Cylinder with Lock Series CNS

19 14 190 100 230 16 155 Up to 1000 50 47 161 160 245 1/2 3/8 128 136 36 90 63 35 14 19 20 212 112 255 16 180 Up to 1000 56 53 182 180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 18.5 215 Up to 1200 (mm) Bore size (mm) GB GL GR K KA M N P Q R S T V VA H ZZ J MA MM 125 140 160 23 25 30 15 31 19 35 1/2 85.5 25 303 87.5 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 28 30 30 15 31 19

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

(L3) L2 3 L1 2 1 A 4 B 2 14 Stations 4 P=10.5 17.7 D side 2n-M5 8 8 44 30.5 67 (Single, rubber) 69.5 (Single, metal) A 4 14.5 B 2 95 (Double) 103.5 (3 Position) 300 (Lead wire length) 14 6.5 Cover diameter 1.6 Cross section 0.34mm2 M5 57.5 31 26 13 55 X 13.6 R1 R2 5 3 1 P R1 R2 5 3 1 P (29) 20 6 8.5 PE port 4-Rc(PT)1/8 R1, R2(EXH) port 15 16.5 16.5 15.5 15.5 33 57 (30.5) 7 2-Rc(PT)1/8 P

AC Servo Motor Driver (CC-Link Type)

Wiring . 12 3.1 Power Supply Wiring . 12 3.2 I/O signal connection . 13 3.2.1 Connection example (Sink I/O interfaces) . 13 3.2.2 Source I/O interfaces . 14 3.3 Wiring of PLC and driver . 15 4. Parameter list (Driver side) . 17 5.

HRX-OM-W032

This function resets the accumulated operation time. 5.16 14 Anti-freezing Circulating fluid is protected from freezing during winter or night.

o

oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31

o

oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

oqir -M5, BgT I l , NPTF 2 porrs i 'u NPTF z Po't" ,D# tp pod, l l -r-f *_\ \ 1 l \ 0.39 (1ol n ) 4 6 7 R 10 1 1 1 1 2 13 14 15 16 18 19 L1 (39.5) 1.57 (50) 2.8 (60.5) 2.ffi (7r) 3.2 (81.5) (92) 4.O4 4.45 002.5) (11s) 4.86 (r23.5) 5.28 5.69 (134) (144.5) 6.10 fts5) 6.52 (165.5) 6.93 076) 7.34 (1e6.51 (197) 4.17 (207.58.58 (218) 9.00 (228.5) L2 124 {31,5) (42) 2.O7 (52512.44 (63) 2.g r 3.31

HRX-OM-M090

EC DECLARATION OF CONFORMITY Original declaration SMC Corporation 4-14-1 Soto-Kanda, Chiyoda-ku, Tokyo 101-0021 Japan declares under our sole responsibility that the following equipment: Thermo Chiller HRS Series _ Serial No.: o001 to Z999 conforms with the following directive(s) and harmonized standards: Directive Harmonized standards Machinery Directive 2006/42/EC EN ISO12100:2010 EN60204

3 Port Air Operated Valve

Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 Bore size (mm) CX

13

Vacuum regulator 13-14-2 Series IRV 13-14-3 Controls the vacuum pressure in accordance with external electric signals.

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

Approx. 216 with AMC610-10 installed (approx. 261.5 with AMC810-14 installed) D side entry (LD) Approx. 100 with AMC610-10 installed Approx. 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed 118 (135) 159 (172.5) 159 (172.5) (approx. 105 with AMC810-14 installed) (105 with AMC810-14 installed) 118 (135) (approx. 105 with AMC810-14 installed) (105 with

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Manifold Specifications for 41 and 42 Type Manifold Specifications for 41 and 42 Type SS5Y5-41 SS5Y5-42 SS5Y7-42 Port size Flow characteristics Model 52-SY740 52-SY540 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) 1,5,3 Model Applicable valve 4,2 (A,B) (P ,EA,EB) b Cv c[dm3/(sbar)] c[dm3/(sbar)] Single base / B mounting Manifold style b Cv SS5Y5-41 1 (SUP) / 3/5 (EXH) Common SUP / Common EXH 1/4

JXCx-OMU0026

Power supply connector . 42 6.1 Connector specifications . 42 (1) Motor drive power connector : M PWR . 42 (2) Control power supply connector: CI . 42 6.2 Wiring . 43 (1) Wiring of the power supply connector. 43 (2) Wiring of the stop switch . 43 (3) Wiring of the lock release . 44 6.3 Wiring of shutdown circuit . 45 (1) Stop (Stop switch) . 45 (2) Stop (Stop relay contact) . 45 (3) Motor

2/3 Port Valve

L 108 117 130 135 N 93 102 N 79.5 87.5 1 4 3 8 , 50 63 80 90 35 35 40 40 52 60 68 73 25.5 33 41 44 11 14 18 21 6 7 7 7 89 97 112 117 25 25 28 28 67 75 87 92 40 52 65 70 7.5 8.5 9 9 22 28 36 42 5.5 6.5 6.5 6.5 24 33 42 47 1.6 2.3 2.6 2.6 26 30 38 43 14 17 22 22 23 23 25.5 25.5 28 35 43 45 1 2 3 4 1 101.5 115.5 106.5 120.5 4.1-82 VXZ22/23 Conduit: C FN.C.E Normally closed EN.O.F Normally open

TABLE OF CONTENTS

COIL NO. 6 7 12 14 5 6 10 12 1.8 2.2 3.7 4.4 2C-102-A24 2C-103-A24 2C-104-A24 2C-105-A24 2C-2-K24 2C-3-K24 2C-4-K24 2C-5-K24 19 24 28 30 38 17 21 24 26 33 6 7.5 9 9.5 12 2C-106-A24 2C-107-A24 2C-108-A24 2C-109-A24 2C-110-A24 2C-6-K24 2C-7-K24 2C-8-K24 2C-9-K24 2C-10-K24 48 55 77 120 138 42 48 67 100 120 15 18 24 38 45 2C-111-A24 2C-112-A24 2C-113-A24 2C-114-A24 2C-115-A24 2C-11-K24 2C-12-

Plug-in/Plug Lead: Single Unit

(135) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) ( 105 with AMC810-14 installed) 158.7 158.7 6-Rc 3/4 1(P), 5(R1), 3(R2) port 6-Rc 3/4 1(P), 5(R1), 3(R2) port 2-G1 (Electrical entry) 47.5 12 21 47.5 R2 R1 36 PE 21 4.4 4.4 12 2-Rc 1/8 (pilot EXH port) 29.5 29.5 29.5 29.5 2-Rc 1/8 (Pilot EXH port) 83 L n Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum

Vacuum Pad

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

Vacuum Pad

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter

Vacuum Pad

tubing: 6 Applicable tubing: 6 Applicable tubing: 6 Width across flat 14 Width across flat 14 Width across flat 14 2 2 2 2 2 2 7 18 12 12 18 18 12 M12 x 1 M12 x 1 M12 x 1 33.2 33.2 Width across flat 14 Width across flat 14 Width across flat 14 7 5 5 5 7 1.8 1.8 1.8 1 1.2 1.2 10 13 16 11 14 17 9 With Adapter: Vacuum Inlet Series ZP3 Vertical 4 to 8 Pad diameter Vertical Dimensions/With Adapter