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Membrane Dyer Series IDG Standard specifications/Single style (standard dew point 20C (4F)) Model Standard dew point 20C IDG5 IDG10 IDG20 IDG30 IDG50 Fluid Compressed air Macromolecular membrane dryers that act like filters Range of operating conditions Standard performance conditions Inlet air pressure MPa (psi) 0.3 to 0.85 (43 to 123) 0.3 to 1.0 (43 to 145) Inlet air temperature C (F) Note

Description Material 1 Rod Cover Aluminum alloy NCA200-02AQ3609-S NCA200-03-Q3609-S NCA250-02AQ3610-S NCA250-03-Q3610-S NCA325-02AQ3611-S NCA325-03-Q6311-S 2 Head Cover Aluminum alloy 3 Cylinder Tube Aluminum alloy Please See below for How to order Cylinder Tube 4 Piston Rod Carbon steel Available only as an Assembled Item.

36.5 43.5 41.5 78 88 CH2F 41.5 36.5 41.5 36.5 41.5 76 86 50 CH2H 42 36 42 36 42.5 40 77 87 CH2E 47 43 48.5 43 50.5 47.5 85 95 CH2F 46.5 43 46.5 43 48.5 83 93 63 CH2H 47 43 48.5 43 50.5 47.5 85 95 CH2E 57 55.5 58.5 55.5 59 55.5 93.5 103.5 CH2F 80 56.5 55.5 56.5 55.5 57.5 92 102 CH2H 57.5 55.5 59 55.5 59.5 56 94 104 CH2E 66.5 67 66.5 67 69.5 65 104 114 CH2F 100 65.5 67 65.5 67 68 102.5

43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 11 11 11 11 11 16 16 18.5 60 70 86 102 116 145 161 182 MGC MGF CY1 MY1 In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than the boot outer diameter "e" W/o rod boot W/ rod boot Bore (mm) 40 50

43 43 15 17 17 21 21 16 16 15 17 17 21 21 16 16 11 11 11 11 11 16 16 14 18 18 22 26 31 31 36 30 35 35 40 40 50 50 56 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 14 14 14 8 11 11 13 16 M8 M8 M10 X 1.25 M12 M12 M14 X 1.5 M14 X 1.5 M16 X 1.5 6 7 7 11 11 15 15 17 9 9 40 45 50 65 75 85 100 106 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 18.5 18.5

12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

40 48.5 43 50 43 85 95 80 50 50 55.5 50 56 51 57 51 59 93.5 104 100 59 59 63 59 63.5 58.5 65 58.5 70 104 114 The auto switches listed below cannot be mounted on 63.

43 43 22 27 27 32 41 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 Note) In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than

Mitsubishi Electric Corporation Yaskawa Electric Corporation 02 03 04 05 05 5m Cable length 2m 3m 4m 5m Applicable cables Model Manufacturer part no.

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

(Total Travel) 40 Hexagon nut thick 5, across flats 17 (Pilot exhaust port) JIS Symbol 0.5 MPa supply 2-3.2 mounting hole 15 N F.O.F. 40 T.T. 5-6-44 43 5 Port Mechanical Valve Series VZM500 Series VZM500 Push button (Mushroom) VZM550-01-30R/B/G/Y Panel mounting hole SA (Pilot exhaust port) JIS symbol VA SA VA VM 0.5 MPa supply Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

EX9 EA 03 Mounting specification 03 04 Direct mounting DIN rail mounting EX9-EA03 EX9-EA04 66 66 Mounting hole for 2 x M4 12.5 60 12.5 10 10 60 13.2 13.2 18 6 75 75 18 6 1678 Series EX250 Integrated Type/ For Input/Output How to Increase Input/Output Blocks, Procedure Drawing u y t q e w r EX Parts List Note No. Description Part no.

Inch size Millimeter size Port size 5/32 04 03 4 M5 M5 x 0.8 Thread type 1/4 06 07 6 U10/32 10-32UNF 5/16 08 09 8 Metric system thread (M5) 01 1/8 3/8 10 11 10 Nil Unified thread (10-32UNF) 02 1/4 1/2 12 13 12 Rc(PT) 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tube O.D.

For Water Digital Flow Switch Series PFW How to order PFW7 20 03 27 Integrated display type Flow rate range 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 04 20 40 Unit specification Thread type Nil M With unit switching function Fixed SI unit Note) Rc NPT G Nil N F Wiring specification Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l 3m lead wire with connector Without lead wire

Applicable bore size B (C) (D) d H NT-02 20 13 (15.0) 12.5 M8 x 1.25 5 NT-03 25, 32 17 (19.6) 16.5 M10 x 1.25 6 NT-04 40 22 (25.4) 21.0 M14 x 1.5 8 Part no.

43 43 22 27 27 32 41 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21 21 16 16 18.5 11 11 11 11 11 16 16 18.5 8 11 11 13 16 M8 x 1.25 M8 x 1.25 M10 x 1.25 M12 x 1.75 M12 x 1.75 M14 x 1.5 M14 x 1.5 M16 x 1.5 6 7 7 11 11 15 15 17 14 18 18 22 26 31 31 36 Note) In installing an air cylinder, if a hole must be made to accommodate the rod portion, make sure to machine a hole that is larger than

HRR Series 5.5 Advanced setting mode 5-43 HRX-OM-W002 Chapter 5 Display and Setting of Various Functions Table 5.5-1 List of alarms which allow to continue pump operation Display Alarms which allow to Alarm no.

ALARM01 Water Leak Detect FLT 01 ALARM03 RFGT High Press FLT 03 ALARM04 CPRSR Overheat FLT 04 ALARM05 Reservoir Low Level FLT 05 ALARM06 Reservoir Low Level WRN 06 ALARM07 Reservoir High Level WRN 07 ALARM08 Temp. Fuse Cutout FLT 08 ALARM09 Reservoir High Temp. FLT 09 ALARM10 Return High TempWRN 10 ALARM11 Reservoir High Temp.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2001 SMC CORPORATION All Rights Reserved 1st printing November, 2001 D-SMC.L.A. P-80 (YG) All specifications in this catalog are subject to change without notice. Printed in Japan. This catalog is printed on recycled paper with concern for the global environment.

Ltd. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659, JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2002 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.