End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

21 71 32 65.8 80.5 M12 X 1.75 M22 X 1.5 116 204 40 37 11 17 23 37 21 0 40 22 up to 750 92 30 52 14 21 21 72 116 16 20 41 72.8 87.5 M12 X 1.75 M26 X 1.5 126 215 40 37 17 40 21 40 11 23 0 26 With rod boot Bore (mm) e Stroke range (mm) f h ZZ l 40 50 63 80 100 1/4 stroke 20 to 500 43 11.2 59 154 1/4 stroke 167 20 to 600 52 11.2 66 1/4 stroke 20 to 600 52 11.2 66 178 1/4 stroke 20 to 750 65

M-E05-1-LQ1

LQ1-3N08 LQ1-3B08 3-08 LQ1-3N08 LQ1-3B08 LQ1T32-ST2 3 Applicable body size 3 3-08 LQ1-3N08 LQ1-3B08 3-08 LQ1-3N08 LQ1-3B08 LQ1T32-ST3 3 3-08 LQ1-3N08 LQ1-3B08 Applicable body size 3 LQ1T32-ST4 3 Applicable body size 3 3-08 LQ1-3N08 LQ1-3B08 LQ1T41-ST1 4 4-12 LQ1-4N12 LQ1-4B12 Applicable body size 4 4-12 LQ1-4N12 LQ1-4B12 LQ1T41-ST2 4 Applicable body size 4 4-12 LQ1-4N12 LQ1-4B12 4-12 LQ1

OMU0023

Modbus ASCII protocol (ASCII notation) Request data : 01 08 0 1234 B1 [CR,LF] Response data (normal response) : 01 08 0 1234 B1 [CR,LF] (ASCII hexadecimal notation) Request data 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah Response data (normal response) 3Ah 30h 31h 30h 38h 30h 30h 30h 30h 31h 32h 33h 34h 42h 31h 0Dh 0Ah ii.

ZX

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

Vacuum Module Series ZX

Supply port location 01 Nil Common exhaust Individual exhaust 1 Thread type C 1 8 Nil Rc 08 8 F G T NPTF (6) Digital vacuum switch unit Left side Right side R L B 21 C 0X ZSE3 D (3) Ejector assembly Both sides Unit for replacement 05 1 D W ZX1 Output specifications Unit for replacement Nozzle diameter Ejector exhaust 2 outputs/without analog output 2 outputs/with analog output 1 output

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

G P G P t = 1 mm x 2 t = 0.5 mm x 2 (21) (6) 3 3 MK t = 1 mm x 2 t = 0.5 mm x 2 CKQ CLKQ (66) 330.05 330.05 CK1 38 With shims (Clamping height: HIGH type) With shims (Clamping height: LOW type) CLK2 33 33 (66) 72 120 38 C W W K 120 SR SR 65 (Guide tube O.D.)

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Vacuum Pad

Note 3) ZP3B-T2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-(04/06/08)UM; ZP3-(04/06/08)B; ZP3-T(04/06/08)UM;(J/K)3-@ ZP3-T(04/06/08)B;(J/K)3-@ ZP3-T(04/06/08)UM;(J/K)6-@ ZP3-T(04/06/08)B;(J/K)6-@ ZP3-T(04/06/08)UM;(J/K)10-@ ZP3-T(04/06/08)B;(J/K)10-@ ZP3-T(04/06/08)UM;(JB/K)15-

Cylinder with Lock

A A1 E1 MM R1 U1 L1 NDH10 NX B C D d H 40 50, 63 80 100 I-04A I-05A I-08A I-10A NT-04 NT-05 NT-08 NT-10 40 50, 63 80 100 0.1 0.3 +0.070 0 22 25.4 21 M14 x 1.5 8 69 22 24 55 M14 x 1.5 12 16 15.5 20 0.1 0.3 +0.070 0 27 31.2 26 M18 x 1.5 11 12 16 74 27 28 60 M18 x 1.5 15.5 20 0.1 0.3 +0.070 0 28 32 37.0 31 M22 x 1.5 13 91 37 36 71 M22 x 1.5 22.5 26 18 0.1 0.3 +0.084 0 30 41 47.3 39 M26 x 1.5

Compact manifold regulator ARM5 Series

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

H/DL/L/LL

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

LEC-OM02904

PB06 GD2 PB07 PG1 PB08 PG2 PB09 VG2 PB10 VIC 1 2000r/min5s 150r/min 100 10% 2 (2) 2 21 (No.PB06) 2 No.

CG1

Air cushion (mm) E F ZZ WA TA S (F1) GA (E1) Bore (mm) 32 40 50 63 80 100 119 (127) 20 17 77 (85) 18 18 2 17 2 136 (145) 21 18 84 (93) 19 25 2 21 2 157 (169) 23 20 97 (109) 21 30 2 26 2 157 (169) 23 20 97 (109) 21 32 2 26 2 190 (204) 30 116 (130) 28 40 3 32 3 191 (205) 31 117 (131) 29 50 3 37 3 These dimensions and other dimensions not indicated here are the same as standard.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

A MM A1 E1 L1 NDH10 NX I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 16 20 22 28 38 44 20 25, 32 40 50, 63 80 100 8.5 10.5 14 18 21 21 10.3 12.8 12 16 21 24 25 30 30 40 50 55 M8 x 1.25 11.5 14 14 20 27 31 34 41 42 56 71 79 Applicable bore (mm) 8 10 10 14 18 22 8 10 18 22 28 32 +0.058 0 0.2 0.4 R1 U1 ND Applicable pin part no. L MM NZ NX Part no.

SZ3000

Double wiring specification Double wiring specification 04 05 08 09 4 stations 8 stations 5 stations 9 stations Specified layout (up to 16 solenoids possible) Specified layout (up to 8 solenoids possible) ... ... ... ... 08 16 8 stations 16 stations Note 1) Double wiring specifications: Single, double and 3 position solenoid valves can be used at all of the manifold stations.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AK 36.1 31.1 32.1 27.1 R 1/8 14.2 14.2 18 21 37.2 41.7 40.1 42.6 45.6 48.4 13.5 18.5 16 17 18.5 21 22.9 28.2 21.9 25.2 28.2 31 10.9 12.9 10.9 12.9 14 16.2 16.2 18.4 18.3 20.2 ASS 33 40.4 35.4 34.4 29.4 R 1/4 18.5 18.5 ASR 36 40 Reference dimensions for M5 and R threads after installation. 12.9 ASF Inch Size A M1 L5 Max.

VFM300

Toggle lever VFM350-02-08 T.T.

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Type 60P Flat Ribbon Cable Type (26 pins) Without Power Supply Terminal With Power Supply Terminal Positive common Negative common Common 26 26 26 Positive pin (Common) Positive pin 25 25 25 Station 12 SOL.b 24 24 24 Negative pin Negative pin (Common) SOL.a 23 23 23 Station 11 SOL.b 22 22 22 Unused terminal Unused terminal SOL.a 21 Station 20 21 Station 20 21 20 20 6 6 SOL.b Station 5 SOL.b

VZM400

Toggle lever VZM450-01-08 T.T.