (38) 7 (16) 20 (Rod end lock) 8 (10) 37 (39) 12 (14) 41 (43) 25 (Head end lock) 32 (35) 5.5 (14) 36 (39) 9.5 (18) 25 (Rod end lock) 32 32 40 40 50 50 63 63 8 35 12 41 10 40.5 12.5 44.5 37.5 3 43 3.5 45.5 5 44.5 6.5 12 39 16 45 14 44.5 16.5 48.5 41.5 7 47 7.5 49.5 9 48.5 10.5 38.5 4 44 4.5 46.5 6 45.5 7.5 9.5 36.5 13.5 42.5 11.5 42 14 46 39 4.5 44.5 5 47 6.5 46 8 6.5 33.5 10.5 39.5